12/11/2012	8:37:37 AM	Main Vac valve closed
12/11/2012	8:37:50 AM	Main Vac valve opened
12/11/2012	8:37:57 AM	Recipe started at 8:37 AM
12/11/2012	8:37:57 AM	Helium valve closed
12/11/2012	8:37:57 AM	H2 valve closed
12/11/2012	8:37:57 AM	BCl3 valve closed
12/11/2012	8:37:57 AM	PH3 valve closed
12/11/2012	8:37:57 AM	SiCl4 pre valve closed
12/11/2012	8:37:57 AM	SiCl4 post valve closed
12/11/2012	8:37:57 AM	Main Vac valve closed
12/11/2012	8:37:57 AM	Bypass valve closed
12/11/2012	8:37:57 AM	Bubbler valve closed
12/11/2012	8:37:57 AM	Helium MFC set to  0.000000
12/11/2012	8:37:57 AM	H2 MFC set to  0.000000
12/11/2012	8:37:57 AM	BCl3 MFC set to  0.000000
12/11/2012	8:37:57 AM	PH3 MFC set to  0.000000
12/11/2012	8:37:58 AM	SiCl4 MFC set to  0.000000
12/11/2012	8:37:58 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:37:58 AM	Tube furnace set to 0
12/11/2012	8:38:01 AM	Helium valve closed
12/11/2012	8:38:01 AM	BCl3 valve closed
12/11/2012	8:38:01 AM	PH3 valve closed
12/11/2012	8:38:01 AM	SiCl4 pre valve closed
12/11/2012	8:38:01 AM	SiCl4 post valve closed
12/11/2012	8:38:01 AM	Main Vac valve closed
12/11/2012	8:38:01 AM	Bypass valve closed
12/11/2012	8:38:01 AM	Bubbler valve closed
12/11/2012	8:38:01 AM	H2 valve opened
12/11/2012	8:38:01 AM	Helium MFC set to  0.000000
12/11/2012	8:38:01 AM	H2 MFC set to  500.000000
12/11/2012	8:38:01 AM	BCl3 MFC set to  0.000000
12/11/2012	8:38:01 AM	PH3 MFC set to  0.000000
12/11/2012	8:38:01 AM	SiCl4 MFC set to  0.000000
12/11/2012	8:38:01 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:38:01 AM	Tube furnace set to 0
12/11/2012	8:39:18 AM	Helium valve closed
12/11/2012	8:39:18 AM	BCl3 valve closed
12/11/2012	8:39:18 AM	PH3 valve closed
12/11/2012	8:39:18 AM	SiCl4 pre valve closed
12/11/2012	8:39:18 AM	SiCl4 post valve closed
12/11/2012	8:39:18 AM	Main Vac valve closed
12/11/2012	8:39:18 AM	Bypass valve closed
12/11/2012	8:39:18 AM	H2 valve opened
12/11/2012	8:39:18 AM	Bubbler valve opened
12/11/2012	8:39:18 AM	Helium MFC set to  0.000000
12/11/2012	8:39:18 AM	H2 MFC set to  500.000000
12/11/2012	8:39:18 AM	BCl3 MFC set to  0.000000
12/11/2012	8:39:18 AM	PH3 MFC set to  0.000000
12/11/2012	8:39:18 AM	SiCl4 MFC set to  0.000000
12/11/2012	8:39:18 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:39:18 AM	Tube furnace set to 0
12/11/2012	8:39:19 AM	Helium valve closed
12/11/2012	8:39:19 AM	BCl3 valve closed
12/11/2012	8:39:19 AM	PH3 valve closed
12/11/2012	8:39:19 AM	SiCl4 pre valve closed
12/11/2012	8:39:19 AM	SiCl4 post valve closed
12/11/2012	8:39:19 AM	Main Vac valve closed
12/11/2012	8:39:19 AM	Bypass valve closed
12/11/2012	8:39:19 AM	H2 valve opened
12/11/2012	8:39:19 AM	Bubbler valve opened
12/11/2012	8:39:19 AM	Helium MFC set to  0.000000
12/11/2012	8:39:19 AM	H2 MFC set to  500.000000
12/11/2012	8:39:19 AM	BCl3 MFC set to  0.000000
12/11/2012	8:39:19 AM	PH3 MFC set to  0.000000
12/11/2012	8:39:19 AM	SiCl4 MFC set to  0.000000
12/11/2012	8:39:19 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:39:19 AM	Tube furnace set to 1000
12/11/2012	9:09:19 AM	Helium valve closed
12/11/2012	9:09:19 AM	BCl3 valve closed
12/11/2012	9:09:19 AM	Main Vac valve closed
12/11/2012	9:09:19 AM	Bypass valve closed
12/11/2012	9:09:19 AM	H2 valve opened
12/11/2012	9:09:19 AM	PH3 valve opened
12/11/2012	9:09:19 AM	SiCl4 pre valve opened
12/11/2012	9:09:19 AM	SiCl4 post valve opened
12/11/2012	9:09:19 AM	Bubbler valve opened
12/11/2012	9:09:19 AM	Helium MFC set to  0.000000
12/11/2012	9:09:19 AM	H2 MFC set to  500.000000
12/11/2012	9:09:19 AM	BCl3 MFC set to  0.000000
12/11/2012	9:09:19 AM	PH3 MFC set to  0.300000
12/11/2012	9:09:19 AM	SiCl4 MFC set to  25.000000
12/11/2012	9:09:19 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:09:19 AM	Tube furnace set to 1000
12/11/2012	9:24:19 AM	Helium valve closed
12/11/2012	9:24:19 AM	BCl3 valve closed
12/11/2012	9:24:19 AM	PH3 valve closed
12/11/2012	9:24:19 AM	SiCl4 pre valve closed
12/11/2012	9:24:19 AM	SiCl4 post valve closed
12/11/2012	9:24:19 AM	Main Vac valve closed
12/11/2012	9:24:19 AM	Bypass valve closed
12/11/2012	9:24:19 AM	H2 valve opened
12/11/2012	9:24:19 AM	Bubbler valve opened
12/11/2012	9:24:19 AM	Helium MFC set to  0.000000
12/11/2012	9:24:19 AM	H2 MFC set to  500.000000
12/11/2012	9:24:19 AM	BCl3 MFC set to  0.000000
12/11/2012	9:24:19 AM	PH3 MFC set to  0.000000
12/11/2012	9:24:19 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:24:19 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:24:20 AM	Tube furnace set to 750
12/11/2012	9:29:20 AM	H2 valve closed
12/11/2012	9:29:20 AM	BCl3 valve closed
12/11/2012	9:29:20 AM	PH3 valve closed
12/11/2012	9:29:20 AM	SiCl4 pre valve closed
12/11/2012	9:29:20 AM	SiCl4 post valve closed
12/11/2012	9:29:20 AM	Main Vac valve closed
12/11/2012	9:29:20 AM	Bypass valve closed
12/11/2012	9:29:20 AM	Helium valve opened
12/11/2012	9:29:20 AM	Bubbler valve opened
12/11/2012	9:29:20 AM	Helium MFC set to  500.000000
12/11/2012	9:29:20 AM	H2 MFC set to  0.000000
12/11/2012	9:29:20 AM	BCl3 MFC set to  0.000000
12/11/2012	9:29:20 AM	PH3 MFC set to  0.000000
12/11/2012	9:29:20 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:29:20 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:29:20 AM	Tube furnace set to 0
12/11/2012	9:40:13 AM	Helium valve closed
12/11/2012	9:40:13 AM	H2 valve closed
12/11/2012	9:40:13 AM	BCl3 valve closed
12/11/2012	9:40:13 AM	PH3 valve closed
12/11/2012	9:40:13 AM	SiCl4 pre valve closed
12/11/2012	9:40:13 AM	SiCl4 post valve closed
12/11/2012	9:40:13 AM	Main Vac valve closed
12/11/2012	9:40:13 AM	Bypass valve closed
12/11/2012	9:40:13 AM	Bubbler valve closed
12/11/2012	9:40:13 AM	Helium MFC set to  0.000000
12/11/2012	9:40:13 AM	H2 MFC set to  0.000000
12/11/2012	9:40:13 AM	BCl3 MFC set to  0.000000
12/11/2012	9:40:13 AM	PH3 MFC set to  0.000000
12/11/2012	9:40:13 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:40:13 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:40:14 AM	Tube furnace set to 0
12/11/2012	9:40:15 AM	Run finished at 9:40 AM
12/11/2012	9:43:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/11/2012	9:43:11 AM	Recipe started at 9:43 AM
12/11/2012	9:43:11 AM	Helium valve closed
12/11/2012	9:43:11 AM	H2 valve closed
12/11/2012	9:43:11 AM	BCl3 valve closed
12/11/2012	9:43:11 AM	PH3 valve closed
12/11/2012	9:43:11 AM	SiCl4 pre valve closed
12/11/2012	9:43:11 AM	SiCl4 post valve closed
12/11/2012	9:43:11 AM	Main Vac valve closed
12/11/2012	9:43:11 AM	Bubbler valve closed
12/11/2012	9:43:11 AM	Bypass valve opened
12/11/2012	9:43:11 AM	Helium MFC set to  0.000000
12/11/2012	9:43:11 AM	H2 MFC set to  0.000000
12/11/2012	9:43:11 AM	BCl3 MFC set to  0.000000
12/11/2012	9:43:11 AM	PH3 MFC set to  0.000000
12/11/2012	9:43:11 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:43:11 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:43:11 AM	Tube furnace set to 0
12/11/2012	9:44:20 AM	Helium valve closed
12/11/2012	9:44:20 AM	H2 valve closed
12/11/2012	9:44:20 AM	BCl3 valve closed
12/11/2012	9:44:20 AM	PH3 valve closed
12/11/2012	9:44:20 AM	SiCl4 pre valve closed
12/11/2012	9:44:20 AM	SiCl4 post valve closed
12/11/2012	9:44:20 AM	Main Vac valve closed
12/11/2012	9:44:20 AM	Bubbler valve closed
12/11/2012	9:44:20 AM	Bypass valve opened
12/11/2012	9:44:20 AM	Helium MFC set to  0.000000
12/11/2012	9:44:20 AM	H2 MFC set to  0.000000
12/11/2012	9:44:20 AM	BCl3 MFC set to  0.000000
12/11/2012	9:44:20 AM	PH3 MFC set to  0.000000
12/11/2012	9:44:20 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:44:20 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:44:20 AM	Tube furnace set to 0
12/11/2012	9:44:34 AM	Helium valve closed
12/11/2012	9:44:34 AM	H2 valve closed
12/11/2012	9:44:34 AM	BCl3 valve closed
12/11/2012	9:44:34 AM	PH3 valve closed
12/11/2012	9:44:34 AM	SiCl4 pre valve closed
12/11/2012	9:44:34 AM	SiCl4 post valve closed
12/11/2012	9:44:34 AM	Bypass valve closed
12/11/2012	9:44:34 AM	Bubbler valve closed
12/11/2012	9:44:34 AM	Main Vac valve opened
12/11/2012	9:44:34 AM	Helium MFC set to  0.000000
12/11/2012	9:44:34 AM	H2 MFC set to  0.000000
12/11/2012	9:44:34 AM	BCl3 MFC set to  0.000000
12/11/2012	9:44:34 AM	PH3 MFC set to  0.000000
12/11/2012	9:44:34 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:44:34 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:44:34 AM	Tube furnace set to 0
12/11/2012	9:44:35 AM	Run finished at 9:44 AM
12/11/2012	9:44:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/11/2012	9:45:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	9:45:25 AM	Recipe started at 9:45 AM
12/11/2012	9:45:25 AM	Helium valve closed
12/11/2012	9:45:25 AM	H2 valve closed
12/11/2012	9:45:25 AM	BCl3 valve closed
12/11/2012	9:45:25 AM	PH3 valve closed
12/11/2012	9:45:25 AM	SiCl4 pre valve closed
12/11/2012	9:45:25 AM	SiCl4 post valve closed
12/11/2012	9:45:25 AM	Main Vac valve closed
12/11/2012	9:45:25 AM	Bubbler valve closed
12/11/2012	9:45:25 AM	Bypass valve opened
12/11/2012	9:45:25 AM	Helium MFC set to  0.000000
12/11/2012	9:45:25 AM	H2 MFC set to  0.000000
12/11/2012	9:45:25 AM	BCl3 MFC set to  0.000000
12/11/2012	9:45:25 AM	PH3 MFC set to  0.000000
12/11/2012	9:45:25 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:45:25 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:45:25 AM	Tube furnace set to 0
12/11/2012	9:45:25 AM	Helium valve closed
12/11/2012	9:45:25 AM	H2 valve closed
12/11/2012	9:45:25 AM	BCl3 valve closed
12/11/2012	9:45:25 AM	PH3 valve closed
12/11/2012	9:45:25 AM	SiCl4 pre valve closed
12/11/2012	9:45:25 AM	SiCl4 post valve closed
12/11/2012	9:45:25 AM	Main Vac valve closed
12/11/2012	9:45:25 AM	Bubbler valve closed
12/11/2012	9:45:25 AM	Bypass valve opened
12/11/2012	9:45:25 AM	Helium MFC set to  0.000000
12/11/2012	9:45:25 AM	H2 MFC set to  0.000000
12/11/2012	9:45:25 AM	BCl3 MFC set to  0.000000
12/11/2012	9:45:25 AM	PH3 MFC set to  0.000000
12/11/2012	9:45:25 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:45:25 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:45:25 AM	Tube furnace set to 0
12/11/2012	9:45:26 AM	Helium valve closed
12/11/2012	9:45:26 AM	H2 valve closed
12/11/2012	9:45:26 AM	BCl3 valve closed
12/11/2012	9:45:26 AM	PH3 valve closed
12/11/2012	9:45:26 AM	SiCl4 pre valve closed
12/11/2012	9:45:26 AM	SiCl4 post valve closed
12/11/2012	9:45:26 AM	Bypass valve closed
12/11/2012	9:45:26 AM	Bubbler valve closed
12/11/2012	9:45:26 AM	Main Vac valve opened
12/11/2012	9:45:26 AM	Helium MFC set to  0.000000
12/11/2012	9:45:26 AM	H2 MFC set to  0.000000
12/11/2012	9:45:26 AM	BCl3 MFC set to  0.000000
12/11/2012	9:45:26 AM	PH3 MFC set to  0.000000
12/11/2012	9:45:26 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:45:26 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:45:26 AM	Tube furnace set to 0
12/11/2012	9:45:56 AM	H2 valve closed
12/11/2012	9:45:56 AM	BCl3 valve closed
12/11/2012	9:45:56 AM	PH3 valve closed
12/11/2012	9:45:56 AM	SiCl4 pre valve closed
12/11/2012	9:45:56 AM	SiCl4 post valve closed
12/11/2012	9:45:56 AM	Bypass valve closed
12/11/2012	9:45:56 AM	Bubbler valve closed
12/11/2012	9:45:56 AM	Helium valve opened
12/11/2012	9:45:56 AM	Main Vac valve opened
12/11/2012	9:45:56 AM	Helium MFC set to  20.000000
12/11/2012	9:45:56 AM	H2 MFC set to  0.000000
12/11/2012	9:45:56 AM	BCl3 MFC set to  0.000000
12/11/2012	9:45:56 AM	PH3 MFC set to  0.000000
12/11/2012	9:45:56 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:45:56 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:45:56 AM	Tube furnace set to 0
12/11/2012	9:46:26 AM	Helium valve closed
12/11/2012	9:46:26 AM	H2 valve closed
12/11/2012	9:46:26 AM	BCl3 valve closed
12/11/2012	9:46:26 AM	PH3 valve closed
12/11/2012	9:46:26 AM	SiCl4 pre valve closed
12/11/2012	9:46:26 AM	SiCl4 post valve closed
12/11/2012	9:46:26 AM	Bypass valve closed
12/11/2012	9:46:26 AM	Bubbler valve closed
12/11/2012	9:46:26 AM	Main Vac valve opened
12/11/2012	9:46:26 AM	Helium MFC set to  0.000000
12/11/2012	9:46:26 AM	H2 MFC set to  0.000000
12/11/2012	9:46:26 AM	BCl3 MFC set to  0.000000
12/11/2012	9:46:26 AM	PH3 MFC set to  0.000000
12/11/2012	9:46:26 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:46:26 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:46:26 AM	Tube furnace set to 0
12/11/2012	9:46:56 AM	H2 valve closed
12/11/2012	9:46:56 AM	BCl3 valve closed
12/11/2012	9:46:56 AM	PH3 valve closed
12/11/2012	9:46:56 AM	SiCl4 pre valve closed
12/11/2012	9:46:56 AM	SiCl4 post valve closed
12/11/2012	9:46:56 AM	Bypass valve closed
12/11/2012	9:46:56 AM	Bubbler valve closed
12/11/2012	9:46:56 AM	Helium valve opened
12/11/2012	9:46:56 AM	Main Vac valve opened
12/11/2012	9:46:56 AM	Helium MFC set to  20.000000
12/11/2012	9:46:56 AM	H2 MFC set to  0.000000
12/11/2012	9:46:56 AM	BCl3 MFC set to  0.000000
12/11/2012	9:46:56 AM	PH3 MFC set to  0.000000
12/11/2012	9:46:56 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:46:56 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:46:57 AM	Tube furnace set to 0
12/11/2012	9:47:27 AM	Helium valve closed
12/11/2012	9:47:27 AM	H2 valve closed
12/11/2012	9:47:27 AM	BCl3 valve closed
12/11/2012	9:47:27 AM	PH3 valve closed
12/11/2012	9:47:27 AM	SiCl4 pre valve closed
12/11/2012	9:47:27 AM	SiCl4 post valve closed
12/11/2012	9:47:27 AM	Bypass valve closed
12/11/2012	9:47:27 AM	Bubbler valve closed
12/11/2012	9:47:27 AM	Main Vac valve opened
12/11/2012	9:47:27 AM	Helium MFC set to  0.000000
12/11/2012	9:47:27 AM	H2 MFC set to  0.000000
12/11/2012	9:47:27 AM	BCl3 MFC set to  0.000000
12/11/2012	9:47:27 AM	PH3 MFC set to  0.000000
12/11/2012	9:47:27 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:47:27 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:47:27 AM	Tube furnace set to 0
12/11/2012	9:47:57 AM	H2 valve closed
12/11/2012	9:47:57 AM	BCl3 valve closed
12/11/2012	9:47:57 AM	PH3 valve closed
12/11/2012	9:47:57 AM	SiCl4 pre valve closed
12/11/2012	9:47:57 AM	SiCl4 post valve closed
12/11/2012	9:47:57 AM	Bypass valve closed
12/11/2012	9:47:57 AM	Bubbler valve closed
12/11/2012	9:47:57 AM	Helium valve opened
12/11/2012	9:47:57 AM	Main Vac valve opened
12/11/2012	9:47:57 AM	Helium MFC set to  20.000000
12/11/2012	9:47:57 AM	H2 MFC set to  0.000000
12/11/2012	9:47:57 AM	BCl3 MFC set to  0.000000
12/11/2012	9:47:57 AM	PH3 MFC set to  0.000000
12/11/2012	9:47:57 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:47:57 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:47:57 AM	Tube furnace set to 0
12/11/2012	9:48:27 AM	Helium valve closed
12/11/2012	9:48:27 AM	H2 valve closed
12/11/2012	9:48:27 AM	BCl3 valve closed
12/11/2012	9:48:27 AM	PH3 valve closed
12/11/2012	9:48:27 AM	SiCl4 pre valve closed
12/11/2012	9:48:27 AM	SiCl4 post valve closed
12/11/2012	9:48:27 AM	Bypass valve closed
12/11/2012	9:48:27 AM	Bubbler valve closed
12/11/2012	9:48:27 AM	Main Vac valve opened
12/11/2012	9:48:27 AM	Helium MFC set to  0.000000
12/11/2012	9:48:27 AM	H2 MFC set to  0.000000
12/11/2012	9:48:27 AM	BCl3 MFC set to  0.000000
12/11/2012	9:48:27 AM	PH3 MFC set to  0.000000
12/11/2012	9:48:27 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:48:27 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:48:27 AM	Tube furnace set to 0
12/11/2012	9:48:57 AM	H2 valve closed
12/11/2012	9:48:57 AM	BCl3 valve closed
12/11/2012	9:48:57 AM	PH3 valve closed
12/11/2012	9:48:57 AM	SiCl4 pre valve closed
12/11/2012	9:48:57 AM	SiCl4 post valve closed
12/11/2012	9:48:57 AM	Bypass valve closed
12/11/2012	9:48:57 AM	Bubbler valve closed
12/11/2012	9:48:57 AM	Helium valve opened
12/11/2012	9:48:57 AM	Main Vac valve opened
12/11/2012	9:48:57 AM	Helium MFC set to  20.000000
12/11/2012	9:48:57 AM	H2 MFC set to  0.000000
12/11/2012	9:48:57 AM	BCl3 MFC set to  0.000000
12/11/2012	9:48:57 AM	PH3 MFC set to  0.000000
12/11/2012	9:48:57 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:48:57 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:48:58 AM	Tube furnace set to 0
12/11/2012	9:49:28 AM	Helium valve closed
12/11/2012	9:49:28 AM	H2 valve closed
12/11/2012	9:49:28 AM	BCl3 valve closed
12/11/2012	9:49:28 AM	PH3 valve closed
12/11/2012	9:49:28 AM	SiCl4 pre valve closed
12/11/2012	9:49:28 AM	SiCl4 post valve closed
12/11/2012	9:49:28 AM	Bypass valve closed
12/11/2012	9:49:28 AM	Bubbler valve closed
12/11/2012	9:49:28 AM	Main Vac valve opened
12/11/2012	9:49:28 AM	Helium MFC set to  0.000000
12/11/2012	9:49:28 AM	H2 MFC set to  0.000000
12/11/2012	9:49:28 AM	BCl3 MFC set to  0.000000
12/11/2012	9:49:28 AM	PH3 MFC set to  0.000000
12/11/2012	9:49:28 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:49:28 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:49:28 AM	Tube furnace set to 0
12/11/2012	9:49:58 AM	H2 valve closed
12/11/2012	9:49:58 AM	BCl3 valve closed
12/11/2012	9:49:58 AM	PH3 valve closed
12/11/2012	9:49:58 AM	SiCl4 pre valve closed
12/11/2012	9:49:58 AM	SiCl4 post valve closed
12/11/2012	9:49:58 AM	Bypass valve closed
12/11/2012	9:49:58 AM	Bubbler valve closed
12/11/2012	9:49:58 AM	Helium valve opened
12/11/2012	9:49:58 AM	Main Vac valve opened
12/11/2012	9:49:58 AM	Helium MFC set to  20.000000
12/11/2012	9:49:58 AM	H2 MFC set to  0.000000
12/11/2012	9:49:58 AM	BCl3 MFC set to  0.000000
12/11/2012	9:49:58 AM	PH3 MFC set to  0.000000
12/11/2012	9:49:58 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:49:58 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:49:58 AM	Tube furnace set to 0
12/11/2012	9:50:28 AM	Helium valve closed
12/11/2012	9:50:28 AM	H2 valve closed
12/11/2012	9:50:28 AM	BCl3 valve closed
12/11/2012	9:50:28 AM	PH3 valve closed
12/11/2012	9:50:28 AM	SiCl4 pre valve closed
12/11/2012	9:50:28 AM	SiCl4 post valve closed
12/11/2012	9:50:28 AM	Bypass valve closed
12/11/2012	9:50:28 AM	Bubbler valve closed
12/11/2012	9:50:28 AM	Main Vac valve opened
12/11/2012	9:50:28 AM	Helium MFC set to  0.000000
12/11/2012	9:50:28 AM	H2 MFC set to  0.000000
12/11/2012	9:50:28 AM	BCl3 MFC set to  0.000000
12/11/2012	9:50:28 AM	PH3 MFC set to  0.000000
12/11/2012	9:50:28 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:50:28 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:50:28 AM	Tube furnace set to 0
12/11/2012	9:50:58 AM	H2 valve closed
12/11/2012	9:50:58 AM	BCl3 valve closed
12/11/2012	9:50:58 AM	PH3 valve closed
12/11/2012	9:50:58 AM	SiCl4 pre valve closed
12/11/2012	9:50:58 AM	SiCl4 post valve closed
12/11/2012	9:50:58 AM	Bypass valve closed
12/11/2012	9:50:58 AM	Bubbler valve closed
12/11/2012	9:50:58 AM	Helium valve opened
12/11/2012	9:50:58 AM	Main Vac valve opened
12/11/2012	9:50:58 AM	Helium MFC set to  20.000000
12/11/2012	9:50:58 AM	H2 MFC set to  0.000000
12/11/2012	9:50:58 AM	BCl3 MFC set to  0.000000
12/11/2012	9:50:58 AM	PH3 MFC set to  0.000000
12/11/2012	9:50:58 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:50:58 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:50:59 AM	Tube furnace set to 0
12/11/2012	9:51:29 AM	Helium valve closed
12/11/2012	9:51:29 AM	H2 valve closed
12/11/2012	9:51:29 AM	BCl3 valve closed
12/11/2012	9:51:29 AM	PH3 valve closed
12/11/2012	9:51:29 AM	SiCl4 pre valve closed
12/11/2012	9:51:29 AM	SiCl4 post valve closed
12/11/2012	9:51:29 AM	Bypass valve closed
12/11/2012	9:51:29 AM	Bubbler valve closed
12/11/2012	9:51:29 AM	Main Vac valve opened
12/11/2012	9:51:29 AM	Helium MFC set to  0.000000
12/11/2012	9:51:29 AM	H2 MFC set to  0.000000
12/11/2012	9:51:29 AM	BCl3 MFC set to  0.000000
12/11/2012	9:51:29 AM	PH3 MFC set to  0.000000
12/11/2012	9:51:29 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:51:29 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:51:29 AM	Tube furnace set to 0
12/11/2012	9:51:59 AM	H2 valve closed
12/11/2012	9:51:59 AM	BCl3 valve closed
12/11/2012	9:51:59 AM	PH3 valve closed
12/11/2012	9:51:59 AM	SiCl4 pre valve closed
12/11/2012	9:51:59 AM	SiCl4 post valve closed
12/11/2012	9:51:59 AM	Bypass valve closed
12/11/2012	9:51:59 AM	Bubbler valve closed
12/11/2012	9:51:59 AM	Helium valve opened
12/11/2012	9:51:59 AM	Main Vac valve opened
12/11/2012	9:51:59 AM	Helium MFC set to  20.000000
12/11/2012	9:51:59 AM	H2 MFC set to  0.000000
12/11/2012	9:51:59 AM	BCl3 MFC set to  0.000000
12/11/2012	9:51:59 AM	PH3 MFC set to  0.000000
12/11/2012	9:51:59 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:51:59 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:51:59 AM	Tube furnace set to 0
12/11/2012	9:52:29 AM	Helium valve closed
12/11/2012	9:52:29 AM	H2 valve closed
12/11/2012	9:52:29 AM	BCl3 valve closed
12/11/2012	9:52:29 AM	PH3 valve closed
12/11/2012	9:52:29 AM	SiCl4 pre valve closed
12/11/2012	9:52:29 AM	SiCl4 post valve closed
12/11/2012	9:52:29 AM	Bypass valve closed
12/11/2012	9:52:29 AM	Bubbler valve closed
12/11/2012	9:52:29 AM	Main Vac valve opened
12/11/2012	9:52:29 AM	Helium MFC set to  0.000000
12/11/2012	9:52:29 AM	H2 MFC set to  0.000000
12/11/2012	9:52:29 AM	BCl3 MFC set to  0.000000
12/11/2012	9:52:29 AM	PH3 MFC set to  0.000000
12/11/2012	9:52:29 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:52:29 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:52:29 AM	Tube furnace set to 0
12/11/2012	9:52:59 AM	H2 valve closed
12/11/2012	9:52:59 AM	BCl3 valve closed
12/11/2012	9:52:59 AM	PH3 valve closed
12/11/2012	9:52:59 AM	SiCl4 pre valve closed
12/11/2012	9:52:59 AM	SiCl4 post valve closed
12/11/2012	9:52:59 AM	Bypass valve closed
12/11/2012	9:52:59 AM	Bubbler valve closed
12/11/2012	9:52:59 AM	Helium valve opened
12/11/2012	9:52:59 AM	Main Vac valve opened
12/11/2012	9:52:59 AM	Helium MFC set to  20.000000
12/11/2012	9:52:59 AM	H2 MFC set to  0.000000
12/11/2012	9:52:59 AM	BCl3 MFC set to  0.000000
12/11/2012	9:52:59 AM	PH3 MFC set to  0.000000
12/11/2012	9:52:59 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:52:59 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:53:00 AM	Tube furnace set to 0
12/11/2012	9:53:30 AM	Helium valve closed
12/11/2012	9:53:30 AM	H2 valve closed
12/11/2012	9:53:30 AM	BCl3 valve closed
12/11/2012	9:53:30 AM	PH3 valve closed
12/11/2012	9:53:30 AM	SiCl4 pre valve closed
12/11/2012	9:53:30 AM	SiCl4 post valve closed
12/11/2012	9:53:30 AM	Bypass valve closed
12/11/2012	9:53:30 AM	Bubbler valve closed
12/11/2012	9:53:30 AM	Main Vac valve opened
12/11/2012	9:53:30 AM	Helium MFC set to  0.000000
12/11/2012	9:53:30 AM	H2 MFC set to  0.000000
12/11/2012	9:53:30 AM	BCl3 MFC set to  0.000000
12/11/2012	9:53:30 AM	PH3 MFC set to  0.000000
12/11/2012	9:53:30 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:53:30 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:53:30 AM	Tube furnace set to 0
12/11/2012	9:54:00 AM	H2 valve closed
12/11/2012	9:54:00 AM	BCl3 valve closed
12/11/2012	9:54:00 AM	PH3 valve closed
12/11/2012	9:54:00 AM	SiCl4 pre valve closed
12/11/2012	9:54:00 AM	SiCl4 post valve closed
12/11/2012	9:54:00 AM	Bypass valve closed
12/11/2012	9:54:00 AM	Bubbler valve closed
12/11/2012	9:54:00 AM	Helium valve opened
12/11/2012	9:54:00 AM	Main Vac valve opened
12/11/2012	9:54:00 AM	Helium MFC set to  20.000000
12/11/2012	9:54:00 AM	H2 MFC set to  0.000000
12/11/2012	9:54:00 AM	BCl3 MFC set to  0.000000
12/11/2012	9:54:00 AM	PH3 MFC set to  0.000000
12/11/2012	9:54:00 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:54:00 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:54:00 AM	Tube furnace set to 0
12/11/2012	9:54:30 AM	Helium valve closed
12/11/2012	9:54:30 AM	H2 valve closed
12/11/2012	9:54:30 AM	BCl3 valve closed
12/11/2012	9:54:30 AM	PH3 valve closed
12/11/2012	9:54:30 AM	SiCl4 pre valve closed
12/11/2012	9:54:30 AM	SiCl4 post valve closed
12/11/2012	9:54:30 AM	Bypass valve closed
12/11/2012	9:54:30 AM	Bubbler valve closed
12/11/2012	9:54:30 AM	Main Vac valve opened
12/11/2012	9:54:30 AM	Helium MFC set to  0.000000
12/11/2012	9:54:30 AM	H2 MFC set to  0.000000
12/11/2012	9:54:30 AM	BCl3 MFC set to  0.000000
12/11/2012	9:54:30 AM	PH3 MFC set to  0.000000
12/11/2012	9:54:30 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:54:30 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:54:30 AM	Tube furnace set to 0
12/11/2012	9:55:00 AM	H2 valve closed
12/11/2012	9:55:00 AM	BCl3 valve closed
12/11/2012	9:55:00 AM	PH3 valve closed
12/11/2012	9:55:00 AM	SiCl4 pre valve closed
12/11/2012	9:55:00 AM	SiCl4 post valve closed
12/11/2012	9:55:00 AM	Bypass valve closed
12/11/2012	9:55:00 AM	Bubbler valve closed
12/11/2012	9:55:00 AM	Helium valve opened
12/11/2012	9:55:00 AM	Main Vac valve opened
12/11/2012	9:55:00 AM	Helium MFC set to  20.000000
12/11/2012	9:55:00 AM	H2 MFC set to  0.000000
12/11/2012	9:55:00 AM	BCl3 MFC set to  0.000000
12/11/2012	9:55:00 AM	PH3 MFC set to  0.000000
12/11/2012	9:55:00 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:55:00 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:55:01 AM	Tube furnace set to 0
12/11/2012	9:55:31 AM	Helium valve closed
12/11/2012	9:55:31 AM	H2 valve closed
12/11/2012	9:55:31 AM	BCl3 valve closed
12/11/2012	9:55:31 AM	PH3 valve closed
12/11/2012	9:55:31 AM	SiCl4 pre valve closed
12/11/2012	9:55:31 AM	SiCl4 post valve closed
12/11/2012	9:55:31 AM	Bypass valve closed
12/11/2012	9:55:31 AM	Bubbler valve closed
12/11/2012	9:55:31 AM	Main Vac valve opened
12/11/2012	9:55:31 AM	Helium MFC set to  0.000000
12/11/2012	9:55:31 AM	H2 MFC set to  0.000000
12/11/2012	9:55:31 AM	BCl3 MFC set to  0.000000
12/11/2012	9:55:31 AM	PH3 MFC set to  0.000000
12/11/2012	9:55:31 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:55:31 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:55:31 AM	Tube furnace set to 0
12/11/2012	9:55:32 AM	Run finished at 9:55 AM
12/11/2012	9:55:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	9:56:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	9:56:53 AM	Recipe started at 9:56 AM
12/11/2012	9:56:53 AM	Helium valve closed
12/11/2012	9:56:53 AM	H2 valve closed
12/11/2012	9:56:53 AM	BCl3 valve closed
12/11/2012	9:56:53 AM	PH3 valve closed
12/11/2012	9:56:53 AM	SiCl4 pre valve closed
12/11/2012	9:56:53 AM	SiCl4 post valve closed
12/11/2012	9:56:53 AM	Main Vac valve closed
12/11/2012	9:56:53 AM	Bubbler valve closed
12/11/2012	9:56:53 AM	Bypass valve opened
12/11/2012	9:56:53 AM	Helium MFC set to  0.000000
12/11/2012	9:56:53 AM	H2 MFC set to  0.000000
12/11/2012	9:56:53 AM	BCl3 MFC set to  0.000000
12/11/2012	9:56:53 AM	PH3 MFC set to  0.000000
12/11/2012	9:56:53 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:56:53 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:56:53 AM	Tube furnace set to 0
12/11/2012	9:56:53 AM	Helium valve closed
12/11/2012	9:56:53 AM	H2 valve closed
12/11/2012	9:56:53 AM	BCl3 valve closed
12/11/2012	9:56:53 AM	PH3 valve closed
12/11/2012	9:56:53 AM	SiCl4 pre valve closed
12/11/2012	9:56:53 AM	SiCl4 post valve closed
12/11/2012	9:56:53 AM	Main Vac valve closed
12/11/2012	9:56:53 AM	Bubbler valve closed
12/11/2012	9:56:53 AM	Bypass valve opened
12/11/2012	9:56:53 AM	Helium MFC set to  0.000000
12/11/2012	9:56:53 AM	H2 MFC set to  0.000000
12/11/2012	9:56:53 AM	BCl3 MFC set to  0.000000
12/11/2012	9:56:53 AM	PH3 MFC set to  0.000000
12/11/2012	9:56:53 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:56:53 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:56:53 AM	Tube furnace set to 0
12/11/2012	9:56:54 AM	Helium valve closed
12/11/2012	9:56:54 AM	H2 valve closed
12/11/2012	9:56:54 AM	BCl3 valve closed
12/11/2012	9:56:54 AM	PH3 valve closed
12/11/2012	9:56:54 AM	SiCl4 pre valve closed
12/11/2012	9:56:54 AM	SiCl4 post valve closed
12/11/2012	9:56:54 AM	Bypass valve closed
12/11/2012	9:56:54 AM	Bubbler valve closed
12/11/2012	9:56:54 AM	Main Vac valve opened
12/11/2012	9:56:54 AM	Helium MFC set to  0.000000
12/11/2012	9:56:54 AM	H2 MFC set to  0.000000
12/11/2012	9:56:54 AM	BCl3 MFC set to  0.000000
12/11/2012	9:56:54 AM	PH3 MFC set to  0.000000
12/11/2012	9:56:54 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:56:54 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:56:54 AM	Tube furnace set to 0
12/11/2012	9:57:24 AM	H2 valve closed
12/11/2012	9:57:24 AM	BCl3 valve closed
12/11/2012	9:57:24 AM	PH3 valve closed
12/11/2012	9:57:24 AM	SiCl4 pre valve closed
12/11/2012	9:57:24 AM	SiCl4 post valve closed
12/11/2012	9:57:24 AM	Bypass valve closed
12/11/2012	9:57:24 AM	Bubbler valve closed
12/11/2012	9:57:24 AM	Helium valve opened
12/11/2012	9:57:24 AM	Main Vac valve opened
12/11/2012	9:57:24 AM	Helium MFC set to  20.000000
12/11/2012	9:57:24 AM	H2 MFC set to  0.000000
12/11/2012	9:57:24 AM	BCl3 MFC set to  0.000000
12/11/2012	9:57:24 AM	PH3 MFC set to  0.000000
12/11/2012	9:57:24 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:57:24 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:57:24 AM	Tube furnace set to 0
12/11/2012	9:57:54 AM	Helium valve closed
12/11/2012	9:57:54 AM	H2 valve closed
12/11/2012	9:57:54 AM	BCl3 valve closed
12/11/2012	9:57:54 AM	PH3 valve closed
12/11/2012	9:57:54 AM	SiCl4 pre valve closed
12/11/2012	9:57:54 AM	SiCl4 post valve closed
12/11/2012	9:57:54 AM	Bypass valve closed
12/11/2012	9:57:54 AM	Bubbler valve closed
12/11/2012	9:57:54 AM	Main Vac valve opened
12/11/2012	9:57:54 AM	Helium MFC set to  0.000000
12/11/2012	9:57:54 AM	H2 MFC set to  0.000000
12/11/2012	9:57:54 AM	BCl3 MFC set to  0.000000
12/11/2012	9:57:54 AM	PH3 MFC set to  0.000000
12/11/2012	9:57:54 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:57:54 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:57:54 AM	Tube furnace set to 0
12/11/2012	9:58:24 AM	H2 valve closed
12/11/2012	9:58:24 AM	BCl3 valve closed
12/11/2012	9:58:24 AM	PH3 valve closed
12/11/2012	9:58:24 AM	SiCl4 pre valve closed
12/11/2012	9:58:24 AM	SiCl4 post valve closed
12/11/2012	9:58:24 AM	Bypass valve closed
12/11/2012	9:58:24 AM	Bubbler valve closed
12/11/2012	9:58:24 AM	Helium valve opened
12/11/2012	9:58:24 AM	Main Vac valve opened
12/11/2012	9:58:24 AM	Helium MFC set to  20.000000
12/11/2012	9:58:24 AM	H2 MFC set to  0.000000
12/11/2012	9:58:24 AM	BCl3 MFC set to  0.000000
12/11/2012	9:58:24 AM	PH3 MFC set to  0.000000
12/11/2012	9:58:24 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:58:24 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:58:25 AM	Tube furnace set to 0
12/11/2012	9:58:55 AM	Helium valve closed
12/11/2012	9:58:55 AM	H2 valve closed
12/11/2012	9:58:55 AM	BCl3 valve closed
12/11/2012	9:58:55 AM	PH3 valve closed
12/11/2012	9:58:55 AM	SiCl4 pre valve closed
12/11/2012	9:58:55 AM	SiCl4 post valve closed
12/11/2012	9:58:55 AM	Bypass valve closed
12/11/2012	9:58:55 AM	Bubbler valve closed
12/11/2012	9:58:55 AM	Main Vac valve opened
12/11/2012	9:58:55 AM	Helium MFC set to  0.000000
12/11/2012	9:58:55 AM	H2 MFC set to  0.000000
12/11/2012	9:58:55 AM	BCl3 MFC set to  0.000000
12/11/2012	9:58:55 AM	PH3 MFC set to  0.000000
12/11/2012	9:58:55 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:58:55 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:58:55 AM	Tube furnace set to 0
12/11/2012	9:59:25 AM	H2 valve closed
12/11/2012	9:59:25 AM	BCl3 valve closed
12/11/2012	9:59:25 AM	PH3 valve closed
12/11/2012	9:59:25 AM	SiCl4 pre valve closed
12/11/2012	9:59:25 AM	SiCl4 post valve closed
12/11/2012	9:59:25 AM	Bypass valve closed
12/11/2012	9:59:25 AM	Bubbler valve closed
12/11/2012	9:59:25 AM	Helium valve opened
12/11/2012	9:59:25 AM	Main Vac valve opened
12/11/2012	9:59:25 AM	Helium MFC set to  20.000000
12/11/2012	9:59:25 AM	H2 MFC set to  0.000000
12/11/2012	9:59:25 AM	BCl3 MFC set to  0.000000
12/11/2012	9:59:25 AM	PH3 MFC set to  0.000000
12/11/2012	9:59:25 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:59:25 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:59:25 AM	Tube furnace set to 0
12/11/2012	9:59:55 AM	Helium valve closed
12/11/2012	9:59:55 AM	H2 valve closed
12/11/2012	9:59:55 AM	BCl3 valve closed
12/11/2012	9:59:55 AM	PH3 valve closed
12/11/2012	9:59:55 AM	SiCl4 pre valve closed
12/11/2012	9:59:55 AM	SiCl4 post valve closed
12/11/2012	9:59:55 AM	Bypass valve closed
12/11/2012	9:59:55 AM	Bubbler valve closed
12/11/2012	9:59:55 AM	Main Vac valve opened
12/11/2012	9:59:55 AM	Helium MFC set to  0.000000
12/11/2012	9:59:55 AM	H2 MFC set to  0.000000
12/11/2012	9:59:55 AM	BCl3 MFC set to  0.000000
12/11/2012	9:59:55 AM	PH3 MFC set to  0.000000
12/11/2012	9:59:55 AM	SiCl4 MFC set to  0.000000
12/11/2012	9:59:55 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	9:59:55 AM	Tube furnace set to 0
12/11/2012	10:00:25 AM	H2 valve closed
12/11/2012	10:00:25 AM	BCl3 valve closed
12/11/2012	10:00:25 AM	PH3 valve closed
12/11/2012	10:00:25 AM	SiCl4 pre valve closed
12/11/2012	10:00:25 AM	SiCl4 post valve closed
12/11/2012	10:00:25 AM	Bypass valve closed
12/11/2012	10:00:25 AM	Bubbler valve closed
12/11/2012	10:00:25 AM	Helium valve opened
12/11/2012	10:00:25 AM	Main Vac valve opened
12/11/2012	10:00:25 AM	Helium MFC set to  20.000000
12/11/2012	10:00:25 AM	H2 MFC set to  0.000000
12/11/2012	10:00:25 AM	BCl3 MFC set to  0.000000
12/11/2012	10:00:25 AM	PH3 MFC set to  0.000000
12/11/2012	10:00:25 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:00:25 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:00:26 AM	Tube furnace set to 0
12/11/2012	10:00:56 AM	Helium valve closed
12/11/2012	10:00:56 AM	H2 valve closed
12/11/2012	10:00:56 AM	BCl3 valve closed
12/11/2012	10:00:56 AM	PH3 valve closed
12/11/2012	10:00:56 AM	SiCl4 pre valve closed
12/11/2012	10:00:56 AM	SiCl4 post valve closed
12/11/2012	10:00:56 AM	Bypass valve closed
12/11/2012	10:00:56 AM	Bubbler valve closed
12/11/2012	10:00:56 AM	Main Vac valve opened
12/11/2012	10:00:56 AM	Helium MFC set to  0.000000
12/11/2012	10:00:56 AM	H2 MFC set to  0.000000
12/11/2012	10:00:56 AM	BCl3 MFC set to  0.000000
12/11/2012	10:00:56 AM	PH3 MFC set to  0.000000
12/11/2012	10:00:56 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:00:56 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:00:56 AM	Tube furnace set to 0
12/11/2012	10:01:26 AM	H2 valve closed
12/11/2012	10:01:26 AM	BCl3 valve closed
12/11/2012	10:01:26 AM	PH3 valve closed
12/11/2012	10:01:26 AM	SiCl4 pre valve closed
12/11/2012	10:01:26 AM	SiCl4 post valve closed
12/11/2012	10:01:26 AM	Bypass valve closed
12/11/2012	10:01:26 AM	Bubbler valve closed
12/11/2012	10:01:26 AM	Helium valve opened
12/11/2012	10:01:26 AM	Main Vac valve opened
12/11/2012	10:01:26 AM	Helium MFC set to  20.000000
12/11/2012	10:01:26 AM	H2 MFC set to  0.000000
12/11/2012	10:01:26 AM	BCl3 MFC set to  0.000000
12/11/2012	10:01:26 AM	PH3 MFC set to  0.000000
12/11/2012	10:01:26 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:01:26 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:01:26 AM	Tube furnace set to 0
12/11/2012	10:01:56 AM	Helium valve closed
12/11/2012	10:01:56 AM	H2 valve closed
12/11/2012	10:01:56 AM	BCl3 valve closed
12/11/2012	10:01:56 AM	PH3 valve closed
12/11/2012	10:01:56 AM	SiCl4 pre valve closed
12/11/2012	10:01:56 AM	SiCl4 post valve closed
12/11/2012	10:01:56 AM	Bypass valve closed
12/11/2012	10:01:56 AM	Bubbler valve closed
12/11/2012	10:01:56 AM	Main Vac valve opened
12/11/2012	10:01:56 AM	Helium MFC set to  0.000000
12/11/2012	10:01:56 AM	H2 MFC set to  0.000000
12/11/2012	10:01:56 AM	BCl3 MFC set to  0.000000
12/11/2012	10:01:56 AM	PH3 MFC set to  0.000000
12/11/2012	10:01:56 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:01:56 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:01:56 AM	Tube furnace set to 0
12/11/2012	10:02:26 AM	H2 valve closed
12/11/2012	10:02:26 AM	BCl3 valve closed
12/11/2012	10:02:26 AM	PH3 valve closed
12/11/2012	10:02:26 AM	SiCl4 pre valve closed
12/11/2012	10:02:26 AM	SiCl4 post valve closed
12/11/2012	10:02:26 AM	Bypass valve closed
12/11/2012	10:02:26 AM	Bubbler valve closed
12/11/2012	10:02:26 AM	Helium valve opened
12/11/2012	10:02:26 AM	Main Vac valve opened
12/11/2012	10:02:26 AM	Helium MFC set to  20.000000
12/11/2012	10:02:26 AM	H2 MFC set to  0.000000
12/11/2012	10:02:26 AM	BCl3 MFC set to  0.000000
12/11/2012	10:02:26 AM	PH3 MFC set to  0.000000
12/11/2012	10:02:26 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:02:26 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:02:27 AM	Tube furnace set to 0
12/11/2012	10:02:57 AM	Helium valve closed
12/11/2012	10:02:57 AM	H2 valve closed
12/11/2012	10:02:57 AM	BCl3 valve closed
12/11/2012	10:02:57 AM	PH3 valve closed
12/11/2012	10:02:57 AM	SiCl4 pre valve closed
12/11/2012	10:02:57 AM	SiCl4 post valve closed
12/11/2012	10:02:57 AM	Bypass valve closed
12/11/2012	10:02:57 AM	Bubbler valve closed
12/11/2012	10:02:57 AM	Main Vac valve opened
12/11/2012	10:02:57 AM	Helium MFC set to  0.000000
12/11/2012	10:02:57 AM	H2 MFC set to  0.000000
12/11/2012	10:02:57 AM	BCl3 MFC set to  0.000000
12/11/2012	10:02:57 AM	PH3 MFC set to  0.000000
12/11/2012	10:02:57 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:02:57 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:02:57 AM	Tube furnace set to 0
12/11/2012	10:03:27 AM	H2 valve closed
12/11/2012	10:03:27 AM	BCl3 valve closed
12/11/2012	10:03:27 AM	PH3 valve closed
12/11/2012	10:03:27 AM	SiCl4 pre valve closed
12/11/2012	10:03:27 AM	SiCl4 post valve closed
12/11/2012	10:03:27 AM	Bypass valve closed
12/11/2012	10:03:27 AM	Bubbler valve closed
12/11/2012	10:03:27 AM	Helium valve opened
12/11/2012	10:03:27 AM	Main Vac valve opened
12/11/2012	10:03:27 AM	Helium MFC set to  20.000000
12/11/2012	10:03:27 AM	H2 MFC set to  0.000000
12/11/2012	10:03:27 AM	BCl3 MFC set to  0.000000
12/11/2012	10:03:27 AM	PH3 MFC set to  0.000000
12/11/2012	10:03:27 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:03:27 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:03:27 AM	Tube furnace set to 0
12/11/2012	10:03:57 AM	Helium valve closed
12/11/2012	10:03:57 AM	H2 valve closed
12/11/2012	10:03:57 AM	BCl3 valve closed
12/11/2012	10:03:57 AM	PH3 valve closed
12/11/2012	10:03:57 AM	SiCl4 pre valve closed
12/11/2012	10:03:57 AM	SiCl4 post valve closed
12/11/2012	10:03:57 AM	Bypass valve closed
12/11/2012	10:03:57 AM	Bubbler valve closed
12/11/2012	10:03:57 AM	Main Vac valve opened
12/11/2012	10:03:57 AM	Helium MFC set to  0.000000
12/11/2012	10:03:57 AM	H2 MFC set to  0.000000
12/11/2012	10:03:57 AM	BCl3 MFC set to  0.000000
12/11/2012	10:03:57 AM	PH3 MFC set to  0.000000
12/11/2012	10:03:57 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:03:57 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:03:57 AM	Tube furnace set to 0
12/11/2012	10:04:27 AM	H2 valve closed
12/11/2012	10:04:27 AM	BCl3 valve closed
12/11/2012	10:04:27 AM	PH3 valve closed
12/11/2012	10:04:27 AM	SiCl4 pre valve closed
12/11/2012	10:04:27 AM	SiCl4 post valve closed
12/11/2012	10:04:27 AM	Bypass valve closed
12/11/2012	10:04:27 AM	Bubbler valve closed
12/11/2012	10:04:27 AM	Helium valve opened
12/11/2012	10:04:27 AM	Main Vac valve opened
12/11/2012	10:04:27 AM	Helium MFC set to  20.000000
12/11/2012	10:04:27 AM	H2 MFC set to  0.000000
12/11/2012	10:04:27 AM	BCl3 MFC set to  0.000000
12/11/2012	10:04:27 AM	PH3 MFC set to  0.000000
12/11/2012	10:04:27 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:04:27 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:04:28 AM	Tube furnace set to 0
12/11/2012	10:04:58 AM	Helium valve closed
12/11/2012	10:04:58 AM	H2 valve closed
12/11/2012	10:04:58 AM	BCl3 valve closed
12/11/2012	10:04:58 AM	PH3 valve closed
12/11/2012	10:04:58 AM	SiCl4 pre valve closed
12/11/2012	10:04:58 AM	SiCl4 post valve closed
12/11/2012	10:04:58 AM	Bypass valve closed
12/11/2012	10:04:58 AM	Bubbler valve closed
12/11/2012	10:04:58 AM	Main Vac valve opened
12/11/2012	10:04:58 AM	Helium MFC set to  0.000000
12/11/2012	10:04:58 AM	H2 MFC set to  0.000000
12/11/2012	10:04:58 AM	BCl3 MFC set to  0.000000
12/11/2012	10:04:58 AM	PH3 MFC set to  0.000000
12/11/2012	10:04:58 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:04:58 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:04:58 AM	Tube furnace set to 0
12/11/2012	10:05:28 AM	H2 valve closed
12/11/2012	10:05:28 AM	BCl3 valve closed
12/11/2012	10:05:28 AM	PH3 valve closed
12/11/2012	10:05:28 AM	SiCl4 pre valve closed
12/11/2012	10:05:28 AM	SiCl4 post valve closed
12/11/2012	10:05:28 AM	Bypass valve closed
12/11/2012	10:05:28 AM	Bubbler valve closed
12/11/2012	10:05:28 AM	Helium valve opened
12/11/2012	10:05:28 AM	Main Vac valve opened
12/11/2012	10:05:28 AM	Helium MFC set to  20.000000
12/11/2012	10:05:28 AM	H2 MFC set to  0.000000
12/11/2012	10:05:28 AM	BCl3 MFC set to  0.000000
12/11/2012	10:05:28 AM	PH3 MFC set to  0.000000
12/11/2012	10:05:28 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:05:28 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:05:28 AM	Tube furnace set to 0
12/11/2012	10:05:58 AM	Helium valve closed
12/11/2012	10:05:58 AM	H2 valve closed
12/11/2012	10:05:58 AM	BCl3 valve closed
12/11/2012	10:05:58 AM	PH3 valve closed
12/11/2012	10:05:58 AM	SiCl4 pre valve closed
12/11/2012	10:05:58 AM	SiCl4 post valve closed
12/11/2012	10:05:58 AM	Bypass valve closed
12/11/2012	10:05:58 AM	Bubbler valve closed
12/11/2012	10:05:58 AM	Main Vac valve opened
12/11/2012	10:05:58 AM	Helium MFC set to  0.000000
12/11/2012	10:05:58 AM	H2 MFC set to  0.000000
12/11/2012	10:05:58 AM	BCl3 MFC set to  0.000000
12/11/2012	10:05:58 AM	PH3 MFC set to  0.000000
12/11/2012	10:05:58 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:05:58 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:05:58 AM	Tube furnace set to 0
12/11/2012	10:06:28 AM	H2 valve closed
12/11/2012	10:06:28 AM	BCl3 valve closed
12/11/2012	10:06:28 AM	PH3 valve closed
12/11/2012	10:06:28 AM	SiCl4 pre valve closed
12/11/2012	10:06:28 AM	SiCl4 post valve closed
12/11/2012	10:06:28 AM	Bypass valve closed
12/11/2012	10:06:28 AM	Bubbler valve closed
12/11/2012	10:06:28 AM	Helium valve opened
12/11/2012	10:06:28 AM	Main Vac valve opened
12/11/2012	10:06:28 AM	Helium MFC set to  20.000000
12/11/2012	10:06:28 AM	H2 MFC set to  0.000000
12/11/2012	10:06:28 AM	BCl3 MFC set to  0.000000
12/11/2012	10:06:28 AM	PH3 MFC set to  0.000000
12/11/2012	10:06:28 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:06:28 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:06:29 AM	Tube furnace set to 0
12/11/2012	10:06:59 AM	Helium valve closed
12/11/2012	10:06:59 AM	H2 valve closed
12/11/2012	10:06:59 AM	BCl3 valve closed
12/11/2012	10:06:59 AM	PH3 valve closed
12/11/2012	10:06:59 AM	SiCl4 pre valve closed
12/11/2012	10:06:59 AM	SiCl4 post valve closed
12/11/2012	10:06:59 AM	Bypass valve closed
12/11/2012	10:06:59 AM	Bubbler valve closed
12/11/2012	10:06:59 AM	Main Vac valve opened
12/11/2012	10:06:59 AM	Helium MFC set to  0.000000
12/11/2012	10:06:59 AM	H2 MFC set to  0.000000
12/11/2012	10:06:59 AM	BCl3 MFC set to  0.000000
12/11/2012	10:06:59 AM	PH3 MFC set to  0.000000
12/11/2012	10:06:59 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:06:59 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:06:59 AM	Tube furnace set to 0
12/11/2012	10:07:00 AM	Run finished at 10:07 AM
12/11/2012	10:07:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	10:11:55 AM	Main Vac valve closed
12/11/2012	10:12:08 AM	Main Vac valve opened
12/11/2012	10:12:45 AM	Recipe started at 10:12 AM
12/11/2012	10:12:45 AM	Helium valve closed
12/11/2012	10:12:45 AM	H2 valve closed
12/11/2012	10:12:45 AM	BCl3 valve closed
12/11/2012	10:12:45 AM	PH3 valve closed
12/11/2012	10:12:45 AM	SiCl4 pre valve closed
12/11/2012	10:12:45 AM	SiCl4 post valve closed
12/11/2012	10:12:45 AM	Main Vac valve closed
12/11/2012	10:12:45 AM	Bypass valve closed
12/11/2012	10:12:45 AM	Bubbler valve closed
12/11/2012	10:12:45 AM	Helium MFC set to  0.000000
12/11/2012	10:12:45 AM	H2 MFC set to  0.000000
12/11/2012	10:12:45 AM	BCl3 MFC set to  0.000000
12/11/2012	10:12:45 AM	PH3 MFC set to  0.000000
12/11/2012	10:12:45 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:12:45 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:12:45 AM	Tube furnace set to 0
12/11/2012	10:12:48 AM	Helium valve closed
12/11/2012	10:12:48 AM	BCl3 valve closed
12/11/2012	10:12:48 AM	PH3 valve closed
12/11/2012	10:12:48 AM	SiCl4 pre valve closed
12/11/2012	10:12:48 AM	SiCl4 post valve closed
12/11/2012	10:12:48 AM	Main Vac valve closed
12/11/2012	10:12:48 AM	Bypass valve closed
12/11/2012	10:12:48 AM	Bubbler valve closed
12/11/2012	10:12:48 AM	H2 valve opened
12/11/2012	10:12:48 AM	Helium MFC set to  0.000000
12/11/2012	10:12:48 AM	H2 MFC set to  500.000000
12/11/2012	10:12:48 AM	BCl3 MFC set to  0.000000
12/11/2012	10:12:48 AM	PH3 MFC set to  0.000000
12/11/2012	10:12:48 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:12:48 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:12:48 AM	Tube furnace set to 0
12/11/2012	10:13:59 AM	Helium valve closed
12/11/2012	10:13:59 AM	BCl3 valve closed
12/11/2012	10:13:59 AM	PH3 valve closed
12/11/2012	10:13:59 AM	SiCl4 pre valve closed
12/11/2012	10:13:59 AM	SiCl4 post valve closed
12/11/2012	10:13:59 AM	Main Vac valve closed
12/11/2012	10:13:59 AM	Bypass valve closed
12/11/2012	10:13:59 AM	H2 valve opened
12/11/2012	10:13:59 AM	Bubbler valve opened
12/11/2012	10:13:59 AM	Helium MFC set to  0.000000
12/11/2012	10:13:59 AM	H2 MFC set to  500.000000
12/11/2012	10:13:59 AM	BCl3 MFC set to  0.000000
12/11/2012	10:13:59 AM	PH3 MFC set to  0.000000
12/11/2012	10:14:00 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:14:00 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:14:00 AM	Tube furnace set to 0
12/11/2012	10:14:01 AM	Helium valve closed
12/11/2012	10:14:01 AM	BCl3 valve closed
12/11/2012	10:14:01 AM	PH3 valve closed
12/11/2012	10:14:01 AM	SiCl4 pre valve closed
12/11/2012	10:14:01 AM	SiCl4 post valve closed
12/11/2012	10:14:01 AM	Main Vac valve closed
12/11/2012	10:14:01 AM	Bypass valve closed
12/11/2012	10:14:01 AM	H2 valve opened
12/11/2012	10:14:01 AM	Bubbler valve opened
12/11/2012	10:14:01 AM	Helium MFC set to  0.000000
12/11/2012	10:14:01 AM	H2 MFC set to  500.000000
12/11/2012	10:14:01 AM	BCl3 MFC set to  0.000000
12/11/2012	10:14:01 AM	PH3 MFC set to  0.000000
12/11/2012	10:14:01 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:14:01 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:14:01 AM	Tube furnace set to 1000
12/11/2012	10:44:01 AM	Helium valve closed
12/11/2012	10:44:01 AM	BCl3 valve closed
12/11/2012	10:44:01 AM	Main Vac valve closed
12/11/2012	10:44:01 AM	Bypass valve closed
12/11/2012	10:44:01 AM	H2 valve opened
12/11/2012	10:44:01 AM	PH3 valve opened
12/11/2012	10:44:01 AM	SiCl4 pre valve opened
12/11/2012	10:44:01 AM	SiCl4 post valve opened
12/11/2012	10:44:01 AM	Bubbler valve opened
12/11/2012	10:44:01 AM	Helium MFC set to  0.000000
12/11/2012	10:44:01 AM	H2 MFC set to  500.000000
12/11/2012	10:44:01 AM	BCl3 MFC set to  0.000000
12/11/2012	10:44:01 AM	PH3 MFC set to  0.300000
12/11/2012	10:44:01 AM	SiCl4 MFC set to  25.000000
12/11/2012	10:44:01 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:44:01 AM	Tube furnace set to 1000
12/11/2012	10:59:01 AM	Helium valve closed
12/11/2012	10:59:01 AM	BCl3 valve closed
12/11/2012	10:59:01 AM	PH3 valve closed
12/11/2012	10:59:01 AM	SiCl4 pre valve closed
12/11/2012	10:59:01 AM	SiCl4 post valve closed
12/11/2012	10:59:01 AM	Main Vac valve closed
12/11/2012	10:59:01 AM	Bypass valve closed
12/11/2012	10:59:01 AM	H2 valve opened
12/11/2012	10:59:01 AM	Bubbler valve opened
12/11/2012	10:59:01 AM	Helium MFC set to  0.000000
12/11/2012	10:59:01 AM	H2 MFC set to  500.000000
12/11/2012	10:59:01 AM	BCl3 MFC set to  0.000000
12/11/2012	10:59:01 AM	PH3 MFC set to  0.000000
12/11/2012	10:59:01 AM	SiCl4 MFC set to  0.000000
12/11/2012	10:59:01 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	10:59:01 AM	Tube furnace set to 750
12/11/2012	11:04:01 AM	H2 valve closed
12/11/2012	11:04:01 AM	BCl3 valve closed
12/11/2012	11:04:01 AM	PH3 valve closed
12/11/2012	11:04:01 AM	SiCl4 pre valve closed
12/11/2012	11:04:01 AM	SiCl4 post valve closed
12/11/2012	11:04:01 AM	Main Vac valve closed
12/11/2012	11:04:01 AM	Bypass valve closed
12/11/2012	11:04:02 AM	Helium valve opened
12/11/2012	11:04:02 AM	Bubbler valve opened
12/11/2012	11:04:02 AM	Helium MFC set to  500.000000
12/11/2012	11:04:02 AM	H2 MFC set to  0.000000
12/11/2012	11:04:02 AM	BCl3 MFC set to  0.000000
12/11/2012	11:04:02 AM	PH3 MFC set to  0.000000
12/11/2012	11:04:02 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:04:02 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:04:02 AM	Tube furnace set to 0
12/11/2012	11:18:12 AM	Helium valve closed
12/11/2012	11:18:12 AM	H2 valve closed
12/11/2012	11:18:12 AM	BCl3 valve closed
12/11/2012	11:18:12 AM	PH3 valve closed
12/11/2012	11:18:12 AM	SiCl4 pre valve closed
12/11/2012	11:18:12 AM	SiCl4 post valve closed
12/11/2012	11:18:12 AM	Main Vac valve closed
12/11/2012	11:18:12 AM	Bypass valve closed
12/11/2012	11:18:12 AM	Bubbler valve closed
12/11/2012	11:18:12 AM	Helium MFC set to  0.000000
12/11/2012	11:18:12 AM	H2 MFC set to  0.000000
12/11/2012	11:18:12 AM	BCl3 MFC set to  0.000000
12/11/2012	11:18:12 AM	PH3 MFC set to  0.000000
12/11/2012	11:18:12 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:18:12 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:18:12 AM	Tube furnace set to 0
12/11/2012	11:18:13 AM	Run finished at 11:18 AM
12/11/2012	11:21:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/11/2012	11:21:24 AM	Recipe started at 11:21 AM
12/11/2012	11:21:24 AM	Helium valve closed
12/11/2012	11:21:24 AM	H2 valve closed
12/11/2012	11:21:24 AM	BCl3 valve closed
12/11/2012	11:21:24 AM	PH3 valve closed
12/11/2012	11:21:24 AM	SiCl4 pre valve closed
12/11/2012	11:21:24 AM	SiCl4 post valve closed
12/11/2012	11:21:24 AM	Main Vac valve closed
12/11/2012	11:21:24 AM	Bubbler valve closed
12/11/2012	11:21:24 AM	Bypass valve opened
12/11/2012	11:21:24 AM	Helium MFC set to  0.000000
12/11/2012	11:21:24 AM	H2 MFC set to  0.000000
12/11/2012	11:21:24 AM	BCl3 MFC set to  0.000000
12/11/2012	11:21:24 AM	PH3 MFC set to  0.000000
12/11/2012	11:21:24 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:21:24 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:21:24 AM	Tube furnace set to 0
12/11/2012	11:22:34 AM	Helium valve closed
12/11/2012	11:22:34 AM	H2 valve closed
12/11/2012	11:22:34 AM	BCl3 valve closed
12/11/2012	11:22:34 AM	PH3 valve closed
12/11/2012	11:22:34 AM	SiCl4 pre valve closed
12/11/2012	11:22:34 AM	SiCl4 post valve closed
12/11/2012	11:22:34 AM	Main Vac valve closed
12/11/2012	11:22:34 AM	Bubbler valve closed
12/11/2012	11:22:34 AM	Bypass valve opened
12/11/2012	11:22:34 AM	Helium MFC set to  0.000000
12/11/2012	11:22:34 AM	H2 MFC set to  0.000000
12/11/2012	11:22:34 AM	BCl3 MFC set to  0.000000
12/11/2012	11:22:34 AM	PH3 MFC set to  0.000000
12/11/2012	11:22:34 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:22:34 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:22:34 AM	Tube furnace set to 0
12/11/2012	11:22:45 AM	Helium valve closed
12/11/2012	11:22:45 AM	H2 valve closed
12/11/2012	11:22:45 AM	BCl3 valve closed
12/11/2012	11:22:45 AM	PH3 valve closed
12/11/2012	11:22:45 AM	SiCl4 pre valve closed
12/11/2012	11:22:45 AM	SiCl4 post valve closed
12/11/2012	11:22:45 AM	Bypass valve closed
12/11/2012	11:22:45 AM	Bubbler valve closed
12/11/2012	11:22:45 AM	Main Vac valve opened
12/11/2012	11:22:45 AM	Helium MFC set to  0.000000
12/11/2012	11:22:45 AM	H2 MFC set to  0.000000
12/11/2012	11:22:45 AM	BCl3 MFC set to  0.000000
12/11/2012	11:22:45 AM	PH3 MFC set to  0.000000
12/11/2012	11:22:45 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:22:45 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:22:45 AM	Tube furnace set to 0
12/11/2012	11:22:46 AM	Run finished at 11:22 AM
12/11/2012	11:22:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/11/2012	11:23:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	11:23:32 AM	Recipe started at 11:23 AM
12/11/2012	11:23:32 AM	Helium valve closed
12/11/2012	11:23:32 AM	H2 valve closed
12/11/2012	11:23:32 AM	BCl3 valve closed
12/11/2012	11:23:32 AM	PH3 valve closed
12/11/2012	11:23:32 AM	SiCl4 pre valve closed
12/11/2012	11:23:32 AM	SiCl4 post valve closed
12/11/2012	11:23:32 AM	Main Vac valve closed
12/11/2012	11:23:32 AM	Bubbler valve closed
12/11/2012	11:23:32 AM	Bypass valve opened
12/11/2012	11:23:32 AM	Helium MFC set to  0.000000
12/11/2012	11:23:32 AM	H2 MFC set to  0.000000
12/11/2012	11:23:32 AM	BCl3 MFC set to  0.000000
12/11/2012	11:23:32 AM	PH3 MFC set to  0.000000
12/11/2012	11:23:32 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:23:32 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:23:32 AM	Tube furnace set to 0
12/11/2012	11:23:32 AM	Helium valve closed
12/11/2012	11:23:32 AM	H2 valve closed
12/11/2012	11:23:32 AM	BCl3 valve closed
12/11/2012	11:23:32 AM	PH3 valve closed
12/11/2012	11:23:32 AM	SiCl4 pre valve closed
12/11/2012	11:23:32 AM	SiCl4 post valve closed
12/11/2012	11:23:32 AM	Main Vac valve closed
12/11/2012	11:23:32 AM	Bubbler valve closed
12/11/2012	11:23:32 AM	Bypass valve opened
12/11/2012	11:23:32 AM	Helium MFC set to  0.000000
12/11/2012	11:23:32 AM	H2 MFC set to  0.000000
12/11/2012	11:23:32 AM	BCl3 MFC set to  0.000000
12/11/2012	11:23:32 AM	PH3 MFC set to  0.000000
12/11/2012	11:23:32 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:23:32 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:23:33 AM	Tube furnace set to 0
12/11/2012	11:23:33 AM	Helium valve closed
12/11/2012	11:23:33 AM	H2 valve closed
12/11/2012	11:23:33 AM	BCl3 valve closed
12/11/2012	11:23:33 AM	PH3 valve closed
12/11/2012	11:23:33 AM	SiCl4 pre valve closed
12/11/2012	11:23:33 AM	SiCl4 post valve closed
12/11/2012	11:23:33 AM	Bypass valve closed
12/11/2012	11:23:33 AM	Bubbler valve closed
12/11/2012	11:23:33 AM	Main Vac valve opened
12/11/2012	11:23:33 AM	Helium MFC set to  0.000000
12/11/2012	11:23:33 AM	H2 MFC set to  0.000000
12/11/2012	11:23:33 AM	BCl3 MFC set to  0.000000
12/11/2012	11:23:33 AM	PH3 MFC set to  0.000000
12/11/2012	11:23:33 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:23:33 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:23:33 AM	Tube furnace set to 0
12/11/2012	11:24:03 AM	H2 valve closed
12/11/2012	11:24:03 AM	BCl3 valve closed
12/11/2012	11:24:03 AM	PH3 valve closed
12/11/2012	11:24:03 AM	SiCl4 pre valve closed
12/11/2012	11:24:03 AM	SiCl4 post valve closed
12/11/2012	11:24:03 AM	Bypass valve closed
12/11/2012	11:24:03 AM	Bubbler valve closed
12/11/2012	11:24:03 AM	Helium valve opened
12/11/2012	11:24:03 AM	Main Vac valve opened
12/11/2012	11:24:03 AM	Helium MFC set to  20.000000
12/11/2012	11:24:03 AM	H2 MFC set to  0.000000
12/11/2012	11:24:03 AM	BCl3 MFC set to  0.000000
12/11/2012	11:24:03 AM	PH3 MFC set to  0.000000
12/11/2012	11:24:03 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:24:03 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:24:03 AM	Tube furnace set to 0
12/11/2012	11:24:33 AM	Helium valve closed
12/11/2012	11:24:33 AM	H2 valve closed
12/11/2012	11:24:33 AM	BCl3 valve closed
12/11/2012	11:24:33 AM	PH3 valve closed
12/11/2012	11:24:33 AM	SiCl4 pre valve closed
12/11/2012	11:24:33 AM	SiCl4 post valve closed
12/11/2012	11:24:33 AM	Bypass valve closed
12/11/2012	11:24:33 AM	Bubbler valve closed
12/11/2012	11:24:33 AM	Main Vac valve opened
12/11/2012	11:24:33 AM	Helium MFC set to  0.000000
12/11/2012	11:24:33 AM	H2 MFC set to  0.000000
12/11/2012	11:24:33 AM	BCl3 MFC set to  0.000000
12/11/2012	11:24:33 AM	PH3 MFC set to  0.000000
12/11/2012	11:24:33 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:24:33 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:24:34 AM	Tube furnace set to 0
12/11/2012	11:25:04 AM	H2 valve closed
12/11/2012	11:25:04 AM	BCl3 valve closed
12/11/2012	11:25:04 AM	PH3 valve closed
12/11/2012	11:25:04 AM	SiCl4 pre valve closed
12/11/2012	11:25:04 AM	SiCl4 post valve closed
12/11/2012	11:25:04 AM	Bypass valve closed
12/11/2012	11:25:04 AM	Bubbler valve closed
12/11/2012	11:25:04 AM	Helium valve opened
12/11/2012	11:25:04 AM	Main Vac valve opened
12/11/2012	11:25:04 AM	Helium MFC set to  20.000000
12/11/2012	11:25:04 AM	H2 MFC set to  0.000000
12/11/2012	11:25:04 AM	BCl3 MFC set to  0.000000
12/11/2012	11:25:04 AM	PH3 MFC set to  0.000000
12/11/2012	11:25:04 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:25:04 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:25:04 AM	Tube furnace set to 0
12/11/2012	11:25:34 AM	Helium valve closed
12/11/2012	11:25:34 AM	H2 valve closed
12/11/2012	11:25:34 AM	BCl3 valve closed
12/11/2012	11:25:34 AM	PH3 valve closed
12/11/2012	11:25:34 AM	SiCl4 pre valve closed
12/11/2012	11:25:34 AM	SiCl4 post valve closed
12/11/2012	11:25:34 AM	Bypass valve closed
12/11/2012	11:25:34 AM	Bubbler valve closed
12/11/2012	11:25:34 AM	Main Vac valve opened
12/11/2012	11:25:34 AM	Helium MFC set to  0.000000
12/11/2012	11:25:34 AM	H2 MFC set to  0.000000
12/11/2012	11:25:34 AM	BCl3 MFC set to  0.000000
12/11/2012	11:25:34 AM	PH3 MFC set to  0.000000
12/11/2012	11:25:34 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:25:34 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:25:34 AM	Tube furnace set to 0
12/11/2012	11:26:04 AM	H2 valve closed
12/11/2012	11:26:04 AM	BCl3 valve closed
12/11/2012	11:26:04 AM	PH3 valve closed
12/11/2012	11:26:04 AM	SiCl4 pre valve closed
12/11/2012	11:26:04 AM	SiCl4 post valve closed
12/11/2012	11:26:04 AM	Bypass valve closed
12/11/2012	11:26:04 AM	Bubbler valve closed
12/11/2012	11:26:04 AM	Helium valve opened
12/11/2012	11:26:04 AM	Main Vac valve opened
12/11/2012	11:26:04 AM	Helium MFC set to  20.000000
12/11/2012	11:26:04 AM	H2 MFC set to  0.000000
12/11/2012	11:26:04 AM	BCl3 MFC set to  0.000000
12/11/2012	11:26:04 AM	PH3 MFC set to  0.000000
12/11/2012	11:26:04 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:26:04 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:26:04 AM	Tube furnace set to 0
12/11/2012	11:26:34 AM	Helium valve closed
12/11/2012	11:26:34 AM	H2 valve closed
12/11/2012	11:26:34 AM	BCl3 valve closed
12/11/2012	11:26:34 AM	PH3 valve closed
12/11/2012	11:26:34 AM	SiCl4 pre valve closed
12/11/2012	11:26:34 AM	SiCl4 post valve closed
12/11/2012	11:26:34 AM	Bypass valve closed
12/11/2012	11:26:34 AM	Bubbler valve closed
12/11/2012	11:26:34 AM	Main Vac valve opened
12/11/2012	11:26:34 AM	Helium MFC set to  0.000000
12/11/2012	11:26:35 AM	H2 MFC set to  0.000000
12/11/2012	11:26:35 AM	BCl3 MFC set to  0.000000
12/11/2012	11:26:35 AM	PH3 MFC set to  0.000000
12/11/2012	11:26:35 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:26:35 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:26:35 AM	Tube furnace set to 0
12/11/2012	11:27:05 AM	H2 valve closed
12/11/2012	11:27:05 AM	BCl3 valve closed
12/11/2012	11:27:05 AM	PH3 valve closed
12/11/2012	11:27:05 AM	SiCl4 pre valve closed
12/11/2012	11:27:05 AM	SiCl4 post valve closed
12/11/2012	11:27:05 AM	Bypass valve closed
12/11/2012	11:27:05 AM	Bubbler valve closed
12/11/2012	11:27:05 AM	Helium valve opened
12/11/2012	11:27:05 AM	Main Vac valve opened
12/11/2012	11:27:05 AM	Helium MFC set to  20.000000
12/11/2012	11:27:05 AM	H2 MFC set to  0.000000
12/11/2012	11:27:05 AM	BCl3 MFC set to  0.000000
12/11/2012	11:27:05 AM	PH3 MFC set to  0.000000
12/11/2012	11:27:05 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:27:05 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:27:05 AM	Tube furnace set to 0
12/11/2012	11:27:35 AM	Helium valve closed
12/11/2012	11:27:35 AM	H2 valve closed
12/11/2012	11:27:35 AM	BCl3 valve closed
12/11/2012	11:27:35 AM	PH3 valve closed
12/11/2012	11:27:35 AM	SiCl4 pre valve closed
12/11/2012	11:27:35 AM	SiCl4 post valve closed
12/11/2012	11:27:35 AM	Bypass valve closed
12/11/2012	11:27:35 AM	Bubbler valve closed
12/11/2012	11:27:35 AM	Main Vac valve opened
12/11/2012	11:27:35 AM	Helium MFC set to  0.000000
12/11/2012	11:27:35 AM	H2 MFC set to  0.000000
12/11/2012	11:27:35 AM	BCl3 MFC set to  0.000000
12/11/2012	11:27:35 AM	PH3 MFC set to  0.000000
12/11/2012	11:27:35 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:27:35 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:27:35 AM	Tube furnace set to 0
12/11/2012	11:28:05 AM	H2 valve closed
12/11/2012	11:28:05 AM	BCl3 valve closed
12/11/2012	11:28:05 AM	PH3 valve closed
12/11/2012	11:28:05 AM	SiCl4 pre valve closed
12/11/2012	11:28:05 AM	SiCl4 post valve closed
12/11/2012	11:28:05 AM	Bypass valve closed
12/11/2012	11:28:05 AM	Bubbler valve closed
12/11/2012	11:28:05 AM	Helium valve opened
12/11/2012	11:28:05 AM	Main Vac valve opened
12/11/2012	11:28:05 AM	Helium MFC set to  20.000000
12/11/2012	11:28:05 AM	H2 MFC set to  0.000000
12/11/2012	11:28:05 AM	BCl3 MFC set to  0.000000
12/11/2012	11:28:05 AM	PH3 MFC set to  0.000000
12/11/2012	11:28:05 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:28:05 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:28:05 AM	Tube furnace set to 0
12/11/2012	11:28:35 AM	Helium valve closed
12/11/2012	11:28:35 AM	H2 valve closed
12/11/2012	11:28:35 AM	BCl3 valve closed
12/11/2012	11:28:35 AM	PH3 valve closed
12/11/2012	11:28:35 AM	SiCl4 pre valve closed
12/11/2012	11:28:35 AM	SiCl4 post valve closed
12/11/2012	11:28:35 AM	Bypass valve closed
12/11/2012	11:28:36 AM	Bubbler valve closed
12/11/2012	11:28:36 AM	Main Vac valve opened
12/11/2012	11:28:36 AM	Helium MFC set to  0.000000
12/11/2012	11:28:36 AM	H2 MFC set to  0.000000
12/11/2012	11:28:36 AM	BCl3 MFC set to  0.000000
12/11/2012	11:28:36 AM	PH3 MFC set to  0.000000
12/11/2012	11:28:36 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:28:36 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:28:36 AM	Tube furnace set to 0
12/11/2012	11:29:06 AM	H2 valve closed
12/11/2012	11:29:06 AM	BCl3 valve closed
12/11/2012	11:29:06 AM	PH3 valve closed
12/11/2012	11:29:06 AM	SiCl4 pre valve closed
12/11/2012	11:29:06 AM	SiCl4 post valve closed
12/11/2012	11:29:06 AM	Bypass valve closed
12/11/2012	11:29:06 AM	Bubbler valve closed
12/11/2012	11:29:06 AM	Helium valve opened
12/11/2012	11:29:06 AM	Main Vac valve opened
12/11/2012	11:29:06 AM	Helium MFC set to  20.000000
12/11/2012	11:29:06 AM	H2 MFC set to  0.000000
12/11/2012	11:29:06 AM	BCl3 MFC set to  0.000000
12/11/2012	11:29:06 AM	PH3 MFC set to  0.000000
12/11/2012	11:29:06 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:29:06 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:29:06 AM	Tube furnace set to 0
12/11/2012	11:29:36 AM	Helium valve closed
12/11/2012	11:29:36 AM	H2 valve closed
12/11/2012	11:29:36 AM	BCl3 valve closed
12/11/2012	11:29:36 AM	PH3 valve closed
12/11/2012	11:29:36 AM	SiCl4 pre valve closed
12/11/2012	11:29:36 AM	SiCl4 post valve closed
12/11/2012	11:29:36 AM	Bypass valve closed
12/11/2012	11:29:36 AM	Bubbler valve closed
12/11/2012	11:29:36 AM	Main Vac valve opened
12/11/2012	11:29:36 AM	Helium MFC set to  0.000000
12/11/2012	11:29:36 AM	H2 MFC set to  0.000000
12/11/2012	11:29:36 AM	BCl3 MFC set to  0.000000
12/11/2012	11:29:36 AM	PH3 MFC set to  0.000000
12/11/2012	11:29:36 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:29:36 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:29:36 AM	Tube furnace set to 0
12/11/2012	11:30:06 AM	H2 valve closed
12/11/2012	11:30:06 AM	BCl3 valve closed
12/11/2012	11:30:06 AM	PH3 valve closed
12/11/2012	11:30:06 AM	SiCl4 pre valve closed
12/11/2012	11:30:06 AM	SiCl4 post valve closed
12/11/2012	11:30:06 AM	Bypass valve closed
12/11/2012	11:30:06 AM	Bubbler valve closed
12/11/2012	11:30:06 AM	Helium valve opened
12/11/2012	11:30:06 AM	Main Vac valve opened
12/11/2012	11:30:06 AM	Helium MFC set to  20.000000
12/11/2012	11:30:06 AM	H2 MFC set to  0.000000
12/11/2012	11:30:06 AM	BCl3 MFC set to  0.000000
12/11/2012	11:30:06 AM	PH3 MFC set to  0.000000
12/11/2012	11:30:06 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:30:06 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:30:06 AM	Tube furnace set to 0
12/11/2012	11:30:36 AM	Helium valve closed
12/11/2012	11:30:36 AM	H2 valve closed
12/11/2012	11:30:36 AM	BCl3 valve closed
12/11/2012	11:30:36 AM	PH3 valve closed
12/11/2012	11:30:37 AM	SiCl4 pre valve closed
12/11/2012	11:30:37 AM	SiCl4 post valve closed
12/11/2012	11:30:37 AM	Bypass valve closed
12/11/2012	11:30:37 AM	Bubbler valve closed
12/11/2012	11:30:37 AM	Main Vac valve opened
12/11/2012	11:30:37 AM	Helium MFC set to  0.000000
12/11/2012	11:30:37 AM	H2 MFC set to  0.000000
12/11/2012	11:30:37 AM	BCl3 MFC set to  0.000000
12/11/2012	11:30:37 AM	PH3 MFC set to  0.000000
12/11/2012	11:30:37 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:30:37 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:30:37 AM	Tube furnace set to 0
12/11/2012	11:31:07 AM	H2 valve closed
12/11/2012	11:31:07 AM	BCl3 valve closed
12/11/2012	11:31:07 AM	PH3 valve closed
12/11/2012	11:31:07 AM	SiCl4 pre valve closed
12/11/2012	11:31:07 AM	SiCl4 post valve closed
12/11/2012	11:31:07 AM	Bypass valve closed
12/11/2012	11:31:07 AM	Bubbler valve closed
12/11/2012	11:31:07 AM	Helium valve opened
12/11/2012	11:31:07 AM	Main Vac valve opened
12/11/2012	11:31:07 AM	Helium MFC set to  20.000000
12/11/2012	11:31:07 AM	H2 MFC set to  0.000000
12/11/2012	11:31:07 AM	BCl3 MFC set to  0.000000
12/11/2012	11:31:07 AM	PH3 MFC set to  0.000000
12/11/2012	11:31:07 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:31:07 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:31:07 AM	Tube furnace set to 0
12/11/2012	11:31:37 AM	Helium valve closed
12/11/2012	11:31:37 AM	H2 valve closed
12/11/2012	11:31:37 AM	BCl3 valve closed
12/11/2012	11:31:37 AM	PH3 valve closed
12/11/2012	11:31:37 AM	SiCl4 pre valve closed
12/11/2012	11:31:37 AM	SiCl4 post valve closed
12/11/2012	11:31:37 AM	Bypass valve closed
12/11/2012	11:31:37 AM	Bubbler valve closed
12/11/2012	11:31:37 AM	Main Vac valve opened
12/11/2012	11:31:37 AM	Helium MFC set to  0.000000
12/11/2012	11:31:37 AM	H2 MFC set to  0.000000
12/11/2012	11:31:37 AM	BCl3 MFC set to  0.000000
12/11/2012	11:31:37 AM	PH3 MFC set to  0.000000
12/11/2012	11:31:37 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:31:37 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:31:37 AM	Tube furnace set to 0
12/11/2012	11:32:07 AM	H2 valve closed
12/11/2012	11:32:07 AM	BCl3 valve closed
12/11/2012	11:32:07 AM	PH3 valve closed
12/11/2012	11:32:07 AM	SiCl4 pre valve closed
12/11/2012	11:32:07 AM	SiCl4 post valve closed
12/11/2012	11:32:07 AM	Bypass valve closed
12/11/2012	11:32:07 AM	Bubbler valve closed
12/11/2012	11:32:07 AM	Helium valve opened
12/11/2012	11:32:07 AM	Main Vac valve opened
12/11/2012	11:32:07 AM	Helium MFC set to  20.000000
12/11/2012	11:32:07 AM	H2 MFC set to  0.000000
12/11/2012	11:32:07 AM	BCl3 MFC set to  0.000000
12/11/2012	11:32:07 AM	PH3 MFC set to  0.000000
12/11/2012	11:32:07 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:32:07 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:32:07 AM	Tube furnace set to 0
12/11/2012	11:32:38 AM	Helium valve closed
12/11/2012	11:32:38 AM	H2 valve closed
12/11/2012	11:32:38 AM	BCl3 valve closed
12/11/2012	11:32:38 AM	PH3 valve closed
12/11/2012	11:32:38 AM	SiCl4 pre valve closed
12/11/2012	11:32:38 AM	SiCl4 post valve closed
12/11/2012	11:32:38 AM	Bypass valve closed
12/11/2012	11:32:38 AM	Bubbler valve closed
12/11/2012	11:32:38 AM	Main Vac valve opened
12/11/2012	11:32:38 AM	Helium MFC set to  0.000000
12/11/2012	11:32:38 AM	H2 MFC set to  0.000000
12/11/2012	11:32:38 AM	BCl3 MFC set to  0.000000
12/11/2012	11:32:38 AM	PH3 MFC set to  0.000000
12/11/2012	11:32:38 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:32:38 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:32:38 AM	Tube furnace set to 0
12/11/2012	11:33:08 AM	H2 valve closed
12/11/2012	11:33:08 AM	BCl3 valve closed
12/11/2012	11:33:08 AM	PH3 valve closed
12/11/2012	11:33:08 AM	SiCl4 pre valve closed
12/11/2012	11:33:08 AM	SiCl4 post valve closed
12/11/2012	11:33:08 AM	Bypass valve closed
12/11/2012	11:33:08 AM	Bubbler valve closed
12/11/2012	11:33:08 AM	Helium valve opened
12/11/2012	11:33:08 AM	Main Vac valve opened
12/11/2012	11:33:08 AM	Helium MFC set to  20.000000
12/11/2012	11:33:08 AM	H2 MFC set to  0.000000
12/11/2012	11:33:08 AM	BCl3 MFC set to  0.000000
12/11/2012	11:33:08 AM	PH3 MFC set to  0.000000
12/11/2012	11:33:08 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:33:08 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:33:08 AM	Tube furnace set to 0
12/11/2012	11:33:38 AM	Helium valve closed
12/11/2012	11:33:38 AM	H2 valve closed
12/11/2012	11:33:38 AM	BCl3 valve closed
12/11/2012	11:33:38 AM	PH3 valve closed
12/11/2012	11:33:38 AM	SiCl4 pre valve closed
12/11/2012	11:33:38 AM	SiCl4 post valve closed
12/11/2012	11:33:38 AM	Bypass valve closed
12/11/2012	11:33:38 AM	Bubbler valve closed
12/11/2012	11:33:38 AM	Main Vac valve opened
12/11/2012	11:33:38 AM	Helium MFC set to  0.000000
12/11/2012	11:33:38 AM	H2 MFC set to  0.000000
12/11/2012	11:33:38 AM	BCl3 MFC set to  0.000000
12/11/2012	11:33:38 AM	PH3 MFC set to  0.000000
12/11/2012	11:33:38 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:33:38 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:33:38 AM	Tube furnace set to 0
12/11/2012	11:33:39 AM	Run finished at 11:33 AM
12/11/2012	11:33:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	11:35:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	11:35:44 AM	Recipe started at 11:35 AM
12/11/2012	11:35:44 AM	Helium valve closed
12/11/2012	11:35:44 AM	H2 valve closed
12/11/2012	11:35:44 AM	BCl3 valve closed
12/11/2012	11:35:44 AM	PH3 valve closed
12/11/2012	11:35:44 AM	SiCl4 pre valve closed
12/11/2012	11:35:44 AM	SiCl4 post valve closed
12/11/2012	11:35:44 AM	Main Vac valve closed
12/11/2012	11:35:44 AM	Bubbler valve closed
12/11/2012	11:35:44 AM	Bypass valve opened
12/11/2012	11:35:44 AM	Helium MFC set to  0.000000
12/11/2012	11:35:44 AM	H2 MFC set to  0.000000
12/11/2012	11:35:44 AM	BCl3 MFC set to  0.000000
12/11/2012	11:35:44 AM	PH3 MFC set to  0.000000
12/11/2012	11:35:44 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:35:44 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:35:44 AM	Tube furnace set to 0
12/11/2012	11:35:44 AM	Helium valve closed
12/11/2012	11:35:44 AM	H2 valve closed
12/11/2012	11:35:44 AM	BCl3 valve closed
12/11/2012	11:35:44 AM	PH3 valve closed
12/11/2012	11:35:44 AM	SiCl4 pre valve closed
12/11/2012	11:35:44 AM	SiCl4 post valve closed
12/11/2012	11:35:44 AM	Main Vac valve closed
12/11/2012	11:35:44 AM	Bubbler valve closed
12/11/2012	11:35:44 AM	Bypass valve opened
12/11/2012	11:35:44 AM	Helium MFC set to  0.000000
12/11/2012	11:35:44 AM	H2 MFC set to  0.000000
12/11/2012	11:35:44 AM	BCl3 MFC set to  0.000000
12/11/2012	11:35:44 AM	PH3 MFC set to  0.000000
12/11/2012	11:35:44 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:35:44 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:35:44 AM	Tube furnace set to 0
12/11/2012	11:35:45 AM	Helium valve closed
12/11/2012	11:35:45 AM	H2 valve closed
12/11/2012	11:35:45 AM	BCl3 valve closed
12/11/2012	11:35:45 AM	PH3 valve closed
12/11/2012	11:35:45 AM	SiCl4 pre valve closed
12/11/2012	11:35:45 AM	SiCl4 post valve closed
12/11/2012	11:35:45 AM	Bypass valve closed
12/11/2012	11:35:45 AM	Bubbler valve closed
12/11/2012	11:35:45 AM	Main Vac valve opened
12/11/2012	11:35:45 AM	Helium MFC set to  0.000000
12/11/2012	11:35:45 AM	H2 MFC set to  0.000000
12/11/2012	11:35:45 AM	BCl3 MFC set to  0.000000
12/11/2012	11:35:45 AM	PH3 MFC set to  0.000000
12/11/2012	11:35:45 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:35:45 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:35:45 AM	Tube furnace set to 0
12/11/2012	11:36:15 AM	H2 valve closed
12/11/2012	11:36:15 AM	BCl3 valve closed
12/11/2012	11:36:15 AM	PH3 valve closed
12/11/2012	11:36:15 AM	SiCl4 pre valve closed
12/11/2012	11:36:15 AM	SiCl4 post valve closed
12/11/2012	11:36:15 AM	Bypass valve closed
12/11/2012	11:36:15 AM	Bubbler valve closed
12/11/2012	11:36:15 AM	Helium valve opened
12/11/2012	11:36:15 AM	Main Vac valve opened
12/11/2012	11:36:15 AM	Helium MFC set to  20.000000
12/11/2012	11:36:15 AM	H2 MFC set to  0.000000
12/11/2012	11:36:15 AM	BCl3 MFC set to  0.000000
12/11/2012	11:36:15 AM	PH3 MFC set to  0.000000
12/11/2012	11:36:15 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:36:15 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:36:15 AM	Tube furnace set to 0
12/11/2012	11:36:45 AM	Helium valve closed
12/11/2012	11:36:45 AM	H2 valve closed
12/11/2012	11:36:45 AM	BCl3 valve closed
12/11/2012	11:36:45 AM	PH3 valve closed
12/11/2012	11:36:45 AM	SiCl4 pre valve closed
12/11/2012	11:36:45 AM	SiCl4 post valve closed
12/11/2012	11:36:45 AM	Bypass valve closed
12/11/2012	11:36:45 AM	Bubbler valve closed
12/11/2012	11:36:45 AM	Main Vac valve opened
12/11/2012	11:36:45 AM	Helium MFC set to  0.000000
12/11/2012	11:36:45 AM	H2 MFC set to  0.000000
12/11/2012	11:36:45 AM	BCl3 MFC set to  0.000000
12/11/2012	11:36:45 AM	PH3 MFC set to  0.000000
12/11/2012	11:36:45 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:36:45 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:36:45 AM	Tube furnace set to 0
12/11/2012	11:37:16 AM	H2 valve closed
12/11/2012	11:37:16 AM	BCl3 valve closed
12/11/2012	11:37:16 AM	PH3 valve closed
12/11/2012	11:37:16 AM	SiCl4 pre valve closed
12/11/2012	11:37:16 AM	SiCl4 post valve closed
12/11/2012	11:37:16 AM	Bypass valve closed
12/11/2012	11:37:16 AM	Bubbler valve closed
12/11/2012	11:37:16 AM	Helium valve opened
12/11/2012	11:37:16 AM	Main Vac valve opened
12/11/2012	11:37:16 AM	Helium MFC set to  20.000000
12/11/2012	11:37:16 AM	H2 MFC set to  0.000000
12/11/2012	11:37:16 AM	BCl3 MFC set to  0.000000
12/11/2012	11:37:16 AM	PH3 MFC set to  0.000000
12/11/2012	11:37:16 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:37:16 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:37:16 AM	Tube furnace set to 0
12/11/2012	11:37:46 AM	Helium valve closed
12/11/2012	11:37:46 AM	H2 valve closed
12/11/2012	11:37:46 AM	BCl3 valve closed
12/11/2012	11:37:46 AM	PH3 valve closed
12/11/2012	11:37:46 AM	SiCl4 pre valve closed
12/11/2012	11:37:46 AM	SiCl4 post valve closed
12/11/2012	11:37:46 AM	Bypass valve closed
12/11/2012	11:37:46 AM	Bubbler valve closed
12/11/2012	11:37:46 AM	Main Vac valve opened
12/11/2012	11:37:46 AM	Helium MFC set to  0.000000
12/11/2012	11:37:46 AM	H2 MFC set to  0.000000
12/11/2012	11:37:46 AM	BCl3 MFC set to  0.000000
12/11/2012	11:37:46 AM	PH3 MFC set to  0.000000
12/11/2012	11:37:46 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:37:46 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:37:46 AM	Tube furnace set to 0
12/11/2012	11:38:16 AM	H2 valve closed
12/11/2012	11:38:16 AM	BCl3 valve closed
12/11/2012	11:38:16 AM	PH3 valve closed
12/11/2012	11:38:16 AM	SiCl4 pre valve closed
12/11/2012	11:38:16 AM	SiCl4 post valve closed
12/11/2012	11:38:16 AM	Bypass valve closed
12/11/2012	11:38:16 AM	Bubbler valve closed
12/11/2012	11:38:16 AM	Helium valve opened
12/11/2012	11:38:16 AM	Main Vac valve opened
12/11/2012	11:38:16 AM	Helium MFC set to  20.000000
12/11/2012	11:38:16 AM	H2 MFC set to  0.000000
12/11/2012	11:38:16 AM	BCl3 MFC set to  0.000000
12/11/2012	11:38:16 AM	PH3 MFC set to  0.000000
12/11/2012	11:38:16 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:38:16 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:38:16 AM	Tube furnace set to 0
12/11/2012	11:38:46 AM	Helium valve closed
12/11/2012	11:38:46 AM	H2 valve closed
12/11/2012	11:38:46 AM	BCl3 valve closed
12/11/2012	11:38:46 AM	PH3 valve closed
12/11/2012	11:38:46 AM	SiCl4 pre valve closed
12/11/2012	11:38:46 AM	SiCl4 post valve closed
12/11/2012	11:38:46 AM	Bypass valve closed
12/11/2012	11:38:46 AM	Bubbler valve closed
12/11/2012	11:38:46 AM	Main Vac valve opened
12/11/2012	11:38:46 AM	Helium MFC set to  0.000000
12/11/2012	11:38:46 AM	H2 MFC set to  0.000000
12/11/2012	11:38:46 AM	BCl3 MFC set to  0.000000
12/11/2012	11:38:46 AM	PH3 MFC set to  0.000000
12/11/2012	11:38:46 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:38:46 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:38:46 AM	Tube furnace set to 0
12/11/2012	11:39:17 AM	H2 valve closed
12/11/2012	11:39:17 AM	BCl3 valve closed
12/11/2012	11:39:17 AM	PH3 valve closed
12/11/2012	11:39:17 AM	SiCl4 pre valve closed
12/11/2012	11:39:17 AM	SiCl4 post valve closed
12/11/2012	11:39:17 AM	Bypass valve closed
12/11/2012	11:39:17 AM	Bubbler valve closed
12/11/2012	11:39:17 AM	Helium valve opened
12/11/2012	11:39:17 AM	Main Vac valve opened
12/11/2012	11:39:17 AM	Helium MFC set to  20.000000
12/11/2012	11:39:17 AM	H2 MFC set to  0.000000
12/11/2012	11:39:17 AM	BCl3 MFC set to  0.000000
12/11/2012	11:39:17 AM	PH3 MFC set to  0.000000
12/11/2012	11:39:17 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:39:17 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:39:17 AM	Tube furnace set to 0
12/11/2012	11:39:47 AM	Helium valve closed
12/11/2012	11:39:47 AM	H2 valve closed
12/11/2012	11:39:47 AM	BCl3 valve closed
12/11/2012	11:39:47 AM	PH3 valve closed
12/11/2012	11:39:47 AM	SiCl4 pre valve closed
12/11/2012	11:39:47 AM	SiCl4 post valve closed
12/11/2012	11:39:47 AM	Bypass valve closed
12/11/2012	11:39:47 AM	Bubbler valve closed
12/11/2012	11:39:47 AM	Main Vac valve opened
12/11/2012	11:39:47 AM	Helium MFC set to  0.000000
12/11/2012	11:39:47 AM	H2 MFC set to  0.000000
12/11/2012	11:39:47 AM	BCl3 MFC set to  0.000000
12/11/2012	11:39:47 AM	PH3 MFC set to  0.000000
12/11/2012	11:39:47 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:39:47 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:39:47 AM	Tube furnace set to 0
12/11/2012	11:40:17 AM	H2 valve closed
12/11/2012	11:40:17 AM	BCl3 valve closed
12/11/2012	11:40:17 AM	PH3 valve closed
12/11/2012	11:40:17 AM	SiCl4 pre valve closed
12/11/2012	11:40:17 AM	SiCl4 post valve closed
12/11/2012	11:40:17 AM	Bypass valve closed
12/11/2012	11:40:17 AM	Bubbler valve closed
12/11/2012	11:40:17 AM	Helium valve opened
12/11/2012	11:40:17 AM	Main Vac valve opened
12/11/2012	11:40:17 AM	Helium MFC set to  20.000000
12/11/2012	11:40:17 AM	H2 MFC set to  0.000000
12/11/2012	11:40:17 AM	BCl3 MFC set to  0.000000
12/11/2012	11:40:17 AM	PH3 MFC set to  0.000000
12/11/2012	11:40:17 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:40:17 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:40:17 AM	Tube furnace set to 0
12/11/2012	11:40:47 AM	Helium valve closed
12/11/2012	11:40:47 AM	H2 valve closed
12/11/2012	11:40:47 AM	BCl3 valve closed
12/11/2012	11:40:47 AM	PH3 valve closed
12/11/2012	11:40:47 AM	SiCl4 pre valve closed
12/11/2012	11:40:47 AM	SiCl4 post valve closed
12/11/2012	11:40:47 AM	Bypass valve closed
12/11/2012	11:40:47 AM	Bubbler valve closed
12/11/2012	11:40:47 AM	Main Vac valve opened
12/11/2012	11:40:47 AM	Helium MFC set to  0.000000
12/11/2012	11:40:47 AM	H2 MFC set to  0.000000
12/11/2012	11:40:47 AM	BCl3 MFC set to  0.000000
12/11/2012	11:40:47 AM	PH3 MFC set to  0.000000
12/11/2012	11:40:47 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:40:47 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:40:48 AM	Tube furnace set to 0
12/11/2012	11:41:18 AM	H2 valve closed
12/11/2012	11:41:18 AM	BCl3 valve closed
12/11/2012	11:41:18 AM	PH3 valve closed
12/11/2012	11:41:18 AM	SiCl4 pre valve closed
12/11/2012	11:41:18 AM	SiCl4 post valve closed
12/11/2012	11:41:18 AM	Bypass valve closed
12/11/2012	11:41:18 AM	Bubbler valve closed
12/11/2012	11:41:18 AM	Helium valve opened
12/11/2012	11:41:18 AM	Main Vac valve opened
12/11/2012	11:41:18 AM	Helium MFC set to  20.000000
12/11/2012	11:41:18 AM	H2 MFC set to  0.000000
12/11/2012	11:41:18 AM	BCl3 MFC set to  0.000000
12/11/2012	11:41:18 AM	PH3 MFC set to  0.000000
12/11/2012	11:41:18 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:41:18 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:41:18 AM	Tube furnace set to 0
12/11/2012	11:41:48 AM	Helium valve closed
12/11/2012	11:41:48 AM	H2 valve closed
12/11/2012	11:41:48 AM	BCl3 valve closed
12/11/2012	11:41:48 AM	PH3 valve closed
12/11/2012	11:41:48 AM	SiCl4 pre valve closed
12/11/2012	11:41:48 AM	SiCl4 post valve closed
12/11/2012	11:41:48 AM	Bypass valve closed
12/11/2012	11:41:48 AM	Bubbler valve closed
12/11/2012	11:41:48 AM	Main Vac valve opened
12/11/2012	11:41:48 AM	Helium MFC set to  0.000000
12/11/2012	11:41:48 AM	H2 MFC set to  0.000000
12/11/2012	11:41:48 AM	BCl3 MFC set to  0.000000
12/11/2012	11:41:48 AM	PH3 MFC set to  0.000000
12/11/2012	11:41:48 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:41:48 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:41:48 AM	Tube furnace set to 0
12/11/2012	11:42:18 AM	H2 valve closed
12/11/2012	11:42:18 AM	BCl3 valve closed
12/11/2012	11:42:18 AM	PH3 valve closed
12/11/2012	11:42:18 AM	SiCl4 pre valve closed
12/11/2012	11:42:18 AM	SiCl4 post valve closed
12/11/2012	11:42:18 AM	Bypass valve closed
12/11/2012	11:42:18 AM	Bubbler valve closed
12/11/2012	11:42:18 AM	Helium valve opened
12/11/2012	11:42:18 AM	Main Vac valve opened
12/11/2012	11:42:18 AM	Helium MFC set to  20.000000
12/11/2012	11:42:18 AM	H2 MFC set to  0.000000
12/11/2012	11:42:18 AM	BCl3 MFC set to  0.000000
12/11/2012	11:42:18 AM	PH3 MFC set to  0.000000
12/11/2012	11:42:18 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:42:18 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:42:18 AM	Tube furnace set to 0
12/11/2012	11:42:48 AM	Helium valve closed
12/11/2012	11:42:48 AM	H2 valve closed
12/11/2012	11:42:48 AM	BCl3 valve closed
12/11/2012	11:42:48 AM	PH3 valve closed
12/11/2012	11:42:48 AM	SiCl4 pre valve closed
12/11/2012	11:42:48 AM	SiCl4 post valve closed
12/11/2012	11:42:48 AM	Bypass valve closed
12/11/2012	11:42:48 AM	Bubbler valve closed
12/11/2012	11:42:48 AM	Main Vac valve opened
12/11/2012	11:42:48 AM	Helium MFC set to  0.000000
12/11/2012	11:42:48 AM	H2 MFC set to  0.000000
12/11/2012	11:42:48 AM	BCl3 MFC set to  0.000000
12/11/2012	11:42:48 AM	PH3 MFC set to  0.000000
12/11/2012	11:42:48 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:42:48 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:42:49 AM	Tube furnace set to 0
12/11/2012	11:43:19 AM	H2 valve closed
12/11/2012	11:43:19 AM	BCl3 valve closed
12/11/2012	11:43:19 AM	PH3 valve closed
12/11/2012	11:43:19 AM	SiCl4 pre valve closed
12/11/2012	11:43:19 AM	SiCl4 post valve closed
12/11/2012	11:43:19 AM	Bypass valve closed
12/11/2012	11:43:19 AM	Bubbler valve closed
12/11/2012	11:43:19 AM	Helium valve opened
12/11/2012	11:43:19 AM	Main Vac valve opened
12/11/2012	11:43:19 AM	Helium MFC set to  20.000000
12/11/2012	11:43:19 AM	H2 MFC set to  0.000000
12/11/2012	11:43:19 AM	BCl3 MFC set to  0.000000
12/11/2012	11:43:19 AM	PH3 MFC set to  0.000000
12/11/2012	11:43:19 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:43:19 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:43:19 AM	Tube furnace set to 0
12/11/2012	11:43:49 AM	Helium valve closed
12/11/2012	11:43:49 AM	H2 valve closed
12/11/2012	11:43:49 AM	BCl3 valve closed
12/11/2012	11:43:49 AM	PH3 valve closed
12/11/2012	11:43:49 AM	SiCl4 pre valve closed
12/11/2012	11:43:49 AM	SiCl4 post valve closed
12/11/2012	11:43:49 AM	Bypass valve closed
12/11/2012	11:43:49 AM	Bubbler valve closed
12/11/2012	11:43:49 AM	Main Vac valve opened
12/11/2012	11:43:49 AM	Helium MFC set to  0.000000
12/11/2012	11:43:49 AM	H2 MFC set to  0.000000
12/11/2012	11:43:49 AM	BCl3 MFC set to  0.000000
12/11/2012	11:43:49 AM	PH3 MFC set to  0.000000
12/11/2012	11:43:49 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:43:49 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:43:49 AM	Tube furnace set to 0
12/11/2012	11:44:19 AM	H2 valve closed
12/11/2012	11:44:19 AM	BCl3 valve closed
12/11/2012	11:44:19 AM	PH3 valve closed
12/11/2012	11:44:19 AM	SiCl4 pre valve closed
12/11/2012	11:44:19 AM	SiCl4 post valve closed
12/11/2012	11:44:19 AM	Bypass valve closed
12/11/2012	11:44:19 AM	Bubbler valve closed
12/11/2012	11:44:19 AM	Helium valve opened
12/11/2012	11:44:19 AM	Main Vac valve opened
12/11/2012	11:44:19 AM	Helium MFC set to  20.000000
12/11/2012	11:44:19 AM	H2 MFC set to  0.000000
12/11/2012	11:44:19 AM	BCl3 MFC set to  0.000000
12/11/2012	11:44:19 AM	PH3 MFC set to  0.000000
12/11/2012	11:44:19 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:44:19 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:44:19 AM	Tube furnace set to 0
12/11/2012	11:44:49 AM	Helium valve closed
12/11/2012	11:44:49 AM	H2 valve closed
12/11/2012	11:44:49 AM	BCl3 valve closed
12/11/2012	11:44:49 AM	PH3 valve closed
12/11/2012	11:44:49 AM	SiCl4 pre valve closed
12/11/2012	11:44:49 AM	SiCl4 post valve closed
12/11/2012	11:44:49 AM	Bypass valve closed
12/11/2012	11:44:49 AM	Bubbler valve closed
12/11/2012	11:44:49 AM	Main Vac valve opened
12/11/2012	11:44:49 AM	Helium MFC set to  0.000000
12/11/2012	11:44:49 AM	H2 MFC set to  0.000000
12/11/2012	11:44:49 AM	BCl3 MFC set to  0.000000
12/11/2012	11:44:49 AM	PH3 MFC set to  0.000000
12/11/2012	11:44:49 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:44:49 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:44:50 AM	Tube furnace set to 0
12/11/2012	11:45:20 AM	H2 valve closed
12/11/2012	11:45:20 AM	BCl3 valve closed
12/11/2012	11:45:20 AM	PH3 valve closed
12/11/2012	11:45:20 AM	SiCl4 pre valve closed
12/11/2012	11:45:20 AM	SiCl4 post valve closed
12/11/2012	11:45:20 AM	Bypass valve closed
12/11/2012	11:45:20 AM	Bubbler valve closed
12/11/2012	11:45:20 AM	Helium valve opened
12/11/2012	11:45:20 AM	Main Vac valve opened
12/11/2012	11:45:20 AM	Helium MFC set to  20.000000
12/11/2012	11:45:20 AM	H2 MFC set to  0.000000
12/11/2012	11:45:20 AM	BCl3 MFC set to  0.000000
12/11/2012	11:45:20 AM	PH3 MFC set to  0.000000
12/11/2012	11:45:20 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:45:20 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:45:20 AM	Tube furnace set to 0
12/11/2012	11:45:50 AM	Helium valve closed
12/11/2012	11:45:50 AM	H2 valve closed
12/11/2012	11:45:50 AM	BCl3 valve closed
12/11/2012	11:45:50 AM	PH3 valve closed
12/11/2012	11:45:50 AM	SiCl4 pre valve closed
12/11/2012	11:45:50 AM	SiCl4 post valve closed
12/11/2012	11:45:50 AM	Bypass valve closed
12/11/2012	11:45:50 AM	Bubbler valve closed
12/11/2012	11:45:50 AM	Main Vac valve opened
12/11/2012	11:45:50 AM	Helium MFC set to  0.000000
12/11/2012	11:45:50 AM	H2 MFC set to  0.000000
12/11/2012	11:45:50 AM	BCl3 MFC set to  0.000000
12/11/2012	11:45:50 AM	PH3 MFC set to  0.000000
12/11/2012	11:45:50 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:45:50 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:45:50 AM	Tube furnace set to 0
12/11/2012	11:45:51 AM	Run finished at 11:45 AM
12/11/2012	11:45:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	11:47:15 AM	Main Vac valve closed
12/11/2012	11:47:28 AM	Main Vac valve opened
12/11/2012	11:48:00 AM	Recipe started at 11:47 AM
12/11/2012	11:48:00 AM	Helium valve closed
12/11/2012	11:48:00 AM	H2 valve closed
12/11/2012	11:48:00 AM	BCl3 valve closed
12/11/2012	11:48:00 AM	PH3 valve closed
12/11/2012	11:48:00 AM	SiCl4 pre valve closed
12/11/2012	11:48:00 AM	SiCl4 post valve closed
12/11/2012	11:48:00 AM	Main Vac valve closed
12/11/2012	11:48:00 AM	Bypass valve closed
12/11/2012	11:48:00 AM	Bubbler valve closed
12/11/2012	11:48:00 AM	Helium MFC set to  0.000000
12/11/2012	11:48:00 AM	H2 MFC set to  0.000000
12/11/2012	11:48:01 AM	BCl3 MFC set to  0.000000
12/11/2012	11:48:01 AM	PH3 MFC set to  0.000000
12/11/2012	11:48:01 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:48:01 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:48:01 AM	Tube furnace set to 0
12/11/2012	11:48:04 AM	Helium valve closed
12/11/2012	11:48:04 AM	BCl3 valve closed
12/11/2012	11:48:04 AM	PH3 valve closed
12/11/2012	11:48:04 AM	SiCl4 pre valve closed
12/11/2012	11:48:04 AM	SiCl4 post valve closed
12/11/2012	11:48:04 AM	Main Vac valve closed
12/11/2012	11:48:04 AM	Bypass valve closed
12/11/2012	11:48:04 AM	Bubbler valve closed
12/11/2012	11:48:04 AM	H2 valve opened
12/11/2012	11:48:04 AM	Helium MFC set to  0.000000
12/11/2012	11:48:04 AM	H2 MFC set to  500.000000
12/11/2012	11:48:04 AM	BCl3 MFC set to  0.000000
12/11/2012	11:48:04 AM	PH3 MFC set to  0.000000
12/11/2012	11:48:04 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:48:04 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:48:04 AM	Tube furnace set to 0
12/11/2012	11:49:15 AM	Helium valve closed
12/11/2012	11:49:15 AM	BCl3 valve closed
12/11/2012	11:49:15 AM	PH3 valve closed
12/11/2012	11:49:15 AM	SiCl4 pre valve closed
12/11/2012	11:49:15 AM	SiCl4 post valve closed
12/11/2012	11:49:15 AM	Main Vac valve closed
12/11/2012	11:49:15 AM	Bypass valve closed
12/11/2012	11:49:15 AM	H2 valve opened
12/11/2012	11:49:15 AM	Bubbler valve opened
12/11/2012	11:49:15 AM	Helium MFC set to  0.000000
12/11/2012	11:49:15 AM	H2 MFC set to  500.000000
12/11/2012	11:49:15 AM	BCl3 MFC set to  0.000000
12/11/2012	11:49:15 AM	PH3 MFC set to  0.000000
12/11/2012	11:49:15 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:49:15 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:49:15 AM	Tube furnace set to 0
12/11/2012	11:49:16 AM	Helium valve closed
12/11/2012	11:49:16 AM	BCl3 valve closed
12/11/2012	11:49:16 AM	PH3 valve closed
12/11/2012	11:49:16 AM	SiCl4 pre valve closed
12/11/2012	11:49:16 AM	SiCl4 post valve closed
12/11/2012	11:49:16 AM	Main Vac valve closed
12/11/2012	11:49:16 AM	Bypass valve closed
12/11/2012	11:49:16 AM	H2 valve opened
12/11/2012	11:49:16 AM	Bubbler valve opened
12/11/2012	11:49:16 AM	Helium MFC set to  0.000000
12/11/2012	11:49:16 AM	H2 MFC set to  500.000000
12/11/2012	11:49:16 AM	BCl3 MFC set to  0.000000
12/11/2012	11:49:16 AM	PH3 MFC set to  0.000000
12/11/2012	11:49:16 AM	SiCl4 MFC set to  0.000000
12/11/2012	11:49:16 AM	Bypass solenoid MFC set to  0.000000
12/11/2012	11:49:16 AM	Tube furnace set to 1000
12/11/2012	12:19:16 PM	Helium valve closed
12/11/2012	12:19:16 PM	BCl3 valve closed
12/11/2012	12:19:16 PM	Main Vac valve closed
12/11/2012	12:19:16 PM	Bypass valve closed
12/11/2012	12:19:16 PM	H2 valve opened
12/11/2012	12:19:16 PM	PH3 valve opened
12/11/2012	12:19:16 PM	SiCl4 pre valve opened
12/11/2012	12:19:16 PM	SiCl4 post valve opened
12/11/2012	12:19:16 PM	Bubbler valve opened
12/11/2012	12:19:16 PM	Helium MFC set to  0.000000
12/11/2012	12:19:16 PM	H2 MFC set to  500.000000
12/11/2012	12:19:16 PM	BCl3 MFC set to  0.000000
12/11/2012	12:19:16 PM	PH3 MFC set to  0.300000
12/11/2012	12:19:16 PM	SiCl4 MFC set to  25.000000
12/11/2012	12:19:16 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	12:19:16 PM	Tube furnace set to 1000
12/11/2012	12:37:16 PM	Helium valve closed
12/11/2012	12:37:16 PM	BCl3 valve closed
12/11/2012	12:37:16 PM	PH3 valve closed
12/11/2012	12:37:16 PM	SiCl4 pre valve closed
12/11/2012	12:37:16 PM	SiCl4 post valve closed
12/11/2012	12:37:16 PM	Main Vac valve closed
12/11/2012	12:37:16 PM	Bypass valve closed
12/11/2012	12:37:16 PM	H2 valve opened
12/11/2012	12:37:16 PM	Bubbler valve opened
12/11/2012	12:37:16 PM	Helium MFC set to  0.000000
12/11/2012	12:37:16 PM	H2 MFC set to  500.000000
12/11/2012	12:37:16 PM	BCl3 MFC set to  0.000000
12/11/2012	12:37:16 PM	PH3 MFC set to  0.000000
12/11/2012	12:37:16 PM	SiCl4 MFC set to  0.000000
12/11/2012	12:37:17 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	12:37:17 PM	Tube furnace set to 750
12/11/2012	12:42:17 PM	H2 valve closed
12/11/2012	12:42:17 PM	BCl3 valve closed
12/11/2012	12:42:17 PM	PH3 valve closed
12/11/2012	12:42:17 PM	SiCl4 pre valve closed
12/11/2012	12:42:17 PM	SiCl4 post valve closed
12/11/2012	12:42:17 PM	Main Vac valve closed
12/11/2012	12:42:17 PM	Bypass valve closed
12/11/2012	12:42:17 PM	Helium valve opened
12/11/2012	12:42:17 PM	Bubbler valve opened
12/11/2012	12:42:17 PM	Helium MFC set to  500.000000
12/11/2012	12:42:17 PM	H2 MFC set to  0.000000
12/11/2012	12:42:17 PM	BCl3 MFC set to  0.000000
12/11/2012	12:42:17 PM	PH3 MFC set to  0.000000
12/11/2012	12:42:17 PM	SiCl4 MFC set to  0.000000
12/11/2012	12:42:17 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	12:42:17 PM	Tube furnace set to 0
12/11/2012	1:02:17 PM	Helium valve closed
12/11/2012	1:02:17 PM	H2 valve closed
12/11/2012	1:02:17 PM	BCl3 valve closed
12/11/2012	1:02:17 PM	PH3 valve closed
12/11/2012	1:02:17 PM	SiCl4 pre valve closed
12/11/2012	1:02:17 PM	SiCl4 post valve closed
12/11/2012	1:02:17 PM	Main Vac valve closed
12/11/2012	1:02:17 PM	Bypass valve closed
12/11/2012	1:02:17 PM	Bubbler valve closed
12/11/2012	1:02:17 PM	Helium MFC set to  0.000000
12/11/2012	1:02:17 PM	H2 MFC set to  0.000000
12/11/2012	1:02:17 PM	BCl3 MFC set to  0.000000
12/11/2012	1:02:17 PM	PH3 MFC set to  0.000000
12/11/2012	1:02:17 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:02:17 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:02:17 PM	Tube furnace set to 0
12/11/2012	1:02:18 PM	Run finished at 1:02 PM
12/11/2012	1:08:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/11/2012	1:08:08 PM	Recipe started at 1:08 PM
12/11/2012	1:08:08 PM	Helium valve closed
12/11/2012	1:08:08 PM	H2 valve closed
12/11/2012	1:08:08 PM	BCl3 valve closed
12/11/2012	1:08:08 PM	PH3 valve closed
12/11/2012	1:08:08 PM	SiCl4 pre valve closed
12/11/2012	1:08:08 PM	SiCl4 post valve closed
12/11/2012	1:08:08 PM	Main Vac valve closed
12/11/2012	1:08:08 PM	Bubbler valve closed
12/11/2012	1:08:08 PM	Bypass valve opened
12/11/2012	1:08:08 PM	Helium MFC set to  0.000000
12/11/2012	1:08:08 PM	H2 MFC set to  0.000000
12/11/2012	1:08:08 PM	BCl3 MFC set to  0.000000
12/11/2012	1:08:08 PM	PH3 MFC set to  0.000000
12/11/2012	1:08:08 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:08:08 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:08:08 PM	Tube furnace set to 0
12/11/2012	1:09:16 PM	Helium valve closed
12/11/2012	1:09:16 PM	H2 valve closed
12/11/2012	1:09:16 PM	BCl3 valve closed
12/11/2012	1:09:16 PM	PH3 valve closed
12/11/2012	1:09:16 PM	SiCl4 pre valve closed
12/11/2012	1:09:16 PM	SiCl4 post valve closed
12/11/2012	1:09:16 PM	Main Vac valve closed
12/11/2012	1:09:16 PM	Bubbler valve closed
12/11/2012	1:09:16 PM	Bypass valve opened
12/11/2012	1:09:16 PM	Helium MFC set to  0.000000
12/11/2012	1:09:16 PM	H2 MFC set to  0.000000
12/11/2012	1:09:16 PM	BCl3 MFC set to  0.000000
12/11/2012	1:09:16 PM	PH3 MFC set to  0.000000
12/11/2012	1:09:16 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:09:16 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:09:16 PM	Tube furnace set to 0
12/11/2012	1:10:16 PM	Helium valve closed
12/11/2012	1:10:16 PM	H2 valve closed
12/11/2012	1:10:16 PM	BCl3 valve closed
12/11/2012	1:10:16 PM	PH3 valve closed
12/11/2012	1:10:16 PM	SiCl4 pre valve closed
12/11/2012	1:10:16 PM	SiCl4 post valve closed
12/11/2012	1:10:16 PM	Bypass valve closed
12/11/2012	1:10:16 PM	Bubbler valve closed
12/11/2012	1:10:16 PM	Main Vac valve opened
12/11/2012	1:10:16 PM	Helium MFC set to  0.000000
12/11/2012	1:10:16 PM	H2 MFC set to  0.000000
12/11/2012	1:10:16 PM	BCl3 MFC set to  0.000000
12/11/2012	1:10:16 PM	PH3 MFC set to  0.000000
12/11/2012	1:10:16 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:10:16 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:10:16 PM	Tube furnace set to 0
12/11/2012	1:10:17 PM	Run finished at 1:10 PM
12/11/2012	1:10:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/11/2012	1:16:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	1:16:45 PM	Recipe started at 1:16 PM
12/11/2012	1:16:45 PM	Helium valve closed
12/11/2012	1:16:45 PM	H2 valve closed
12/11/2012	1:16:45 PM	BCl3 valve closed
12/11/2012	1:16:45 PM	PH3 valve closed
12/11/2012	1:16:45 PM	SiCl4 pre valve closed
12/11/2012	1:16:45 PM	SiCl4 post valve closed
12/11/2012	1:16:45 PM	Main Vac valve closed
12/11/2012	1:16:45 PM	Bubbler valve closed
12/11/2012	1:16:45 PM	Bypass valve opened
12/11/2012	1:16:45 PM	Helium MFC set to  0.000000
12/11/2012	1:16:45 PM	H2 MFC set to  0.000000
12/11/2012	1:16:45 PM	BCl3 MFC set to  0.000000
12/11/2012	1:16:45 PM	PH3 MFC set to  0.000000
12/11/2012	1:16:45 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:16:45 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:16:45 PM	Tube furnace set to 0
12/11/2012	1:16:46 PM	Helium valve closed
12/11/2012	1:16:46 PM	H2 valve closed
12/11/2012	1:16:46 PM	BCl3 valve closed
12/11/2012	1:16:46 PM	PH3 valve closed
12/11/2012	1:16:46 PM	SiCl4 pre valve closed
12/11/2012	1:16:46 PM	SiCl4 post valve closed
12/11/2012	1:16:46 PM	Main Vac valve closed
12/11/2012	1:16:46 PM	Bubbler valve closed
12/11/2012	1:16:46 PM	Bypass valve opened
12/11/2012	1:16:46 PM	Helium MFC set to  0.000000
12/11/2012	1:16:46 PM	H2 MFC set to  0.000000
12/11/2012	1:16:46 PM	BCl3 MFC set to  0.000000
12/11/2012	1:16:46 PM	PH3 MFC set to  0.000000
12/11/2012	1:16:46 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:16:46 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:16:46 PM	Tube furnace set to 0
12/11/2012	1:16:46 PM	Helium valve closed
12/11/2012	1:16:46 PM	H2 valve closed
12/11/2012	1:16:46 PM	BCl3 valve closed
12/11/2012	1:16:46 PM	PH3 valve closed
12/11/2012	1:16:46 PM	SiCl4 pre valve closed
12/11/2012	1:16:46 PM	SiCl4 post valve closed
12/11/2012	1:16:46 PM	Bypass valve closed
12/11/2012	1:16:46 PM	Bubbler valve closed
12/11/2012	1:16:46 PM	Main Vac valve opened
12/11/2012	1:16:46 PM	Helium MFC set to  0.000000
12/11/2012	1:16:46 PM	H2 MFC set to  0.000000
12/11/2012	1:16:46 PM	BCl3 MFC set to  0.000000
12/11/2012	1:16:46 PM	PH3 MFC set to  0.000000
12/11/2012	1:16:46 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:16:46 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:16:46 PM	Tube furnace set to 0
12/11/2012	1:17:16 PM	H2 valve closed
12/11/2012	1:17:16 PM	BCl3 valve closed
12/11/2012	1:17:16 PM	PH3 valve closed
12/11/2012	1:17:16 PM	SiCl4 pre valve closed
12/11/2012	1:17:16 PM	SiCl4 post valve closed
12/11/2012	1:17:16 PM	Bypass valve closed
12/11/2012	1:17:16 PM	Bubbler valve closed
12/11/2012	1:17:16 PM	Helium valve opened
12/11/2012	1:17:16 PM	Main Vac valve opened
12/11/2012	1:17:16 PM	Helium MFC set to  20.000000
12/11/2012	1:17:16 PM	H2 MFC set to  0.000000
12/11/2012	1:17:16 PM	BCl3 MFC set to  0.000000
12/11/2012	1:17:16 PM	PH3 MFC set to  0.000000
12/11/2012	1:17:16 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:17:16 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:17:17 PM	Tube furnace set to 0
12/11/2012	1:17:47 PM	Helium valve closed
12/11/2012	1:17:47 PM	H2 valve closed
12/11/2012	1:17:47 PM	BCl3 valve closed
12/11/2012	1:17:47 PM	PH3 valve closed
12/11/2012	1:17:47 PM	SiCl4 pre valve closed
12/11/2012	1:17:47 PM	SiCl4 post valve closed
12/11/2012	1:17:47 PM	Bypass valve closed
12/11/2012	1:17:47 PM	Bubbler valve closed
12/11/2012	1:17:47 PM	Main Vac valve opened
12/11/2012	1:17:47 PM	Helium MFC set to  0.000000
12/11/2012	1:17:47 PM	H2 MFC set to  0.000000
12/11/2012	1:17:47 PM	BCl3 MFC set to  0.000000
12/11/2012	1:17:47 PM	PH3 MFC set to  0.000000
12/11/2012	1:17:47 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:17:47 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:17:47 PM	Tube furnace set to 0
12/11/2012	1:18:17 PM	H2 valve closed
12/11/2012	1:18:17 PM	BCl3 valve closed
12/11/2012	1:18:17 PM	PH3 valve closed
12/11/2012	1:18:17 PM	SiCl4 pre valve closed
12/11/2012	1:18:17 PM	SiCl4 post valve closed
12/11/2012	1:18:17 PM	Bypass valve closed
12/11/2012	1:18:17 PM	Bubbler valve closed
12/11/2012	1:18:17 PM	Helium valve opened
12/11/2012	1:18:17 PM	Main Vac valve opened
12/11/2012	1:18:17 PM	Helium MFC set to  20.000000
12/11/2012	1:18:17 PM	H2 MFC set to  0.000000
12/11/2012	1:18:17 PM	BCl3 MFC set to  0.000000
12/11/2012	1:18:17 PM	PH3 MFC set to  0.000000
12/11/2012	1:18:17 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:18:17 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:18:17 PM	Tube furnace set to 0
12/11/2012	1:18:47 PM	Helium valve closed
12/11/2012	1:18:47 PM	H2 valve closed
12/11/2012	1:18:47 PM	BCl3 valve closed
12/11/2012	1:18:47 PM	PH3 valve closed
12/11/2012	1:18:47 PM	SiCl4 pre valve closed
12/11/2012	1:18:47 PM	SiCl4 post valve closed
12/11/2012	1:18:47 PM	Bypass valve closed
12/11/2012	1:18:47 PM	Bubbler valve closed
12/11/2012	1:18:47 PM	Main Vac valve opened
12/11/2012	1:18:47 PM	Helium MFC set to  0.000000
12/11/2012	1:18:47 PM	H2 MFC set to  0.000000
12/11/2012	1:18:47 PM	BCl3 MFC set to  0.000000
12/11/2012	1:18:47 PM	PH3 MFC set to  0.000000
12/11/2012	1:18:47 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:18:47 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:18:47 PM	Tube furnace set to 0
12/11/2012	1:19:17 PM	H2 valve closed
12/11/2012	1:19:17 PM	BCl3 valve closed
12/11/2012	1:19:17 PM	PH3 valve closed
12/11/2012	1:19:17 PM	SiCl4 pre valve closed
12/11/2012	1:19:17 PM	SiCl4 post valve closed
12/11/2012	1:19:17 PM	Bypass valve closed
12/11/2012	1:19:17 PM	Bubbler valve closed
12/11/2012	1:19:17 PM	Helium valve opened
12/11/2012	1:19:17 PM	Main Vac valve opened
12/11/2012	1:19:17 PM	Helium MFC set to  20.000000
12/11/2012	1:19:17 PM	H2 MFC set to  0.000000
12/11/2012	1:19:17 PM	BCl3 MFC set to  0.000000
12/11/2012	1:19:17 PM	PH3 MFC set to  0.000000
12/11/2012	1:19:17 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:19:17 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:19:18 PM	Tube furnace set to 0
12/11/2012	1:19:48 PM	Helium valve closed
12/11/2012	1:19:48 PM	H2 valve closed
12/11/2012	1:19:48 PM	BCl3 valve closed
12/11/2012	1:19:48 PM	PH3 valve closed
12/11/2012	1:19:48 PM	SiCl4 pre valve closed
12/11/2012	1:19:48 PM	SiCl4 post valve closed
12/11/2012	1:19:48 PM	Bypass valve closed
12/11/2012	1:19:48 PM	Bubbler valve closed
12/11/2012	1:19:48 PM	Main Vac valve opened
12/11/2012	1:19:48 PM	Helium MFC set to  0.000000
12/11/2012	1:19:48 PM	H2 MFC set to  0.000000
12/11/2012	1:19:48 PM	BCl3 MFC set to  0.000000
12/11/2012	1:19:48 PM	PH3 MFC set to  0.000000
12/11/2012	1:19:48 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:19:48 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:19:48 PM	Tube furnace set to 0
12/11/2012	1:20:18 PM	H2 valve closed
12/11/2012	1:20:18 PM	BCl3 valve closed
12/11/2012	1:20:18 PM	PH3 valve closed
12/11/2012	1:20:18 PM	SiCl4 pre valve closed
12/11/2012	1:20:18 PM	SiCl4 post valve closed
12/11/2012	1:20:18 PM	Bypass valve closed
12/11/2012	1:20:18 PM	Bubbler valve closed
12/11/2012	1:20:18 PM	Helium valve opened
12/11/2012	1:20:18 PM	Main Vac valve opened
12/11/2012	1:20:18 PM	Helium MFC set to  20.000000
12/11/2012	1:20:18 PM	H2 MFC set to  0.000000
12/11/2012	1:20:18 PM	BCl3 MFC set to  0.000000
12/11/2012	1:20:18 PM	PH3 MFC set to  0.000000
12/11/2012	1:20:18 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:20:18 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:20:18 PM	Tube furnace set to 0
12/11/2012	1:20:48 PM	Helium valve closed
12/11/2012	1:20:48 PM	H2 valve closed
12/11/2012	1:20:48 PM	BCl3 valve closed
12/11/2012	1:20:48 PM	PH3 valve closed
12/11/2012	1:20:48 PM	SiCl4 pre valve closed
12/11/2012	1:20:48 PM	SiCl4 post valve closed
12/11/2012	1:20:48 PM	Bypass valve closed
12/11/2012	1:20:48 PM	Bubbler valve closed
12/11/2012	1:20:48 PM	Main Vac valve opened
12/11/2012	1:20:48 PM	Helium MFC set to  0.000000
12/11/2012	1:20:48 PM	H2 MFC set to  0.000000
12/11/2012	1:20:48 PM	BCl3 MFC set to  0.000000
12/11/2012	1:20:48 PM	PH3 MFC set to  0.000000
12/11/2012	1:20:48 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:20:48 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:20:48 PM	Tube furnace set to 0
12/11/2012	1:21:18 PM	H2 valve closed
12/11/2012	1:21:18 PM	BCl3 valve closed
12/11/2012	1:21:18 PM	PH3 valve closed
12/11/2012	1:21:18 PM	SiCl4 pre valve closed
12/11/2012	1:21:18 PM	SiCl4 post valve closed
12/11/2012	1:21:18 PM	Bypass valve closed
12/11/2012	1:21:18 PM	Bubbler valve closed
12/11/2012	1:21:18 PM	Helium valve opened
12/11/2012	1:21:18 PM	Main Vac valve opened
12/11/2012	1:21:18 PM	Helium MFC set to  20.000000
12/11/2012	1:21:18 PM	H2 MFC set to  0.000000
12/11/2012	1:21:18 PM	BCl3 MFC set to  0.000000
12/11/2012	1:21:18 PM	PH3 MFC set to  0.000000
12/11/2012	1:21:18 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:21:18 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:21:19 PM	Tube furnace set to 0
12/11/2012	1:21:49 PM	Helium valve closed
12/11/2012	1:21:49 PM	H2 valve closed
12/11/2012	1:21:49 PM	BCl3 valve closed
12/11/2012	1:21:49 PM	PH3 valve closed
12/11/2012	1:21:49 PM	SiCl4 pre valve closed
12/11/2012	1:21:49 PM	SiCl4 post valve closed
12/11/2012	1:21:49 PM	Bypass valve closed
12/11/2012	1:21:49 PM	Bubbler valve closed
12/11/2012	1:21:49 PM	Main Vac valve opened
12/11/2012	1:21:49 PM	Helium MFC set to  0.000000
12/11/2012	1:21:49 PM	H2 MFC set to  0.000000
12/11/2012	1:21:49 PM	BCl3 MFC set to  0.000000
12/11/2012	1:21:49 PM	PH3 MFC set to  0.000000
12/11/2012	1:21:49 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:21:49 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:21:49 PM	Tube furnace set to 0
12/11/2012	1:22:19 PM	H2 valve closed
12/11/2012	1:22:19 PM	BCl3 valve closed
12/11/2012	1:22:19 PM	PH3 valve closed
12/11/2012	1:22:19 PM	SiCl4 pre valve closed
12/11/2012	1:22:19 PM	SiCl4 post valve closed
12/11/2012	1:22:19 PM	Bypass valve closed
12/11/2012	1:22:19 PM	Bubbler valve closed
12/11/2012	1:22:19 PM	Helium valve opened
12/11/2012	1:22:19 PM	Main Vac valve opened
12/11/2012	1:22:19 PM	Helium MFC set to  20.000000
12/11/2012	1:22:19 PM	H2 MFC set to  0.000000
12/11/2012	1:22:19 PM	BCl3 MFC set to  0.000000
12/11/2012	1:22:19 PM	PH3 MFC set to  0.000000
12/11/2012	1:22:19 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:22:19 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:22:19 PM	Tube furnace set to 0
12/11/2012	1:22:49 PM	Helium valve closed
12/11/2012	1:22:49 PM	H2 valve closed
12/11/2012	1:22:49 PM	BCl3 valve closed
12/11/2012	1:22:49 PM	PH3 valve closed
12/11/2012	1:22:49 PM	SiCl4 pre valve closed
12/11/2012	1:22:49 PM	SiCl4 post valve closed
12/11/2012	1:22:49 PM	Bypass valve closed
12/11/2012	1:22:49 PM	Bubbler valve closed
12/11/2012	1:22:49 PM	Main Vac valve opened
12/11/2012	1:22:49 PM	Helium MFC set to  0.000000
12/11/2012	1:22:49 PM	H2 MFC set to  0.000000
12/11/2012	1:22:49 PM	BCl3 MFC set to  0.000000
12/11/2012	1:22:49 PM	PH3 MFC set to  0.000000
12/11/2012	1:22:49 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:22:49 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:22:49 PM	Tube furnace set to 0
12/11/2012	1:23:19 PM	H2 valve closed
12/11/2012	1:23:19 PM	BCl3 valve closed
12/11/2012	1:23:19 PM	PH3 valve closed
12/11/2012	1:23:19 PM	SiCl4 pre valve closed
12/11/2012	1:23:19 PM	SiCl4 post valve closed
12/11/2012	1:23:19 PM	Bypass valve closed
12/11/2012	1:23:19 PM	Bubbler valve closed
12/11/2012	1:23:19 PM	Helium valve opened
12/11/2012	1:23:19 PM	Main Vac valve opened
12/11/2012	1:23:19 PM	Helium MFC set to  20.000000
12/11/2012	1:23:19 PM	H2 MFC set to  0.000000
12/11/2012	1:23:19 PM	BCl3 MFC set to  0.000000
12/11/2012	1:23:19 PM	PH3 MFC set to  0.000000
12/11/2012	1:23:19 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:23:19 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:23:20 PM	Tube furnace set to 0
12/11/2012	1:23:50 PM	Helium valve closed
12/11/2012	1:23:50 PM	H2 valve closed
12/11/2012	1:23:50 PM	BCl3 valve closed
12/11/2012	1:23:50 PM	PH3 valve closed
12/11/2012	1:23:50 PM	SiCl4 pre valve closed
12/11/2012	1:23:50 PM	SiCl4 post valve closed
12/11/2012	1:23:50 PM	Bypass valve closed
12/11/2012	1:23:50 PM	Bubbler valve closed
12/11/2012	1:23:50 PM	Main Vac valve opened
12/11/2012	1:23:50 PM	Helium MFC set to  0.000000
12/11/2012	1:23:50 PM	H2 MFC set to  0.000000
12/11/2012	1:23:50 PM	BCl3 MFC set to  0.000000
12/11/2012	1:23:50 PM	PH3 MFC set to  0.000000
12/11/2012	1:23:50 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:23:50 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:23:50 PM	Tube furnace set to 0
12/11/2012	1:24:20 PM	H2 valve closed
12/11/2012	1:24:20 PM	BCl3 valve closed
12/11/2012	1:24:20 PM	PH3 valve closed
12/11/2012	1:24:20 PM	SiCl4 pre valve closed
12/11/2012	1:24:20 PM	SiCl4 post valve closed
12/11/2012	1:24:20 PM	Bypass valve closed
12/11/2012	1:24:20 PM	Bubbler valve closed
12/11/2012	1:24:20 PM	Helium valve opened
12/11/2012	1:24:20 PM	Main Vac valve opened
12/11/2012	1:24:20 PM	Helium MFC set to  20.000000
12/11/2012	1:24:20 PM	H2 MFC set to  0.000000
12/11/2012	1:24:20 PM	BCl3 MFC set to  0.000000
12/11/2012	1:24:20 PM	PH3 MFC set to  0.000000
12/11/2012	1:24:20 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:24:20 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:24:20 PM	Tube furnace set to 0
12/11/2012	1:24:50 PM	Helium valve closed
12/11/2012	1:24:50 PM	H2 valve closed
12/11/2012	1:24:50 PM	BCl3 valve closed
12/11/2012	1:24:50 PM	PH3 valve closed
12/11/2012	1:24:50 PM	SiCl4 pre valve closed
12/11/2012	1:24:50 PM	SiCl4 post valve closed
12/11/2012	1:24:50 PM	Bypass valve closed
12/11/2012	1:24:50 PM	Bubbler valve closed
12/11/2012	1:24:50 PM	Main Vac valve opened
12/11/2012	1:24:50 PM	Helium MFC set to  0.000000
12/11/2012	1:24:50 PM	H2 MFC set to  0.000000
12/11/2012	1:24:50 PM	BCl3 MFC set to  0.000000
12/11/2012	1:24:50 PM	PH3 MFC set to  0.000000
12/11/2012	1:24:50 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:24:50 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:24:50 PM	Tube furnace set to 0
12/11/2012	1:25:20 PM	H2 valve closed
12/11/2012	1:25:20 PM	BCl3 valve closed
12/11/2012	1:25:20 PM	PH3 valve closed
12/11/2012	1:25:20 PM	SiCl4 pre valve closed
12/11/2012	1:25:20 PM	SiCl4 post valve closed
12/11/2012	1:25:20 PM	Bypass valve closed
12/11/2012	1:25:20 PM	Bubbler valve closed
12/11/2012	1:25:20 PM	Helium valve opened
12/11/2012	1:25:20 PM	Main Vac valve opened
12/11/2012	1:25:20 PM	Helium MFC set to  20.000000
12/11/2012	1:25:20 PM	H2 MFC set to  0.000000
12/11/2012	1:25:20 PM	BCl3 MFC set to  0.000000
12/11/2012	1:25:21 PM	PH3 MFC set to  0.000000
12/11/2012	1:25:21 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:25:21 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:25:21 PM	Tube furnace set to 0
12/11/2012	1:25:51 PM	Helium valve closed
12/11/2012	1:25:51 PM	H2 valve closed
12/11/2012	1:25:51 PM	BCl3 valve closed
12/11/2012	1:25:51 PM	PH3 valve closed
12/11/2012	1:25:51 PM	SiCl4 pre valve closed
12/11/2012	1:25:51 PM	SiCl4 post valve closed
12/11/2012	1:25:51 PM	Bypass valve closed
12/11/2012	1:25:51 PM	Bubbler valve closed
12/11/2012	1:25:51 PM	Main Vac valve opened
12/11/2012	1:25:51 PM	Helium MFC set to  0.000000
12/11/2012	1:25:51 PM	H2 MFC set to  0.000000
12/11/2012	1:25:51 PM	BCl3 MFC set to  0.000000
12/11/2012	1:25:51 PM	PH3 MFC set to  0.000000
12/11/2012	1:25:51 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:25:51 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:25:51 PM	Tube furnace set to 0
12/11/2012	1:26:21 PM	H2 valve closed
12/11/2012	1:26:21 PM	BCl3 valve closed
12/11/2012	1:26:21 PM	PH3 valve closed
12/11/2012	1:26:21 PM	SiCl4 pre valve closed
12/11/2012	1:26:21 PM	SiCl4 post valve closed
12/11/2012	1:26:21 PM	Bypass valve closed
12/11/2012	1:26:21 PM	Bubbler valve closed
12/11/2012	1:26:21 PM	Helium valve opened
12/11/2012	1:26:21 PM	Main Vac valve opened
12/11/2012	1:26:21 PM	Helium MFC set to  20.000000
12/11/2012	1:26:21 PM	H2 MFC set to  0.000000
12/11/2012	1:26:21 PM	BCl3 MFC set to  0.000000
12/11/2012	1:26:21 PM	PH3 MFC set to  0.000000
12/11/2012	1:26:21 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:26:21 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:26:21 PM	Tube furnace set to 0
12/11/2012	1:26:51 PM	Helium valve closed
12/11/2012	1:26:51 PM	H2 valve closed
12/11/2012	1:26:51 PM	BCl3 valve closed
12/11/2012	1:26:51 PM	PH3 valve closed
12/11/2012	1:26:51 PM	SiCl4 pre valve closed
12/11/2012	1:26:51 PM	SiCl4 post valve closed
12/11/2012	1:26:51 PM	Bypass valve closed
12/11/2012	1:26:51 PM	Bubbler valve closed
12/11/2012	1:26:51 PM	Main Vac valve opened
12/11/2012	1:26:51 PM	Helium MFC set to  0.000000
12/11/2012	1:26:51 PM	H2 MFC set to  0.000000
12/11/2012	1:26:51 PM	BCl3 MFC set to  0.000000
12/11/2012	1:26:51 PM	PH3 MFC set to  0.000000
12/11/2012	1:26:51 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:26:51 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:26:51 PM	Tube furnace set to 0
12/11/2012	1:26:52 PM	Run finished at 1:26 PM
12/11/2012	1:26:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	1:31:40 PM	Main Vac valve closed
12/11/2012	1:31:53 PM	Main Vac valve opened
12/11/2012	1:31:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	1:32:08 PM	Recipe started at 1:32 PM
12/11/2012	1:32:08 PM	Helium valve closed
12/11/2012	1:32:08 PM	H2 valve closed
12/11/2012	1:32:08 PM	BCl3 valve closed
12/11/2012	1:32:08 PM	PH3 valve closed
12/11/2012	1:32:08 PM	SiCl4 pre valve closed
12/11/2012	1:32:08 PM	SiCl4 post valve closed
12/11/2012	1:32:08 PM	Main Vac valve closed
12/11/2012	1:32:08 PM	Bubbler valve closed
12/11/2012	1:32:08 PM	Bypass valve opened
12/11/2012	1:32:08 PM	Helium MFC set to  0.000000
12/11/2012	1:32:08 PM	H2 MFC set to  0.000000
12/11/2012	1:32:08 PM	BCl3 MFC set to  0.000000
12/11/2012	1:32:08 PM	PH3 MFC set to  0.000000
12/11/2012	1:32:08 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:32:08 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:32:08 PM	Tube furnace set to 0
12/11/2012	1:32:08 PM	Helium valve closed
12/11/2012	1:32:08 PM	H2 valve closed
12/11/2012	1:32:08 PM	BCl3 valve closed
12/11/2012	1:32:08 PM	PH3 valve closed
12/11/2012	1:32:08 PM	SiCl4 pre valve closed
12/11/2012	1:32:08 PM	SiCl4 post valve closed
12/11/2012	1:32:08 PM	Main Vac valve closed
12/11/2012	1:32:08 PM	Bubbler valve closed
12/11/2012	1:32:08 PM	Bypass valve opened
12/11/2012	1:32:08 PM	Helium MFC set to  0.000000
12/11/2012	1:32:08 PM	H2 MFC set to  0.000000
12/11/2012	1:32:08 PM	BCl3 MFC set to  0.000000
12/11/2012	1:32:08 PM	PH3 MFC set to  0.000000
12/11/2012	1:32:08 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:32:08 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:32:08 PM	Tube furnace set to 0
12/11/2012	1:32:09 PM	Helium valve closed
12/11/2012	1:32:09 PM	H2 valve closed
12/11/2012	1:32:09 PM	BCl3 valve closed
12/11/2012	1:32:09 PM	PH3 valve closed
12/11/2012	1:32:09 PM	SiCl4 pre valve closed
12/11/2012	1:32:09 PM	SiCl4 post valve closed
12/11/2012	1:32:09 PM	Bypass valve closed
12/11/2012	1:32:09 PM	Bubbler valve closed
12/11/2012	1:32:09 PM	Main Vac valve opened
12/11/2012	1:32:09 PM	Helium MFC set to  0.000000
12/11/2012	1:32:09 PM	H2 MFC set to  0.000000
12/11/2012	1:32:09 PM	BCl3 MFC set to  0.000000
12/11/2012	1:32:09 PM	PH3 MFC set to  0.000000
12/11/2012	1:32:09 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:32:09 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:32:09 PM	Tube furnace set to 0
12/11/2012	1:32:39 PM	H2 valve closed
12/11/2012	1:32:39 PM	BCl3 valve closed
12/11/2012	1:32:39 PM	PH3 valve closed
12/11/2012	1:32:39 PM	SiCl4 pre valve closed
12/11/2012	1:32:39 PM	SiCl4 post valve closed
12/11/2012	1:32:39 PM	Bypass valve closed
12/11/2012	1:32:39 PM	Bubbler valve closed
12/11/2012	1:32:39 PM	Helium valve opened
12/11/2012	1:32:39 PM	Main Vac valve opened
12/11/2012	1:32:39 PM	Helium MFC set to  20.000000
12/11/2012	1:32:39 PM	H2 MFC set to  0.000000
12/11/2012	1:32:39 PM	BCl3 MFC set to  0.000000
12/11/2012	1:32:39 PM	PH3 MFC set to  0.000000
12/11/2012	1:32:39 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:32:39 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:32:39 PM	Tube furnace set to 0
12/11/2012	1:33:09 PM	Helium valve closed
12/11/2012	1:33:09 PM	H2 valve closed
12/11/2012	1:33:09 PM	BCl3 valve closed
12/11/2012	1:33:09 PM	PH3 valve closed
12/11/2012	1:33:09 PM	SiCl4 pre valve closed
12/11/2012	1:33:09 PM	SiCl4 post valve closed
12/11/2012	1:33:09 PM	Bypass valve closed
12/11/2012	1:33:09 PM	Bubbler valve closed
12/11/2012	1:33:09 PM	Main Vac valve opened
12/11/2012	1:33:09 PM	Helium MFC set to  0.000000
12/11/2012	1:33:09 PM	H2 MFC set to  0.000000
12/11/2012	1:33:09 PM	BCl3 MFC set to  0.000000
12/11/2012	1:33:09 PM	PH3 MFC set to  0.000000
12/11/2012	1:33:09 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:33:09 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:33:09 PM	Tube furnace set to 0
12/11/2012	1:33:39 PM	H2 valve closed
12/11/2012	1:33:39 PM	BCl3 valve closed
12/11/2012	1:33:39 PM	PH3 valve closed
12/11/2012	1:33:39 PM	SiCl4 pre valve closed
12/11/2012	1:33:40 PM	SiCl4 post valve closed
12/11/2012	1:33:40 PM	Bypass valve closed
12/11/2012	1:33:40 PM	Bubbler valve closed
12/11/2012	1:33:40 PM	Helium valve opened
12/11/2012	1:33:40 PM	Main Vac valve opened
12/11/2012	1:33:40 PM	Helium MFC set to  20.000000
12/11/2012	1:33:40 PM	H2 MFC set to  0.000000
12/11/2012	1:33:40 PM	BCl3 MFC set to  0.000000
12/11/2012	1:33:40 PM	PH3 MFC set to  0.000000
12/11/2012	1:33:40 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:33:40 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:33:40 PM	Tube furnace set to 0
12/11/2012	1:34:10 PM	Helium valve closed
12/11/2012	1:34:10 PM	H2 valve closed
12/11/2012	1:34:10 PM	BCl3 valve closed
12/11/2012	1:34:10 PM	PH3 valve closed
12/11/2012	1:34:10 PM	SiCl4 pre valve closed
12/11/2012	1:34:10 PM	SiCl4 post valve closed
12/11/2012	1:34:10 PM	Bypass valve closed
12/11/2012	1:34:10 PM	Bubbler valve closed
12/11/2012	1:34:10 PM	Main Vac valve opened
12/11/2012	1:34:10 PM	Helium MFC set to  0.000000
12/11/2012	1:34:10 PM	H2 MFC set to  0.000000
12/11/2012	1:34:10 PM	BCl3 MFC set to  0.000000
12/11/2012	1:34:10 PM	PH3 MFC set to  0.000000
12/11/2012	1:34:10 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:34:10 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:34:10 PM	Tube furnace set to 0
12/11/2012	1:34:40 PM	H2 valve closed
12/11/2012	1:34:40 PM	BCl3 valve closed
12/11/2012	1:34:40 PM	PH3 valve closed
12/11/2012	1:34:40 PM	SiCl4 pre valve closed
12/11/2012	1:34:40 PM	SiCl4 post valve closed
12/11/2012	1:34:40 PM	Bypass valve closed
12/11/2012	1:34:40 PM	Bubbler valve closed
12/11/2012	1:34:40 PM	Helium valve opened
12/11/2012	1:34:40 PM	Main Vac valve opened
12/11/2012	1:34:40 PM	Helium MFC set to  20.000000
12/11/2012	1:34:40 PM	H2 MFC set to  0.000000
12/11/2012	1:34:40 PM	BCl3 MFC set to  0.000000
12/11/2012	1:34:40 PM	PH3 MFC set to  0.000000
12/11/2012	1:34:40 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:34:40 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:34:40 PM	Tube furnace set to 0
12/11/2012	1:35:10 PM	Helium valve closed
12/11/2012	1:35:10 PM	H2 valve closed
12/11/2012	1:35:10 PM	BCl3 valve closed
12/11/2012	1:35:10 PM	PH3 valve closed
12/11/2012	1:35:10 PM	SiCl4 pre valve closed
12/11/2012	1:35:10 PM	SiCl4 post valve closed
12/11/2012	1:35:10 PM	Bypass valve closed
12/11/2012	1:35:10 PM	Bubbler valve closed
12/11/2012	1:35:10 PM	Main Vac valve opened
12/11/2012	1:35:10 PM	Helium MFC set to  0.000000
12/11/2012	1:35:10 PM	H2 MFC set to  0.000000
12/11/2012	1:35:10 PM	BCl3 MFC set to  0.000000
12/11/2012	1:35:10 PM	PH3 MFC set to  0.000000
12/11/2012	1:35:10 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:35:10 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:35:10 PM	Tube furnace set to 0
12/11/2012	1:35:40 PM	H2 valve closed
12/11/2012	1:35:40 PM	BCl3 valve closed
12/11/2012	1:35:41 PM	PH3 valve closed
12/11/2012	1:35:41 PM	SiCl4 pre valve closed
12/11/2012	1:35:41 PM	SiCl4 post valve closed
12/11/2012	1:35:41 PM	Bypass valve closed
12/11/2012	1:35:41 PM	Bubbler valve closed
12/11/2012	1:35:41 PM	Helium valve opened
12/11/2012	1:35:41 PM	Main Vac valve opened
12/11/2012	1:35:41 PM	Helium MFC set to  20.000000
12/11/2012	1:35:41 PM	H2 MFC set to  0.000000
12/11/2012	1:35:41 PM	BCl3 MFC set to  0.000000
12/11/2012	1:35:41 PM	PH3 MFC set to  0.000000
12/11/2012	1:35:41 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:35:41 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:35:41 PM	Tube furnace set to 0
12/11/2012	1:36:11 PM	Helium valve closed
12/11/2012	1:36:11 PM	H2 valve closed
12/11/2012	1:36:11 PM	BCl3 valve closed
12/11/2012	1:36:11 PM	PH3 valve closed
12/11/2012	1:36:11 PM	SiCl4 pre valve closed
12/11/2012	1:36:11 PM	SiCl4 post valve closed
12/11/2012	1:36:11 PM	Bypass valve closed
12/11/2012	1:36:11 PM	Bubbler valve closed
12/11/2012	1:36:11 PM	Main Vac valve opened
12/11/2012	1:36:11 PM	Helium MFC set to  0.000000
12/11/2012	1:36:11 PM	H2 MFC set to  0.000000
12/11/2012	1:36:11 PM	BCl3 MFC set to  0.000000
12/11/2012	1:36:11 PM	PH3 MFC set to  0.000000
12/11/2012	1:36:11 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:36:11 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:36:11 PM	Tube furnace set to 0
12/11/2012	1:36:41 PM	H2 valve closed
12/11/2012	1:36:41 PM	BCl3 valve closed
12/11/2012	1:36:41 PM	PH3 valve closed
12/11/2012	1:36:41 PM	SiCl4 pre valve closed
12/11/2012	1:36:41 PM	SiCl4 post valve closed
12/11/2012	1:36:41 PM	Bypass valve closed
12/11/2012	1:36:41 PM	Bubbler valve closed
12/11/2012	1:36:41 PM	Helium valve opened
12/11/2012	1:36:41 PM	Main Vac valve opened
12/11/2012	1:36:41 PM	Helium MFC set to  20.000000
12/11/2012	1:36:41 PM	H2 MFC set to  0.000000
12/11/2012	1:36:41 PM	BCl3 MFC set to  0.000000
12/11/2012	1:36:41 PM	PH3 MFC set to  0.000000
12/11/2012	1:36:41 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:36:41 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:36:41 PM	Tube furnace set to 0
12/11/2012	1:37:11 PM	Helium valve closed
12/11/2012	1:37:11 PM	H2 valve closed
12/11/2012	1:37:11 PM	BCl3 valve closed
12/11/2012	1:37:11 PM	PH3 valve closed
12/11/2012	1:37:11 PM	SiCl4 pre valve closed
12/11/2012	1:37:11 PM	SiCl4 post valve closed
12/11/2012	1:37:11 PM	Bypass valve closed
12/11/2012	1:37:11 PM	Bubbler valve closed
12/11/2012	1:37:11 PM	Main Vac valve opened
12/11/2012	1:37:11 PM	Helium MFC set to  0.000000
12/11/2012	1:37:11 PM	H2 MFC set to  0.000000
12/11/2012	1:37:11 PM	BCl3 MFC set to  0.000000
12/11/2012	1:37:11 PM	PH3 MFC set to  0.000000
12/11/2012	1:37:11 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:37:11 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:37:11 PM	Tube furnace set to 0
12/11/2012	1:37:42 PM	H2 valve closed
12/11/2012	1:37:42 PM	BCl3 valve closed
12/11/2012	1:37:42 PM	PH3 valve closed
12/11/2012	1:37:42 PM	SiCl4 pre valve closed
12/11/2012	1:37:42 PM	SiCl4 post valve closed
12/11/2012	1:37:42 PM	Bypass valve closed
12/11/2012	1:37:42 PM	Bubbler valve closed
12/11/2012	1:37:42 PM	Helium valve opened
12/11/2012	1:37:42 PM	Main Vac valve opened
12/11/2012	1:37:42 PM	Helium MFC set to  20.000000
12/11/2012	1:37:42 PM	H2 MFC set to  0.000000
12/11/2012	1:37:42 PM	BCl3 MFC set to  0.000000
12/11/2012	1:37:42 PM	PH3 MFC set to  0.000000
12/11/2012	1:37:42 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:37:42 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:37:42 PM	Tube furnace set to 0
12/11/2012	1:38:12 PM	Helium valve closed
12/11/2012	1:38:12 PM	H2 valve closed
12/11/2012	1:38:12 PM	BCl3 valve closed
12/11/2012	1:38:12 PM	PH3 valve closed
12/11/2012	1:38:12 PM	SiCl4 pre valve closed
12/11/2012	1:38:12 PM	SiCl4 post valve closed
12/11/2012	1:38:12 PM	Bypass valve closed
12/11/2012	1:38:12 PM	Bubbler valve closed
12/11/2012	1:38:12 PM	Main Vac valve opened
12/11/2012	1:38:12 PM	Helium MFC set to  0.000000
12/11/2012	1:38:12 PM	H2 MFC set to  0.000000
12/11/2012	1:38:12 PM	BCl3 MFC set to  0.000000
12/11/2012	1:38:12 PM	PH3 MFC set to  0.000000
12/11/2012	1:38:12 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:38:12 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:38:12 PM	Tube furnace set to 0
12/11/2012	1:38:42 PM	H2 valve closed
12/11/2012	1:38:42 PM	BCl3 valve closed
12/11/2012	1:38:42 PM	PH3 valve closed
12/11/2012	1:38:42 PM	SiCl4 pre valve closed
12/11/2012	1:38:42 PM	SiCl4 post valve closed
12/11/2012	1:38:42 PM	Bypass valve closed
12/11/2012	1:38:42 PM	Bubbler valve closed
12/11/2012	1:38:42 PM	Helium valve opened
12/11/2012	1:38:42 PM	Main Vac valve opened
12/11/2012	1:38:42 PM	Helium MFC set to  20.000000
12/11/2012	1:38:42 PM	H2 MFC set to  0.000000
12/11/2012	1:38:42 PM	BCl3 MFC set to  0.000000
12/11/2012	1:38:42 PM	PH3 MFC set to  0.000000
12/11/2012	1:38:42 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:38:42 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:38:42 PM	Tube furnace set to 0
12/11/2012	1:39:12 PM	Helium valve closed
12/11/2012	1:39:12 PM	H2 valve closed
12/11/2012	1:39:12 PM	BCl3 valve closed
12/11/2012	1:39:12 PM	PH3 valve closed
12/11/2012	1:39:12 PM	SiCl4 pre valve closed
12/11/2012	1:39:12 PM	SiCl4 post valve closed
12/11/2012	1:39:12 PM	Bypass valve closed
12/11/2012	1:39:12 PM	Bubbler valve closed
12/11/2012	1:39:12 PM	Main Vac valve opened
12/11/2012	1:39:12 PM	Helium MFC set to  0.000000
12/11/2012	1:39:12 PM	H2 MFC set to  0.000000
12/11/2012	1:39:12 PM	BCl3 MFC set to  0.000000
12/11/2012	1:39:12 PM	PH3 MFC set to  0.000000
12/11/2012	1:39:12 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:39:12 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:39:13 PM	Tube furnace set to 0
12/11/2012	1:39:43 PM	H2 valve closed
12/11/2012	1:39:43 PM	BCl3 valve closed
12/11/2012	1:39:43 PM	PH3 valve closed
12/11/2012	1:39:43 PM	SiCl4 pre valve closed
12/11/2012	1:39:43 PM	SiCl4 post valve closed
12/11/2012	1:39:43 PM	Bypass valve closed
12/11/2012	1:39:43 PM	Bubbler valve closed
12/11/2012	1:39:43 PM	Helium valve opened
12/11/2012	1:39:43 PM	Main Vac valve opened
12/11/2012	1:39:43 PM	Helium MFC set to  20.000000
12/11/2012	1:39:43 PM	H2 MFC set to  0.000000
12/11/2012	1:39:43 PM	BCl3 MFC set to  0.000000
12/11/2012	1:39:43 PM	PH3 MFC set to  0.000000
12/11/2012	1:39:43 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:39:43 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:39:43 PM	Tube furnace set to 0
12/11/2012	1:40:13 PM	Helium valve closed
12/11/2012	1:40:13 PM	H2 valve closed
12/11/2012	1:40:13 PM	BCl3 valve closed
12/11/2012	1:40:13 PM	PH3 valve closed
12/11/2012	1:40:13 PM	SiCl4 pre valve closed
12/11/2012	1:40:13 PM	SiCl4 post valve closed
12/11/2012	1:40:13 PM	Bypass valve closed
12/11/2012	1:40:13 PM	Bubbler valve closed
12/11/2012	1:40:13 PM	Main Vac valve opened
12/11/2012	1:40:13 PM	Helium MFC set to  0.000000
12/11/2012	1:40:13 PM	H2 MFC set to  0.000000
12/11/2012	1:40:13 PM	BCl3 MFC set to  0.000000
12/11/2012	1:40:13 PM	PH3 MFC set to  0.000000
12/11/2012	1:40:13 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:40:13 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:40:13 PM	Tube furnace set to 0
12/11/2012	1:40:43 PM	H2 valve closed
12/11/2012	1:40:43 PM	BCl3 valve closed
12/11/2012	1:40:43 PM	PH3 valve closed
12/11/2012	1:40:43 PM	SiCl4 pre valve closed
12/11/2012	1:40:43 PM	SiCl4 post valve closed
12/11/2012	1:40:43 PM	Bypass valve closed
12/11/2012	1:40:43 PM	Bubbler valve closed
12/11/2012	1:40:43 PM	Helium valve opened
12/11/2012	1:40:43 PM	Main Vac valve opened
12/11/2012	1:40:43 PM	Helium MFC set to  20.000000
12/11/2012	1:40:43 PM	H2 MFC set to  0.000000
12/11/2012	1:40:43 PM	BCl3 MFC set to  0.000000
12/11/2012	1:40:43 PM	PH3 MFC set to  0.000000
12/11/2012	1:40:43 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:40:43 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:40:43 PM	Tube furnace set to 0
12/11/2012	1:41:13 PM	Helium valve closed
12/11/2012	1:41:13 PM	H2 valve closed
12/11/2012	1:41:13 PM	BCl3 valve closed
12/11/2012	1:41:13 PM	PH3 valve closed
12/11/2012	1:41:13 PM	SiCl4 pre valve closed
12/11/2012	1:41:13 PM	SiCl4 post valve closed
12/11/2012	1:41:13 PM	Bypass valve closed
12/11/2012	1:41:13 PM	Bubbler valve closed
12/11/2012	1:41:13 PM	Main Vac valve opened
12/11/2012	1:41:13 PM	Helium MFC set to  0.000000
12/11/2012	1:41:13 PM	H2 MFC set to  0.000000
12/11/2012	1:41:13 PM	BCl3 MFC set to  0.000000
12/11/2012	1:41:13 PM	PH3 MFC set to  0.000000
12/11/2012	1:41:13 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:41:13 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:41:14 PM	Tube furnace set to 0
12/11/2012	1:41:44 PM	H2 valve closed
12/11/2012	1:41:44 PM	BCl3 valve closed
12/11/2012	1:41:44 PM	PH3 valve closed
12/11/2012	1:41:44 PM	SiCl4 pre valve closed
12/11/2012	1:41:44 PM	SiCl4 post valve closed
12/11/2012	1:41:44 PM	Bypass valve closed
12/11/2012	1:41:44 PM	Bubbler valve closed
12/11/2012	1:41:44 PM	Helium valve opened
12/11/2012	1:41:44 PM	Main Vac valve opened
12/11/2012	1:41:44 PM	Helium MFC set to  20.000000
12/11/2012	1:41:44 PM	H2 MFC set to  0.000000
12/11/2012	1:41:44 PM	BCl3 MFC set to  0.000000
12/11/2012	1:41:44 PM	PH3 MFC set to  0.000000
12/11/2012	1:41:44 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:41:44 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:41:44 PM	Tube furnace set to 0
12/11/2012	1:42:14 PM	Helium valve closed
12/11/2012	1:42:14 PM	H2 valve closed
12/11/2012	1:42:14 PM	BCl3 valve closed
12/11/2012	1:42:14 PM	PH3 valve closed
12/11/2012	1:42:14 PM	SiCl4 pre valve closed
12/11/2012	1:42:14 PM	SiCl4 post valve closed
12/11/2012	1:42:14 PM	Bypass valve closed
12/11/2012	1:42:14 PM	Bubbler valve closed
12/11/2012	1:42:14 PM	Main Vac valve opened
12/11/2012	1:42:14 PM	Helium MFC set to  0.000000
12/11/2012	1:42:14 PM	H2 MFC set to  0.000000
12/11/2012	1:42:14 PM	BCl3 MFC set to  0.000000
12/11/2012	1:42:14 PM	PH3 MFC set to  0.000000
12/11/2012	1:42:14 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:42:14 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:42:14 PM	Tube furnace set to 0
12/11/2012	1:42:15 PM	Run finished at 1:42 PM
12/11/2012	1:42:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	1:43:30 PM	Main Vac valve closed
12/11/2012	1:43:44 PM	Main Vac valve opened
12/11/2012	1:44:24 PM	Recipe started at 1:44 PM
12/11/2012	1:44:24 PM	Helium valve closed
12/11/2012	1:44:24 PM	H2 valve closed
12/11/2012	1:44:24 PM	BCl3 valve closed
12/11/2012	1:44:24 PM	PH3 valve closed
12/11/2012	1:44:24 PM	SiCl4 pre valve closed
12/11/2012	1:44:24 PM	SiCl4 post valve closed
12/11/2012	1:44:24 PM	Main Vac valve closed
12/11/2012	1:44:24 PM	Bypass valve closed
12/11/2012	1:44:24 PM	Bubbler valve closed
12/11/2012	1:44:24 PM	Helium MFC set to  0.000000
12/11/2012	1:44:24 PM	H2 MFC set to  0.000000
12/11/2012	1:44:24 PM	BCl3 MFC set to  0.000000
12/11/2012	1:44:24 PM	PH3 MFC set to  0.000000
12/11/2012	1:44:24 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:44:24 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:44:25 PM	Tube furnace set to 0
12/11/2012	1:44:28 PM	Helium valve closed
12/11/2012	1:44:28 PM	BCl3 valve closed
12/11/2012	1:44:28 PM	PH3 valve closed
12/11/2012	1:44:28 PM	SiCl4 pre valve closed
12/11/2012	1:44:28 PM	SiCl4 post valve closed
12/11/2012	1:44:28 PM	Main Vac valve closed
12/11/2012	1:44:28 PM	Bypass valve closed
12/11/2012	1:44:28 PM	Bubbler valve closed
12/11/2012	1:44:28 PM	H2 valve opened
12/11/2012	1:44:28 PM	Helium MFC set to  0.000000
12/11/2012	1:44:28 PM	H2 MFC set to  500.000000
12/11/2012	1:44:28 PM	BCl3 MFC set to  0.000000
12/11/2012	1:44:28 PM	PH3 MFC set to  0.000000
12/11/2012	1:44:28 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:44:28 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:44:28 PM	Tube furnace set to 0
12/11/2012	1:45:39 PM	Helium valve closed
12/11/2012	1:45:39 PM	BCl3 valve closed
12/11/2012	1:45:39 PM	PH3 valve closed
12/11/2012	1:45:39 PM	SiCl4 pre valve closed
12/11/2012	1:45:39 PM	SiCl4 post valve closed
12/11/2012	1:45:39 PM	Main Vac valve closed
12/11/2012	1:45:39 PM	Bypass valve closed
12/11/2012	1:45:39 PM	H2 valve opened
12/11/2012	1:45:39 PM	Bubbler valve opened
12/11/2012	1:45:39 PM	Helium MFC set to  0.000000
12/11/2012	1:45:39 PM	H2 MFC set to  500.000000
12/11/2012	1:45:39 PM	BCl3 MFC set to  0.000000
12/11/2012	1:45:39 PM	PH3 MFC set to  0.000000
12/11/2012	1:45:39 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:45:39 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:45:39 PM	Tube furnace set to 0
12/11/2012	1:45:40 PM	Helium valve closed
12/11/2012	1:45:40 PM	BCl3 valve closed
12/11/2012	1:45:40 PM	PH3 valve closed
12/11/2012	1:45:40 PM	SiCl4 pre valve closed
12/11/2012	1:45:40 PM	SiCl4 post valve closed
12/11/2012	1:45:40 PM	Main Vac valve closed
12/11/2012	1:45:40 PM	Bypass valve closed
12/11/2012	1:45:40 PM	H2 valve opened
12/11/2012	1:45:40 PM	Bubbler valve opened
12/11/2012	1:45:40 PM	Helium MFC set to  0.000000
12/11/2012	1:45:40 PM	H2 MFC set to  500.000000
12/11/2012	1:45:40 PM	BCl3 MFC set to  0.000000
12/11/2012	1:45:40 PM	PH3 MFC set to  0.000000
12/11/2012	1:45:40 PM	SiCl4 MFC set to  0.000000
12/11/2012	1:45:40 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	1:45:40 PM	Tube furnace set to 1000
12/11/2012	2:15:40 PM	Helium valve closed
12/11/2012	2:15:40 PM	BCl3 valve closed
12/11/2012	2:15:40 PM	Main Vac valve closed
12/11/2012	2:15:40 PM	Bypass valve closed
12/11/2012	2:15:40 PM	H2 valve opened
12/11/2012	2:15:40 PM	PH3 valve opened
12/11/2012	2:15:40 PM	SiCl4 pre valve opened
12/11/2012	2:15:40 PM	SiCl4 post valve opened
12/11/2012	2:15:40 PM	Bubbler valve opened
12/11/2012	2:15:40 PM	Helium MFC set to  0.000000
12/11/2012	2:15:40 PM	H2 MFC set to  500.000000
12/11/2012	2:15:40 PM	BCl3 MFC set to  0.000000
12/11/2012	2:15:40 PM	PH3 MFC set to  0.300000
12/11/2012	2:15:40 PM	SiCl4 MFC set to  25.000000
12/11/2012	2:15:40 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	2:15:41 PM	Tube furnace set to 1000
12/11/2012	2:30:41 PM	Helium valve closed
12/11/2012	2:30:41 PM	BCl3 valve closed
12/11/2012	2:30:41 PM	PH3 valve closed
12/11/2012	2:30:41 PM	SiCl4 pre valve closed
12/11/2012	2:30:41 PM	SiCl4 post valve closed
12/11/2012	2:30:41 PM	Main Vac valve closed
12/11/2012	2:30:41 PM	Bypass valve closed
12/11/2012	2:30:41 PM	H2 valve opened
12/11/2012	2:30:41 PM	Bubbler valve opened
12/11/2012	2:30:41 PM	Helium MFC set to  0.000000
12/11/2012	2:30:41 PM	H2 MFC set to  500.000000
12/11/2012	2:30:41 PM	BCl3 MFC set to  0.000000
12/11/2012	2:30:41 PM	PH3 MFC set to  0.000000
12/11/2012	2:30:41 PM	SiCl4 MFC set to  0.000000
12/11/2012	2:30:41 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	2:30:41 PM	Tube furnace set to 750
12/11/2012	2:35:41 PM	H2 valve closed
12/11/2012	2:35:41 PM	BCl3 valve closed
12/11/2012	2:35:41 PM	PH3 valve closed
12/11/2012	2:35:41 PM	SiCl4 pre valve closed
12/11/2012	2:35:41 PM	SiCl4 post valve closed
12/11/2012	2:35:41 PM	Main Vac valve closed
12/11/2012	2:35:41 PM	Bypass valve closed
12/11/2012	2:35:41 PM	Helium valve opened
12/11/2012	2:35:41 PM	Bubbler valve opened
12/11/2012	2:35:41 PM	Helium MFC set to  500.000000
12/11/2012	2:35:41 PM	H2 MFC set to  0.000000
12/11/2012	2:35:41 PM	BCl3 MFC set to  0.000000
12/11/2012	2:35:41 PM	PH3 MFC set to  0.000000
12/11/2012	2:35:41 PM	SiCl4 MFC set to  0.000000
12/11/2012	2:35:41 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	2:35:41 PM	Tube furnace set to 0
12/11/2012	2:55:41 PM	Helium valve closed
12/11/2012	2:55:41 PM	H2 valve closed
12/11/2012	2:55:41 PM	BCl3 valve closed
12/11/2012	2:55:41 PM	PH3 valve closed
12/11/2012	2:55:41 PM	SiCl4 pre valve closed
12/11/2012	2:55:41 PM	SiCl4 post valve closed
12/11/2012	2:55:41 PM	Main Vac valve closed
12/11/2012	2:55:41 PM	Bypass valve closed
12/11/2012	2:55:41 PM	Bubbler valve closed
12/11/2012	2:55:41 PM	Helium MFC set to  0.000000
12/11/2012	2:55:41 PM	H2 MFC set to  0.000000
12/11/2012	2:55:41 PM	BCl3 MFC set to  0.000000
12/11/2012	2:55:41 PM	PH3 MFC set to  0.000000
12/11/2012	2:55:41 PM	SiCl4 MFC set to  0.000000
12/11/2012	2:55:41 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	2:55:41 PM	Tube furnace set to 0
12/11/2012	2:55:42 PM	Run finished at 2:55 PM
12/11/2012	3:58:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/11/2012	3:58:51 PM	Recipe started at 3:58 PM
12/11/2012	3:58:51 PM	Helium valve closed
12/11/2012	3:58:51 PM	H2 valve closed
12/11/2012	3:58:51 PM	BCl3 valve closed
12/11/2012	3:58:51 PM	PH3 valve closed
12/11/2012	3:58:51 PM	SiCl4 pre valve closed
12/11/2012	3:58:51 PM	SiCl4 post valve closed
12/11/2012	3:58:51 PM	Main Vac valve closed
12/11/2012	3:58:51 PM	Bubbler valve closed
12/11/2012	3:58:51 PM	Bypass valve opened
12/11/2012	3:58:51 PM	Helium MFC set to  0.000000
12/11/2012	3:58:51 PM	H2 MFC set to  0.000000
12/11/2012	3:58:51 PM	BCl3 MFC set to  0.000000
12/11/2012	3:58:51 PM	PH3 MFC set to  0.000000
12/11/2012	3:58:51 PM	SiCl4 MFC set to  0.000000
12/11/2012	3:58:51 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	3:58:51 PM	Tube furnace set to 0
12/11/2012	4:00:02 PM	Helium valve closed
12/11/2012	4:00:02 PM	H2 valve closed
12/11/2012	4:00:02 PM	BCl3 valve closed
12/11/2012	4:00:02 PM	PH3 valve closed
12/11/2012	4:00:02 PM	SiCl4 pre valve closed
12/11/2012	4:00:02 PM	SiCl4 post valve closed
12/11/2012	4:00:02 PM	Main Vac valve closed
12/11/2012	4:00:02 PM	Bubbler valve closed
12/11/2012	4:00:02 PM	Bypass valve opened
12/11/2012	4:00:02 PM	Helium MFC set to  0.000000
12/11/2012	4:00:02 PM	H2 MFC set to  0.000000
12/11/2012	4:00:02 PM	BCl3 MFC set to  0.000000
12/11/2012	4:00:02 PM	PH3 MFC set to  0.000000
12/11/2012	4:00:02 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:00:02 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:00:02 PM	Tube furnace set to 0
12/11/2012	4:00:10 PM	Helium valve closed
12/11/2012	4:00:10 PM	H2 valve closed
12/11/2012	4:00:10 PM	BCl3 valve closed
12/11/2012	4:00:10 PM	PH3 valve closed
12/11/2012	4:00:10 PM	SiCl4 pre valve closed
12/11/2012	4:00:10 PM	SiCl4 post valve closed
12/11/2012	4:00:10 PM	Bypass valve closed
12/11/2012	4:00:10 PM	Bubbler valve closed
12/11/2012	4:00:10 PM	Main Vac valve opened
12/11/2012	4:00:10 PM	Helium MFC set to  0.000000
12/11/2012	4:00:10 PM	H2 MFC set to  0.000000
12/11/2012	4:00:10 PM	BCl3 MFC set to  0.000000
12/11/2012	4:00:10 PM	PH3 MFC set to  0.000000
12/11/2012	4:00:10 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:00:10 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:00:10 PM	Tube furnace set to 0
12/11/2012	4:00:11 PM	Run finished at 4:00 PM
12/11/2012	4:00:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/11/2012	4:00:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	4:00:44 PM	Recipe started at 4:00 PM
12/11/2012	4:00:44 PM	Helium valve closed
12/11/2012	4:00:44 PM	H2 valve closed
12/11/2012	4:00:44 PM	BCl3 valve closed
12/11/2012	4:00:44 PM	PH3 valve closed
12/11/2012	4:00:44 PM	SiCl4 pre valve closed
12/11/2012	4:00:44 PM	SiCl4 post valve closed
12/11/2012	4:00:44 PM	Main Vac valve closed
12/11/2012	4:00:44 PM	Bubbler valve closed
12/11/2012	4:00:44 PM	Bypass valve opened
12/11/2012	4:00:44 PM	Helium MFC set to  0.000000
12/11/2012	4:00:44 PM	H2 MFC set to  0.000000
12/11/2012	4:00:44 PM	BCl3 MFC set to  0.000000
12/11/2012	4:00:44 PM	PH3 MFC set to  0.000000
12/11/2012	4:00:44 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:00:44 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:00:44 PM	Tube furnace set to 0
12/11/2012	4:00:45 PM	Helium valve closed
12/11/2012	4:00:45 PM	H2 valve closed
12/11/2012	4:00:45 PM	BCl3 valve closed
12/11/2012	4:00:45 PM	PH3 valve closed
12/11/2012	4:00:45 PM	SiCl4 pre valve closed
12/11/2012	4:00:45 PM	SiCl4 post valve closed
12/11/2012	4:00:45 PM	Main Vac valve closed
12/11/2012	4:00:45 PM	Bubbler valve closed
12/11/2012	4:00:45 PM	Bypass valve opened
12/11/2012	4:00:45 PM	Helium MFC set to  0.000000
12/11/2012	4:00:45 PM	H2 MFC set to  0.000000
12/11/2012	4:00:45 PM	BCl3 MFC set to  0.000000
12/11/2012	4:00:45 PM	PH3 MFC set to  0.000000
12/11/2012	4:00:45 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:00:45 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:00:45 PM	Tube furnace set to 0
12/11/2012	4:00:45 PM	Helium valve closed
12/11/2012	4:00:45 PM	H2 valve closed
12/11/2012	4:00:45 PM	BCl3 valve closed
12/11/2012	4:00:45 PM	PH3 valve closed
12/11/2012	4:00:45 PM	SiCl4 pre valve closed
12/11/2012	4:00:45 PM	SiCl4 post valve closed
12/11/2012	4:00:45 PM	Bypass valve closed
12/11/2012	4:00:45 PM	Bubbler valve closed
12/11/2012	4:00:45 PM	Main Vac valve opened
12/11/2012	4:00:45 PM	Helium MFC set to  0.000000
12/11/2012	4:00:45 PM	H2 MFC set to  0.000000
12/11/2012	4:00:45 PM	BCl3 MFC set to  0.000000
12/11/2012	4:00:45 PM	PH3 MFC set to  0.000000
12/11/2012	4:00:45 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:00:45 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:00:45 PM	Tube furnace set to 0
12/11/2012	4:01:15 PM	H2 valve closed
12/11/2012	4:01:15 PM	BCl3 valve closed
12/11/2012	4:01:15 PM	PH3 valve closed
12/11/2012	4:01:15 PM	SiCl4 pre valve closed
12/11/2012	4:01:15 PM	SiCl4 post valve closed
12/11/2012	4:01:15 PM	Bypass valve closed
12/11/2012	4:01:15 PM	Bubbler valve closed
12/11/2012	4:01:15 PM	Helium valve opened
12/11/2012	4:01:15 PM	Main Vac valve opened
12/11/2012	4:01:15 PM	Helium MFC set to  20.000000
12/11/2012	4:01:15 PM	H2 MFC set to  0.000000
12/11/2012	4:01:15 PM	BCl3 MFC set to  0.000000
12/11/2012	4:01:15 PM	PH3 MFC set to  0.000000
12/11/2012	4:01:16 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:01:16 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:01:16 PM	Tube furnace set to 0
12/11/2012	4:01:46 PM	Helium valve closed
12/11/2012	4:01:46 PM	H2 valve closed
12/11/2012	4:01:46 PM	BCl3 valve closed
12/11/2012	4:01:46 PM	PH3 valve closed
12/11/2012	4:01:46 PM	SiCl4 pre valve closed
12/11/2012	4:01:46 PM	SiCl4 post valve closed
12/11/2012	4:01:46 PM	Bypass valve closed
12/11/2012	4:01:46 PM	Bubbler valve closed
12/11/2012	4:01:46 PM	Main Vac valve opened
12/11/2012	4:01:46 PM	Helium MFC set to  0.000000
12/11/2012	4:01:46 PM	H2 MFC set to  0.000000
12/11/2012	4:01:46 PM	BCl3 MFC set to  0.000000
12/11/2012	4:01:46 PM	PH3 MFC set to  0.000000
12/11/2012	4:01:46 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:01:46 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:01:46 PM	Tube furnace set to 0
12/11/2012	4:02:16 PM	H2 valve closed
12/11/2012	4:02:16 PM	BCl3 valve closed
12/11/2012	4:02:16 PM	PH3 valve closed
12/11/2012	4:02:16 PM	SiCl4 pre valve closed
12/11/2012	4:02:16 PM	SiCl4 post valve closed
12/11/2012	4:02:16 PM	Bypass valve closed
12/11/2012	4:02:16 PM	Bubbler valve closed
12/11/2012	4:02:16 PM	Helium valve opened
12/11/2012	4:02:16 PM	Main Vac valve opened
12/11/2012	4:02:16 PM	Helium MFC set to  20.000000
12/11/2012	4:02:16 PM	H2 MFC set to  0.000000
12/11/2012	4:02:16 PM	BCl3 MFC set to  0.000000
12/11/2012	4:02:16 PM	PH3 MFC set to  0.000000
12/11/2012	4:02:16 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:02:16 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:02:16 PM	Tube furnace set to 0
12/11/2012	4:02:46 PM	Helium valve closed
12/11/2012	4:02:46 PM	H2 valve closed
12/11/2012	4:02:46 PM	BCl3 valve closed
12/11/2012	4:02:46 PM	PH3 valve closed
12/11/2012	4:02:46 PM	SiCl4 pre valve closed
12/11/2012	4:02:46 PM	SiCl4 post valve closed
12/11/2012	4:02:46 PM	Bypass valve closed
12/11/2012	4:02:46 PM	Bubbler valve closed
12/11/2012	4:02:46 PM	Main Vac valve opened
12/11/2012	4:02:46 PM	Helium MFC set to  0.000000
12/11/2012	4:02:46 PM	H2 MFC set to  0.000000
12/11/2012	4:02:46 PM	BCl3 MFC set to  0.000000
12/11/2012	4:02:46 PM	PH3 MFC set to  0.000000
12/11/2012	4:02:46 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:02:46 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:02:46 PM	Tube furnace set to 0
12/11/2012	4:03:16 PM	H2 valve closed
12/11/2012	4:03:16 PM	BCl3 valve closed
12/11/2012	4:03:16 PM	PH3 valve closed
12/11/2012	4:03:16 PM	SiCl4 pre valve closed
12/11/2012	4:03:16 PM	SiCl4 post valve closed
12/11/2012	4:03:16 PM	Bypass valve closed
12/11/2012	4:03:16 PM	Bubbler valve closed
12/11/2012	4:03:16 PM	Helium valve opened
12/11/2012	4:03:16 PM	Main Vac valve opened
12/11/2012	4:03:16 PM	Helium MFC set to  20.000000
12/11/2012	4:03:17 PM	H2 MFC set to  0.000000
12/11/2012	4:03:17 PM	BCl3 MFC set to  0.000000
12/11/2012	4:03:17 PM	PH3 MFC set to  0.000000
12/11/2012	4:03:17 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:03:17 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:03:17 PM	Tube furnace set to 0
12/11/2012	4:03:47 PM	Helium valve closed
12/11/2012	4:03:47 PM	H2 valve closed
12/11/2012	4:03:47 PM	BCl3 valve closed
12/11/2012	4:03:47 PM	PH3 valve closed
12/11/2012	4:03:47 PM	SiCl4 pre valve closed
12/11/2012	4:03:47 PM	SiCl4 post valve closed
12/11/2012	4:03:47 PM	Bypass valve closed
12/11/2012	4:03:47 PM	Bubbler valve closed
12/11/2012	4:03:47 PM	Main Vac valve opened
12/11/2012	4:03:47 PM	Helium MFC set to  0.000000
12/11/2012	4:03:47 PM	H2 MFC set to  0.000000
12/11/2012	4:03:47 PM	BCl3 MFC set to  0.000000
12/11/2012	4:03:47 PM	PH3 MFC set to  0.000000
12/11/2012	4:03:47 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:03:47 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:03:47 PM	Tube furnace set to 0
12/11/2012	4:04:17 PM	H2 valve closed
12/11/2012	4:04:17 PM	BCl3 valve closed
12/11/2012	4:04:17 PM	PH3 valve closed
12/11/2012	4:04:17 PM	SiCl4 pre valve closed
12/11/2012	4:04:17 PM	SiCl4 post valve closed
12/11/2012	4:04:17 PM	Bypass valve closed
12/11/2012	4:04:17 PM	Bubbler valve closed
12/11/2012	4:04:17 PM	Helium valve opened
12/11/2012	4:04:17 PM	Main Vac valve opened
12/11/2012	4:04:17 PM	Helium MFC set to  20.000000
12/11/2012	4:04:17 PM	H2 MFC set to  0.000000
12/11/2012	4:04:17 PM	BCl3 MFC set to  0.000000
12/11/2012	4:04:17 PM	PH3 MFC set to  0.000000
12/11/2012	4:04:17 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:04:17 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:04:17 PM	Tube furnace set to 0
12/11/2012	4:04:47 PM	Helium valve closed
12/11/2012	4:04:47 PM	H2 valve closed
12/11/2012	4:04:47 PM	BCl3 valve closed
12/11/2012	4:04:47 PM	PH3 valve closed
12/11/2012	4:04:47 PM	SiCl4 pre valve closed
12/11/2012	4:04:47 PM	SiCl4 post valve closed
12/11/2012	4:04:47 PM	Bypass valve closed
12/11/2012	4:04:47 PM	Bubbler valve closed
12/11/2012	4:04:47 PM	Main Vac valve opened
12/11/2012	4:04:47 PM	Helium MFC set to  0.000000
12/11/2012	4:04:47 PM	H2 MFC set to  0.000000
12/11/2012	4:04:47 PM	BCl3 MFC set to  0.000000
12/11/2012	4:04:47 PM	PH3 MFC set to  0.000000
12/11/2012	4:04:47 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:04:47 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:04:47 PM	Tube furnace set to 0
12/11/2012	4:05:17 PM	H2 valve closed
12/11/2012	4:05:17 PM	BCl3 valve closed
12/11/2012	4:05:17 PM	PH3 valve closed
12/11/2012	4:05:17 PM	SiCl4 pre valve closed
12/11/2012	4:05:18 PM	SiCl4 post valve closed
12/11/2012	4:05:18 PM	Bypass valve closed
12/11/2012	4:05:18 PM	Bubbler valve closed
12/11/2012	4:05:18 PM	Helium valve opened
12/11/2012	4:05:18 PM	Main Vac valve opened
12/11/2012	4:05:18 PM	Helium MFC set to  20.000000
12/11/2012	4:05:18 PM	H2 MFC set to  0.000000
12/11/2012	4:05:18 PM	BCl3 MFC set to  0.000000
12/11/2012	4:05:18 PM	PH3 MFC set to  0.000000
12/11/2012	4:05:18 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:05:18 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:05:18 PM	Tube furnace set to 0
12/11/2012	4:05:48 PM	Helium valve closed
12/11/2012	4:05:48 PM	H2 valve closed
12/11/2012	4:05:48 PM	BCl3 valve closed
12/11/2012	4:05:48 PM	PH3 valve closed
12/11/2012	4:05:48 PM	SiCl4 pre valve closed
12/11/2012	4:05:48 PM	SiCl4 post valve closed
12/11/2012	4:05:48 PM	Bypass valve closed
12/11/2012	4:05:48 PM	Bubbler valve closed
12/11/2012	4:05:48 PM	Main Vac valve opened
12/11/2012	4:05:48 PM	Helium MFC set to  0.000000
12/11/2012	4:05:48 PM	H2 MFC set to  0.000000
12/11/2012	4:05:48 PM	BCl3 MFC set to  0.000000
12/11/2012	4:05:48 PM	PH3 MFC set to  0.000000
12/11/2012	4:05:48 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:05:48 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:05:48 PM	Tube furnace set to 0
12/11/2012	4:06:18 PM	H2 valve closed
12/11/2012	4:06:18 PM	BCl3 valve closed
12/11/2012	4:06:18 PM	PH3 valve closed
12/11/2012	4:06:18 PM	SiCl4 pre valve closed
12/11/2012	4:06:18 PM	SiCl4 post valve closed
12/11/2012	4:06:18 PM	Bypass valve closed
12/11/2012	4:06:18 PM	Bubbler valve closed
12/11/2012	4:06:18 PM	Helium valve opened
12/11/2012	4:06:18 PM	Main Vac valve opened
12/11/2012	4:06:18 PM	Helium MFC set to  20.000000
12/11/2012	4:06:18 PM	H2 MFC set to  0.000000
12/11/2012	4:06:18 PM	BCl3 MFC set to  0.000000
12/11/2012	4:06:18 PM	PH3 MFC set to  0.000000
12/11/2012	4:06:18 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:06:18 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:06:18 PM	Tube furnace set to 0
12/11/2012	4:06:48 PM	Helium valve closed
12/11/2012	4:06:48 PM	H2 valve closed
12/11/2012	4:06:48 PM	BCl3 valve closed
12/11/2012	4:06:48 PM	PH3 valve closed
12/11/2012	4:06:48 PM	SiCl4 pre valve closed
12/11/2012	4:06:48 PM	SiCl4 post valve closed
12/11/2012	4:06:48 PM	Bypass valve closed
12/11/2012	4:06:48 PM	Bubbler valve closed
12/11/2012	4:06:48 PM	Main Vac valve opened
12/11/2012	4:06:48 PM	Helium MFC set to  0.000000
12/11/2012	4:06:48 PM	H2 MFC set to  0.000000
12/11/2012	4:06:48 PM	BCl3 MFC set to  0.000000
12/11/2012	4:06:48 PM	PH3 MFC set to  0.000000
12/11/2012	4:06:48 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:06:48 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:06:48 PM	Tube furnace set to 0
12/11/2012	4:07:18 PM	H2 valve closed
12/11/2012	4:07:18 PM	BCl3 valve closed
12/11/2012	4:07:19 PM	PH3 valve closed
12/11/2012	4:07:19 PM	SiCl4 pre valve closed
12/11/2012	4:07:19 PM	SiCl4 post valve closed
12/11/2012	4:07:19 PM	Bypass valve closed
12/11/2012	4:07:19 PM	Bubbler valve closed
12/11/2012	4:07:19 PM	Helium valve opened
12/11/2012	4:07:19 PM	Main Vac valve opened
12/11/2012	4:07:19 PM	Helium MFC set to  20.000000
12/11/2012	4:07:19 PM	H2 MFC set to  0.000000
12/11/2012	4:07:19 PM	BCl3 MFC set to  0.000000
12/11/2012	4:07:19 PM	PH3 MFC set to  0.000000
12/11/2012	4:07:19 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:07:19 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:07:19 PM	Tube furnace set to 0
12/11/2012	4:07:49 PM	Helium valve closed
12/11/2012	4:07:49 PM	H2 valve closed
12/11/2012	4:07:49 PM	BCl3 valve closed
12/11/2012	4:07:49 PM	PH3 valve closed
12/11/2012	4:07:49 PM	SiCl4 pre valve closed
12/11/2012	4:07:49 PM	SiCl4 post valve closed
12/11/2012	4:07:49 PM	Bypass valve closed
12/11/2012	4:07:49 PM	Bubbler valve closed
12/11/2012	4:07:49 PM	Main Vac valve opened
12/11/2012	4:07:49 PM	Helium MFC set to  0.000000
12/11/2012	4:07:49 PM	H2 MFC set to  0.000000
12/11/2012	4:07:49 PM	BCl3 MFC set to  0.000000
12/11/2012	4:07:49 PM	PH3 MFC set to  0.000000
12/11/2012	4:07:49 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:07:49 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:07:49 PM	Tube furnace set to 0
12/11/2012	4:08:19 PM	H2 valve closed
12/11/2012	4:08:19 PM	BCl3 valve closed
12/11/2012	4:08:19 PM	PH3 valve closed
12/11/2012	4:08:19 PM	SiCl4 pre valve closed
12/11/2012	4:08:19 PM	SiCl4 post valve closed
12/11/2012	4:08:19 PM	Bypass valve closed
12/11/2012	4:08:19 PM	Bubbler valve closed
12/11/2012	4:08:19 PM	Helium valve opened
12/11/2012	4:08:19 PM	Main Vac valve opened
12/11/2012	4:08:19 PM	Helium MFC set to  20.000000
12/11/2012	4:08:19 PM	H2 MFC set to  0.000000
12/11/2012	4:08:19 PM	BCl3 MFC set to  0.000000
12/11/2012	4:08:19 PM	PH3 MFC set to  0.000000
12/11/2012	4:08:19 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:08:19 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:08:19 PM	Tube furnace set to 0
12/11/2012	4:08:49 PM	Helium valve closed
12/11/2012	4:08:49 PM	H2 valve closed
12/11/2012	4:08:49 PM	BCl3 valve closed
12/11/2012	4:08:49 PM	PH3 valve closed
12/11/2012	4:08:49 PM	SiCl4 pre valve closed
12/11/2012	4:08:49 PM	SiCl4 post valve closed
12/11/2012	4:08:49 PM	Bypass valve closed
12/11/2012	4:08:49 PM	Bubbler valve closed
12/11/2012	4:08:49 PM	Main Vac valve opened
12/11/2012	4:08:49 PM	Helium MFC set to  0.000000
12/11/2012	4:08:49 PM	H2 MFC set to  0.000000
12/11/2012	4:08:49 PM	BCl3 MFC set to  0.000000
12/11/2012	4:08:49 PM	PH3 MFC set to  0.000000
12/11/2012	4:08:49 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:08:49 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:08:49 PM	Tube furnace set to 0
12/11/2012	4:09:20 PM	H2 valve closed
12/11/2012	4:09:20 PM	BCl3 valve closed
12/11/2012	4:09:20 PM	PH3 valve closed
12/11/2012	4:09:20 PM	SiCl4 pre valve closed
12/11/2012	4:09:20 PM	SiCl4 post valve closed
12/11/2012	4:09:20 PM	Bypass valve closed
12/11/2012	4:09:20 PM	Bubbler valve closed
12/11/2012	4:09:20 PM	Helium valve opened
12/11/2012	4:09:20 PM	Main Vac valve opened
12/11/2012	4:09:20 PM	Helium MFC set to  20.000000
12/11/2012	4:09:20 PM	H2 MFC set to  0.000000
12/11/2012	4:09:20 PM	BCl3 MFC set to  0.000000
12/11/2012	4:09:20 PM	PH3 MFC set to  0.000000
12/11/2012	4:09:20 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:09:20 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:09:20 PM	Tube furnace set to 0
12/11/2012	4:09:50 PM	Helium valve closed
12/11/2012	4:09:50 PM	H2 valve closed
12/11/2012	4:09:50 PM	BCl3 valve closed
12/11/2012	4:09:50 PM	PH3 valve closed
12/11/2012	4:09:50 PM	SiCl4 pre valve closed
12/11/2012	4:09:50 PM	SiCl4 post valve closed
12/11/2012	4:09:50 PM	Bypass valve closed
12/11/2012	4:09:50 PM	Bubbler valve closed
12/11/2012	4:09:50 PM	Main Vac valve opened
12/11/2012	4:09:50 PM	Helium MFC set to  0.000000
12/11/2012	4:09:50 PM	H2 MFC set to  0.000000
12/11/2012	4:09:50 PM	BCl3 MFC set to  0.000000
12/11/2012	4:09:50 PM	PH3 MFC set to  0.000000
12/11/2012	4:09:50 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:09:50 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:09:50 PM	Tube furnace set to 0
12/11/2012	4:10:20 PM	H2 valve closed
12/11/2012	4:10:20 PM	BCl3 valve closed
12/11/2012	4:10:20 PM	PH3 valve closed
12/11/2012	4:10:20 PM	SiCl4 pre valve closed
12/11/2012	4:10:20 PM	SiCl4 post valve closed
12/11/2012	4:10:20 PM	Bypass valve closed
12/11/2012	4:10:20 PM	Bubbler valve closed
12/11/2012	4:10:20 PM	Helium valve opened
12/11/2012	4:10:20 PM	Main Vac valve opened
12/11/2012	4:10:20 PM	Helium MFC set to  20.000000
12/11/2012	4:10:20 PM	H2 MFC set to  0.000000
12/11/2012	4:10:20 PM	BCl3 MFC set to  0.000000
12/11/2012	4:10:20 PM	PH3 MFC set to  0.000000
12/11/2012	4:10:20 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:10:20 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:10:20 PM	Tube furnace set to 0
12/11/2012	4:10:50 PM	Helium valve closed
12/11/2012	4:10:50 PM	H2 valve closed
12/11/2012	4:10:50 PM	BCl3 valve closed
12/11/2012	4:10:50 PM	PH3 valve closed
12/11/2012	4:10:50 PM	SiCl4 pre valve closed
12/11/2012	4:10:50 PM	SiCl4 post valve closed
12/11/2012	4:10:50 PM	Bypass valve closed
12/11/2012	4:10:50 PM	Bubbler valve closed
12/11/2012	4:10:50 PM	Main Vac valve opened
12/11/2012	4:10:50 PM	Helium MFC set to  0.000000
12/11/2012	4:10:50 PM	H2 MFC set to  0.000000
12/11/2012	4:10:50 PM	BCl3 MFC set to  0.000000
12/11/2012	4:10:50 PM	PH3 MFC set to  0.000000
12/11/2012	4:10:50 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:10:50 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:10:51 PM	Tube furnace set to 0
12/11/2012	4:10:52 PM	Run finished at 4:10 PM
12/11/2012	4:10:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	4:11:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	4:11:51 PM	Recipe started at 4:11 PM
12/11/2012	4:11:51 PM	Helium valve closed
12/11/2012	4:11:51 PM	H2 valve closed
12/11/2012	4:11:51 PM	BCl3 valve closed
12/11/2012	4:11:51 PM	PH3 valve closed
12/11/2012	4:11:51 PM	SiCl4 pre valve closed
12/11/2012	4:11:51 PM	SiCl4 post valve closed
12/11/2012	4:11:51 PM	Main Vac valve closed
12/11/2012	4:11:52 PM	Bubbler valve closed
12/11/2012	4:11:52 PM	Bypass valve opened
12/11/2012	4:11:52 PM	Helium MFC set to  0.000000
12/11/2012	4:11:52 PM	H2 MFC set to  0.000000
12/11/2012	4:11:52 PM	BCl3 MFC set to  0.000000
12/11/2012	4:11:52 PM	PH3 MFC set to  0.000000
12/11/2012	4:11:52 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:11:52 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:11:52 PM	Tube furnace set to 0
12/11/2012	4:11:52 PM	Helium valve closed
12/11/2012	4:11:52 PM	H2 valve closed
12/11/2012	4:11:52 PM	BCl3 valve closed
12/11/2012	4:11:52 PM	PH3 valve closed
12/11/2012	4:11:52 PM	SiCl4 pre valve closed
12/11/2012	4:11:52 PM	SiCl4 post valve closed
12/11/2012	4:11:52 PM	Main Vac valve closed
12/11/2012	4:11:52 PM	Bubbler valve closed
12/11/2012	4:11:52 PM	Bypass valve opened
12/11/2012	4:11:52 PM	Helium MFC set to  0.000000
12/11/2012	4:11:52 PM	H2 MFC set to  0.000000
12/11/2012	4:11:52 PM	BCl3 MFC set to  0.000000
12/11/2012	4:11:52 PM	PH3 MFC set to  0.000000
12/11/2012	4:11:52 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:11:52 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:11:52 PM	Tube furnace set to 0
12/11/2012	4:11:52 PM	Helium valve closed
12/11/2012	4:11:52 PM	H2 valve closed
12/11/2012	4:11:52 PM	BCl3 valve closed
12/11/2012	4:11:53 PM	PH3 valve closed
12/11/2012	4:11:53 PM	SiCl4 pre valve closed
12/11/2012	4:11:53 PM	SiCl4 post valve closed
12/11/2012	4:11:53 PM	Bypass valve closed
12/11/2012	4:11:53 PM	Bubbler valve closed
12/11/2012	4:11:53 PM	Main Vac valve opened
12/11/2012	4:11:53 PM	Helium MFC set to  0.000000
12/11/2012	4:11:53 PM	H2 MFC set to  0.000000
12/11/2012	4:11:53 PM	BCl3 MFC set to  0.000000
12/11/2012	4:11:53 PM	PH3 MFC set to  0.000000
12/11/2012	4:11:53 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:11:53 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:11:53 PM	Tube furnace set to 0
12/11/2012	4:12:23 PM	H2 valve closed
12/11/2012	4:12:23 PM	BCl3 valve closed
12/11/2012	4:12:23 PM	PH3 valve closed
12/11/2012	4:12:23 PM	SiCl4 pre valve closed
12/11/2012	4:12:23 PM	SiCl4 post valve closed
12/11/2012	4:12:23 PM	Bypass valve closed
12/11/2012	4:12:23 PM	Bubbler valve closed
12/11/2012	4:12:23 PM	Helium valve opened
12/11/2012	4:12:23 PM	Main Vac valve opened
12/11/2012	4:12:23 PM	Helium MFC set to  20.000000
12/11/2012	4:12:23 PM	H2 MFC set to  0.000000
12/11/2012	4:12:23 PM	BCl3 MFC set to  0.000000
12/11/2012	4:12:23 PM	PH3 MFC set to  0.000000
12/11/2012	4:12:23 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:12:23 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:12:23 PM	Tube furnace set to 0
12/11/2012	4:12:53 PM	Helium valve closed
12/11/2012	4:12:53 PM	H2 valve closed
12/11/2012	4:12:53 PM	BCl3 valve closed
12/11/2012	4:12:53 PM	PH3 valve closed
12/11/2012	4:12:53 PM	SiCl4 pre valve closed
12/11/2012	4:12:53 PM	SiCl4 post valve closed
12/11/2012	4:12:53 PM	Bypass valve closed
12/11/2012	4:12:53 PM	Bubbler valve closed
12/11/2012	4:12:53 PM	Main Vac valve opened
12/11/2012	4:12:53 PM	Helium MFC set to  0.000000
12/11/2012	4:12:53 PM	H2 MFC set to  0.000000
12/11/2012	4:12:53 PM	BCl3 MFC set to  0.000000
12/11/2012	4:12:53 PM	PH3 MFC set to  0.000000
12/11/2012	4:12:53 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:12:53 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:12:53 PM	Tube furnace set to 0
12/11/2012	4:13:23 PM	H2 valve closed
12/11/2012	4:13:23 PM	BCl3 valve closed
12/11/2012	4:13:23 PM	PH3 valve closed
12/11/2012	4:13:23 PM	SiCl4 pre valve closed
12/11/2012	4:13:23 PM	SiCl4 post valve closed
12/11/2012	4:13:23 PM	Bypass valve closed
12/11/2012	4:13:23 PM	Bubbler valve closed
12/11/2012	4:13:23 PM	Helium valve opened
12/11/2012	4:13:23 PM	Main Vac valve opened
12/11/2012	4:13:23 PM	Helium MFC set to  20.000000
12/11/2012	4:13:23 PM	H2 MFC set to  0.000000
12/11/2012	4:13:23 PM	BCl3 MFC set to  0.000000
12/11/2012	4:13:23 PM	PH3 MFC set to  0.000000
12/11/2012	4:13:23 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:13:23 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:13:23 PM	Tube furnace set to 0
12/11/2012	4:13:54 PM	Helium valve closed
12/11/2012	4:13:54 PM	H2 valve closed
12/11/2012	4:13:54 PM	BCl3 valve closed
12/11/2012	4:13:54 PM	PH3 valve closed
12/11/2012	4:13:54 PM	SiCl4 pre valve closed
12/11/2012	4:13:54 PM	SiCl4 post valve closed
12/11/2012	4:13:54 PM	Bypass valve closed
12/11/2012	4:13:54 PM	Bubbler valve closed
12/11/2012	4:13:54 PM	Main Vac valve opened
12/11/2012	4:13:54 PM	Helium MFC set to  0.000000
12/11/2012	4:13:54 PM	H2 MFC set to  0.000000
12/11/2012	4:13:54 PM	BCl3 MFC set to  0.000000
12/11/2012	4:13:54 PM	PH3 MFC set to  0.000000
12/11/2012	4:13:54 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:13:54 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:13:54 PM	Tube furnace set to 0
12/11/2012	4:14:24 PM	H2 valve closed
12/11/2012	4:14:24 PM	BCl3 valve closed
12/11/2012	4:14:24 PM	PH3 valve closed
12/11/2012	4:14:24 PM	SiCl4 pre valve closed
12/11/2012	4:14:24 PM	SiCl4 post valve closed
12/11/2012	4:14:24 PM	Bypass valve closed
12/11/2012	4:14:24 PM	Bubbler valve closed
12/11/2012	4:14:24 PM	Helium valve opened
12/11/2012	4:14:24 PM	Main Vac valve opened
12/11/2012	4:14:24 PM	Helium MFC set to  20.000000
12/11/2012	4:14:24 PM	H2 MFC set to  0.000000
12/11/2012	4:14:24 PM	BCl3 MFC set to  0.000000
12/11/2012	4:14:24 PM	PH3 MFC set to  0.000000
12/11/2012	4:14:24 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:14:24 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:14:24 PM	Tube furnace set to 0
12/11/2012	4:14:54 PM	Helium valve closed
12/11/2012	4:14:54 PM	H2 valve closed
12/11/2012	4:14:54 PM	BCl3 valve closed
12/11/2012	4:14:54 PM	PH3 valve closed
12/11/2012	4:14:54 PM	SiCl4 pre valve closed
12/11/2012	4:14:54 PM	SiCl4 post valve closed
12/11/2012	4:14:54 PM	Bypass valve closed
12/11/2012	4:14:54 PM	Bubbler valve closed
12/11/2012	4:14:54 PM	Main Vac valve opened
12/11/2012	4:14:54 PM	Helium MFC set to  0.000000
12/11/2012	4:14:54 PM	H2 MFC set to  0.000000
12/11/2012	4:14:54 PM	BCl3 MFC set to  0.000000
12/11/2012	4:14:54 PM	PH3 MFC set to  0.000000
12/11/2012	4:14:54 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:14:54 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:14:54 PM	Tube furnace set to 0
12/11/2012	4:15:24 PM	H2 valve closed
12/11/2012	4:15:24 PM	BCl3 valve closed
12/11/2012	4:15:24 PM	PH3 valve closed
12/11/2012	4:15:24 PM	SiCl4 pre valve closed
12/11/2012	4:15:24 PM	SiCl4 post valve closed
12/11/2012	4:15:24 PM	Bypass valve closed
12/11/2012	4:15:24 PM	Bubbler valve closed
12/11/2012	4:15:24 PM	Helium valve opened
12/11/2012	4:15:24 PM	Main Vac valve opened
12/11/2012	4:15:24 PM	Helium MFC set to  20.000000
12/11/2012	4:15:24 PM	H2 MFC set to  0.000000
12/11/2012	4:15:24 PM	BCl3 MFC set to  0.000000
12/11/2012	4:15:24 PM	PH3 MFC set to  0.000000
12/11/2012	4:15:24 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:15:24 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:15:25 PM	Tube furnace set to 0
12/11/2012	4:15:55 PM	Helium valve closed
12/11/2012	4:15:55 PM	H2 valve closed
12/11/2012	4:15:55 PM	BCl3 valve closed
12/11/2012	4:15:55 PM	PH3 valve closed
12/11/2012	4:15:55 PM	SiCl4 pre valve closed
12/11/2012	4:15:55 PM	SiCl4 post valve closed
12/11/2012	4:15:55 PM	Bypass valve closed
12/11/2012	4:15:55 PM	Bubbler valve closed
12/11/2012	4:15:55 PM	Main Vac valve opened
12/11/2012	4:15:55 PM	Helium MFC set to  0.000000
12/11/2012	4:15:55 PM	H2 MFC set to  0.000000
12/11/2012	4:15:55 PM	BCl3 MFC set to  0.000000
12/11/2012	4:15:55 PM	PH3 MFC set to  0.000000
12/11/2012	4:15:55 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:15:55 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:15:55 PM	Tube furnace set to 0
12/11/2012	4:16:25 PM	H2 valve closed
12/11/2012	4:16:25 PM	BCl3 valve closed
12/11/2012	4:16:25 PM	PH3 valve closed
12/11/2012	4:16:25 PM	SiCl4 pre valve closed
12/11/2012	4:16:25 PM	SiCl4 post valve closed
12/11/2012	4:16:25 PM	Bypass valve closed
12/11/2012	4:16:25 PM	Bubbler valve closed
12/11/2012	4:16:25 PM	Helium valve opened
12/11/2012	4:16:25 PM	Main Vac valve opened
12/11/2012	4:16:25 PM	Helium MFC set to  20.000000
12/11/2012	4:16:25 PM	H2 MFC set to  0.000000
12/11/2012	4:16:25 PM	BCl3 MFC set to  0.000000
12/11/2012	4:16:25 PM	PH3 MFC set to  0.000000
12/11/2012	4:16:25 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:16:25 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:16:25 PM	Tube furnace set to 0
12/11/2012	4:16:55 PM	Helium valve closed
12/11/2012	4:16:55 PM	H2 valve closed
12/11/2012	4:16:55 PM	BCl3 valve closed
12/11/2012	4:16:55 PM	PH3 valve closed
12/11/2012	4:16:55 PM	SiCl4 pre valve closed
12/11/2012	4:16:55 PM	SiCl4 post valve closed
12/11/2012	4:16:55 PM	Bypass valve closed
12/11/2012	4:16:55 PM	Bubbler valve closed
12/11/2012	4:16:55 PM	Main Vac valve opened
12/11/2012	4:16:55 PM	Helium MFC set to  0.000000
12/11/2012	4:16:55 PM	H2 MFC set to  0.000000
12/11/2012	4:16:55 PM	BCl3 MFC set to  0.000000
12/11/2012	4:16:55 PM	PH3 MFC set to  0.000000
12/11/2012	4:16:55 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:16:55 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:16:55 PM	Tube furnace set to 0
12/11/2012	4:17:25 PM	H2 valve closed
12/11/2012	4:17:25 PM	BCl3 valve closed
12/11/2012	4:17:25 PM	PH3 valve closed
12/11/2012	4:17:25 PM	SiCl4 pre valve closed
12/11/2012	4:17:25 PM	SiCl4 post valve closed
12/11/2012	4:17:25 PM	Bypass valve closed
12/11/2012	4:17:25 PM	Bubbler valve closed
12/11/2012	4:17:25 PM	Helium valve opened
12/11/2012	4:17:25 PM	Main Vac valve opened
12/11/2012	4:17:25 PM	Helium MFC set to  20.000000
12/11/2012	4:17:25 PM	H2 MFC set to  0.000000
12/11/2012	4:17:25 PM	BCl3 MFC set to  0.000000
12/11/2012	4:17:25 PM	PH3 MFC set to  0.000000
12/11/2012	4:17:25 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:17:25 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:17:26 PM	Tube furnace set to 0
12/11/2012	4:17:56 PM	Helium valve closed
12/11/2012	4:17:56 PM	H2 valve closed
12/11/2012	4:17:56 PM	BCl3 valve closed
12/11/2012	4:17:56 PM	PH3 valve closed
12/11/2012	4:17:56 PM	SiCl4 pre valve closed
12/11/2012	4:17:56 PM	SiCl4 post valve closed
12/11/2012	4:17:56 PM	Bypass valve closed
12/11/2012	4:17:56 PM	Bubbler valve closed
12/11/2012	4:17:56 PM	Main Vac valve opened
12/11/2012	4:17:56 PM	Helium MFC set to  0.000000
12/11/2012	4:17:56 PM	H2 MFC set to  0.000000
12/11/2012	4:17:56 PM	BCl3 MFC set to  0.000000
12/11/2012	4:17:56 PM	PH3 MFC set to  0.000000
12/11/2012	4:17:56 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:17:56 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:17:56 PM	Tube furnace set to 0
12/11/2012	4:18:26 PM	H2 valve closed
12/11/2012	4:18:26 PM	BCl3 valve closed
12/11/2012	4:18:26 PM	PH3 valve closed
12/11/2012	4:18:26 PM	SiCl4 pre valve closed
12/11/2012	4:18:26 PM	SiCl4 post valve closed
12/11/2012	4:18:26 PM	Bypass valve closed
12/11/2012	4:18:26 PM	Bubbler valve closed
12/11/2012	4:18:26 PM	Helium valve opened
12/11/2012	4:18:26 PM	Main Vac valve opened
12/11/2012	4:18:26 PM	Helium MFC set to  20.000000
12/11/2012	4:18:26 PM	H2 MFC set to  0.000000
12/11/2012	4:18:26 PM	BCl3 MFC set to  0.000000
12/11/2012	4:18:26 PM	PH3 MFC set to  0.000000
12/11/2012	4:18:26 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:18:26 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:18:26 PM	Tube furnace set to 0
12/11/2012	4:18:56 PM	Helium valve closed
12/11/2012	4:18:56 PM	H2 valve closed
12/11/2012	4:18:56 PM	BCl3 valve closed
12/11/2012	4:18:56 PM	PH3 valve closed
12/11/2012	4:18:56 PM	SiCl4 pre valve closed
12/11/2012	4:18:56 PM	SiCl4 post valve closed
12/11/2012	4:18:56 PM	Bypass valve closed
12/11/2012	4:18:56 PM	Bubbler valve closed
12/11/2012	4:18:56 PM	Main Vac valve opened
12/11/2012	4:18:56 PM	Helium MFC set to  0.000000
12/11/2012	4:18:56 PM	H2 MFC set to  0.000000
12/11/2012	4:18:56 PM	BCl3 MFC set to  0.000000
12/11/2012	4:18:56 PM	PH3 MFC set to  0.000000
12/11/2012	4:18:56 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:18:56 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:18:56 PM	Tube furnace set to 0
12/11/2012	4:19:26 PM	H2 valve closed
12/11/2012	4:19:26 PM	BCl3 valve closed
12/11/2012	4:19:26 PM	PH3 valve closed
12/11/2012	4:19:26 PM	SiCl4 pre valve closed
12/11/2012	4:19:26 PM	SiCl4 post valve closed
12/11/2012	4:19:26 PM	Bypass valve closed
12/11/2012	4:19:26 PM	Bubbler valve closed
12/11/2012	4:19:26 PM	Helium valve opened
12/11/2012	4:19:26 PM	Main Vac valve opened
12/11/2012	4:19:26 PM	Helium MFC set to  20.000000
12/11/2012	4:19:26 PM	H2 MFC set to  0.000000
12/11/2012	4:19:26 PM	BCl3 MFC set to  0.000000
12/11/2012	4:19:26 PM	PH3 MFC set to  0.000000
12/11/2012	4:19:26 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:19:26 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:19:27 PM	Tube furnace set to 0
12/11/2012	4:19:57 PM	Helium valve closed
12/11/2012	4:19:57 PM	H2 valve closed
12/11/2012	4:19:57 PM	BCl3 valve closed
12/11/2012	4:19:57 PM	PH3 valve closed
12/11/2012	4:19:57 PM	SiCl4 pre valve closed
12/11/2012	4:19:57 PM	SiCl4 post valve closed
12/11/2012	4:19:57 PM	Bypass valve closed
12/11/2012	4:19:57 PM	Bubbler valve closed
12/11/2012	4:19:57 PM	Main Vac valve opened
12/11/2012	4:19:57 PM	Helium MFC set to  0.000000
12/11/2012	4:19:57 PM	H2 MFC set to  0.000000
12/11/2012	4:19:57 PM	BCl3 MFC set to  0.000000
12/11/2012	4:19:57 PM	PH3 MFC set to  0.000000
12/11/2012	4:19:57 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:19:57 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:19:57 PM	Tube furnace set to 0
12/11/2012	4:20:27 PM	H2 valve closed
12/11/2012	4:20:27 PM	BCl3 valve closed
12/11/2012	4:20:27 PM	PH3 valve closed
12/11/2012	4:20:27 PM	SiCl4 pre valve closed
12/11/2012	4:20:27 PM	SiCl4 post valve closed
12/11/2012	4:20:27 PM	Bypass valve closed
12/11/2012	4:20:27 PM	Bubbler valve closed
12/11/2012	4:20:27 PM	Helium valve opened
12/11/2012	4:20:27 PM	Main Vac valve opened
12/11/2012	4:20:27 PM	Helium MFC set to  20.000000
12/11/2012	4:20:27 PM	H2 MFC set to  0.000000
12/11/2012	4:20:27 PM	BCl3 MFC set to  0.000000
12/11/2012	4:20:27 PM	PH3 MFC set to  0.000000
12/11/2012	4:20:27 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:20:27 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:20:27 PM	Tube furnace set to 0
12/11/2012	4:20:57 PM	Helium valve closed
12/11/2012	4:20:57 PM	H2 valve closed
12/11/2012	4:20:57 PM	BCl3 valve closed
12/11/2012	4:20:57 PM	PH3 valve closed
12/11/2012	4:20:57 PM	SiCl4 pre valve closed
12/11/2012	4:20:57 PM	SiCl4 post valve closed
12/11/2012	4:20:57 PM	Bypass valve closed
12/11/2012	4:20:57 PM	Bubbler valve closed
12/11/2012	4:20:57 PM	Main Vac valve opened
12/11/2012	4:20:57 PM	Helium MFC set to  0.000000
12/11/2012	4:20:57 PM	H2 MFC set to  0.000000
12/11/2012	4:20:57 PM	BCl3 MFC set to  0.000000
12/11/2012	4:20:57 PM	PH3 MFC set to  0.000000
12/11/2012	4:20:57 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:20:57 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:20:57 PM	Tube furnace set to 0
12/11/2012	4:21:27 PM	H2 valve closed
12/11/2012	4:21:27 PM	BCl3 valve closed
12/11/2012	4:21:27 PM	PH3 valve closed
12/11/2012	4:21:27 PM	SiCl4 pre valve closed
12/11/2012	4:21:27 PM	SiCl4 post valve closed
12/11/2012	4:21:27 PM	Bypass valve closed
12/11/2012	4:21:27 PM	Bubbler valve closed
12/11/2012	4:21:27 PM	Helium valve opened
12/11/2012	4:21:27 PM	Main Vac valve opened
12/11/2012	4:21:27 PM	Helium MFC set to  20.000000
12/11/2012	4:21:27 PM	H2 MFC set to  0.000000
12/11/2012	4:21:27 PM	BCl3 MFC set to  0.000000
12/11/2012	4:21:27 PM	PH3 MFC set to  0.000000
12/11/2012	4:21:27 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:21:27 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:21:28 PM	Tube furnace set to 0
12/11/2012	4:21:58 PM	Helium valve closed
12/11/2012	4:21:58 PM	H2 valve closed
12/11/2012	4:21:58 PM	BCl3 valve closed
12/11/2012	4:21:58 PM	PH3 valve closed
12/11/2012	4:21:58 PM	SiCl4 pre valve closed
12/11/2012	4:21:58 PM	SiCl4 post valve closed
12/11/2012	4:21:58 PM	Bypass valve closed
12/11/2012	4:21:58 PM	Bubbler valve closed
12/11/2012	4:21:58 PM	Main Vac valve opened
12/11/2012	4:21:58 PM	Helium MFC set to  0.000000
12/11/2012	4:21:58 PM	H2 MFC set to  0.000000
12/11/2012	4:21:58 PM	BCl3 MFC set to  0.000000
12/11/2012	4:21:58 PM	PH3 MFC set to  0.000000
12/11/2012	4:21:58 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:21:58 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:21:58 PM	Tube furnace set to 0
12/11/2012	4:21:59 PM	Run finished at 4:21 PM
12/11/2012	4:21:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/11/2012	4:24:29 PM	Main Vac valve closed
12/11/2012	4:24:42 PM	Main Vac valve opened
12/11/2012	4:25:26 PM	Recipe started at 4:25 PM
12/11/2012	4:25:26 PM	Helium valve closed
12/11/2012	4:25:26 PM	H2 valve closed
12/11/2012	4:25:26 PM	BCl3 valve closed
12/11/2012	4:25:26 PM	PH3 valve closed
12/11/2012	4:25:26 PM	SiCl4 pre valve closed
12/11/2012	4:25:26 PM	SiCl4 post valve closed
12/11/2012	4:25:26 PM	Main Vac valve closed
12/11/2012	4:25:26 PM	Bypass valve closed
12/11/2012	4:25:26 PM	Bubbler valve closed
12/11/2012	4:25:26 PM	Helium MFC set to  0.000000
12/11/2012	4:25:26 PM	H2 MFC set to  0.000000
12/11/2012	4:25:26 PM	BCl3 MFC set to  0.000000
12/11/2012	4:25:26 PM	PH3 MFC set to  0.000000
12/11/2012	4:25:26 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:25:26 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:25:26 PM	Tube furnace set to 0
12/11/2012	4:25:29 PM	Helium valve closed
12/11/2012	4:25:29 PM	BCl3 valve closed
12/11/2012	4:25:30 PM	PH3 valve closed
12/11/2012	4:25:30 PM	SiCl4 pre valve closed
12/11/2012	4:25:30 PM	SiCl4 post valve closed
12/11/2012	4:25:30 PM	Main Vac valve closed
12/11/2012	4:25:30 PM	Bypass valve closed
12/11/2012	4:25:30 PM	Bubbler valve closed
12/11/2012	4:25:30 PM	H2 valve opened
12/11/2012	4:25:30 PM	Helium MFC set to  0.000000
12/11/2012	4:25:30 PM	H2 MFC set to  500.000000
12/11/2012	4:25:30 PM	BCl3 MFC set to  0.000000
12/11/2012	4:25:30 PM	PH3 MFC set to  0.000000
12/11/2012	4:25:30 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:25:30 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:25:30 PM	Tube furnace set to 0
12/11/2012	4:26:42 PM	Helium valve closed
12/11/2012	4:26:42 PM	BCl3 valve closed
12/11/2012	4:26:42 PM	PH3 valve closed
12/11/2012	4:26:42 PM	SiCl4 pre valve closed
12/11/2012	4:26:42 PM	SiCl4 post valve closed
12/11/2012	4:26:42 PM	Main Vac valve closed
12/11/2012	4:26:42 PM	Bypass valve closed
12/11/2012	4:26:42 PM	H2 valve opened
12/11/2012	4:26:42 PM	Bubbler valve opened
12/11/2012	4:26:42 PM	Helium MFC set to  0.000000
12/11/2012	4:26:42 PM	H2 MFC set to  500.000000
12/11/2012	4:26:42 PM	BCl3 MFC set to  0.000000
12/11/2012	4:26:42 PM	PH3 MFC set to  0.000000
12/11/2012	4:26:42 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:26:42 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:26:42 PM	Tube furnace set to 0
12/11/2012	4:26:43 PM	Helium valve closed
12/11/2012	4:26:43 PM	BCl3 valve closed
12/11/2012	4:26:44 PM	PH3 valve closed
12/11/2012	4:26:44 PM	SiCl4 pre valve closed
12/11/2012	4:26:44 PM	SiCl4 post valve closed
12/11/2012	4:26:44 PM	Main Vac valve closed
12/11/2012	4:26:44 PM	Bypass valve closed
12/11/2012	4:26:44 PM	H2 valve opened
12/11/2012	4:26:44 PM	Bubbler valve opened
12/11/2012	4:26:44 PM	Helium MFC set to  0.000000
12/11/2012	4:26:44 PM	H2 MFC set to  500.000000
12/11/2012	4:26:44 PM	BCl3 MFC set to  0.000000
12/11/2012	4:26:44 PM	PH3 MFC set to  0.000000
12/11/2012	4:26:44 PM	SiCl4 MFC set to  0.000000
12/11/2012	4:26:44 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:26:44 PM	Tube furnace set to 1000
12/11/2012	4:56:44 PM	Helium valve closed
12/11/2012	4:56:44 PM	BCl3 valve closed
12/11/2012	4:56:44 PM	Main Vac valve closed
12/11/2012	4:56:44 PM	Bypass valve closed
12/11/2012	4:56:44 PM	H2 valve opened
12/11/2012	4:56:44 PM	PH3 valve opened
12/11/2012	4:56:44 PM	SiCl4 pre valve opened
12/11/2012	4:56:44 PM	SiCl4 post valve opened
12/11/2012	4:56:44 PM	Bubbler valve opened
12/11/2012	4:56:44 PM	Helium MFC set to  0.000000
12/11/2012	4:56:44 PM	H2 MFC set to  500.000000
12/11/2012	4:56:44 PM	BCl3 MFC set to  0.000000
12/11/2012	4:56:44 PM	PH3 MFC set to  0.300000
12/11/2012	4:56:44 PM	SiCl4 MFC set to  25.000000
12/11/2012	4:56:44 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	4:56:44 PM	Tube furnace set to 1000
12/11/2012	5:11:44 PM	Helium valve closed
12/11/2012	5:11:44 PM	BCl3 valve closed
12/11/2012	5:11:44 PM	PH3 valve closed
12/11/2012	5:11:44 PM	SiCl4 pre valve closed
12/11/2012	5:11:44 PM	SiCl4 post valve closed
12/11/2012	5:11:44 PM	Main Vac valve closed
12/11/2012	5:11:44 PM	Bypass valve closed
12/11/2012	5:11:44 PM	H2 valve opened
12/11/2012	5:11:44 PM	Bubbler valve opened
12/11/2012	5:11:44 PM	Helium MFC set to  0.000000
12/11/2012	5:11:44 PM	H2 MFC set to  500.000000
12/11/2012	5:11:44 PM	BCl3 MFC set to  0.000000
12/11/2012	5:11:44 PM	PH3 MFC set to  0.000000
12/11/2012	5:11:44 PM	SiCl4 MFC set to  0.000000
12/11/2012	5:11:44 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	5:11:44 PM	Tube furnace set to 750
12/11/2012	5:16:44 PM	H2 valve closed
12/11/2012	5:16:44 PM	BCl3 valve closed
12/11/2012	5:16:44 PM	PH3 valve closed
12/11/2012	5:16:44 PM	SiCl4 pre valve closed
12/11/2012	5:16:44 PM	SiCl4 post valve closed
12/11/2012	5:16:44 PM	Main Vac valve closed
12/11/2012	5:16:44 PM	Bypass valve closed
12/11/2012	5:16:44 PM	Helium valve opened
12/11/2012	5:16:44 PM	Bubbler valve opened
12/11/2012	5:16:44 PM	Helium MFC set to  500.000000
12/11/2012	5:16:44 PM	H2 MFC set to  0.000000
12/11/2012	5:16:44 PM	BCl3 MFC set to  0.000000
12/11/2012	5:16:44 PM	PH3 MFC set to  0.000000
12/11/2012	5:16:44 PM	SiCl4 MFC set to  0.000000
12/11/2012	5:16:44 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	5:16:44 PM	Tube furnace set to 0
12/11/2012	5:36:45 PM	Helium valve closed
12/11/2012	5:36:45 PM	H2 valve closed
12/11/2012	5:36:45 PM	BCl3 valve closed
12/11/2012	5:36:45 PM	PH3 valve closed
12/11/2012	5:36:45 PM	SiCl4 pre valve closed
12/11/2012	5:36:45 PM	SiCl4 post valve closed
12/11/2012	5:36:45 PM	Main Vac valve closed
12/11/2012	5:36:45 PM	Bypass valve closed
12/11/2012	5:36:45 PM	Bubbler valve closed
12/11/2012	5:36:45 PM	Helium MFC set to  0.000000
12/11/2012	5:36:45 PM	H2 MFC set to  0.000000
12/11/2012	5:36:45 PM	BCl3 MFC set to  0.000000
12/11/2012	5:36:45 PM	PH3 MFC set to  0.000000
12/11/2012	5:36:45 PM	SiCl4 MFC set to  0.000000
12/11/2012	5:36:45 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	5:36:45 PM	Tube furnace set to 0
12/11/2012	5:36:46 PM	Run finished at 5:36 PM
12/11/2012	8:01:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/11/2012	8:01:51 PM	Recipe started at 8:01 PM
12/11/2012	8:01:51 PM	Helium valve closed
12/11/2012	8:01:51 PM	H2 valve closed
12/11/2012	8:01:51 PM	BCl3 valve closed
12/11/2012	8:01:51 PM	PH3 valve closed
12/11/2012	8:01:51 PM	SiCl4 pre valve closed
12/11/2012	8:01:51 PM	SiCl4 post valve closed
12/11/2012	8:01:51 PM	Main Vac valve closed
12/11/2012	8:01:51 PM	Bypass valve closed
12/11/2012	8:01:51 PM	Bubbler valve closed
12/11/2012	8:01:51 PM	Helium MFC set to  0.000000
12/11/2012	8:01:51 PM	H2 MFC set to  0.000000
12/11/2012	8:01:52 PM	BCl3 MFC set to  0.000000
12/11/2012	8:01:52 PM	PH3 MFC set to  0.000000
12/11/2012	8:01:52 PM	SiCl4 MFC set to  0.000000
12/11/2012	8:01:52 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:01:52 PM	Tube furnace set to 0
12/11/2012	8:01:55 PM	H2 valve closed
12/11/2012	8:01:55 PM	BCl3 valve closed
12/11/2012	8:01:55 PM	PH3 valve closed
12/11/2012	8:01:55 PM	SiCl4 pre valve closed
12/11/2012	8:01:55 PM	SiCl4 post valve closed
12/11/2012	8:01:55 PM	Main Vac valve closed
12/11/2012	8:01:55 PM	Bypass valve closed
12/11/2012	8:01:55 PM	Bubbler valve closed
12/11/2012	8:01:55 PM	Helium valve opened
12/11/2012	8:01:55 PM	Helium MFC set to  500.000000
12/11/2012	8:01:55 PM	H2 MFC set to  0.000000
12/11/2012	8:01:55 PM	BCl3 MFC set to  0.000000
12/11/2012	8:01:55 PM	PH3 MFC set to  0.000000
12/11/2012	8:01:55 PM	SiCl4 MFC set to  0.000000
12/11/2012	8:01:55 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:01:55 PM	Tube furnace set to 0
12/11/2012	8:02:01 PM	Helium valve closed
12/11/2012	8:02:01 PM	H2 valve closed
12/11/2012	8:02:01 PM	BCl3 valve closed
12/11/2012	8:02:01 PM	PH3 valve closed
12/11/2012	8:02:01 PM	SiCl4 pre valve closed
12/11/2012	8:02:01 PM	SiCl4 post valve closed
12/11/2012	8:02:01 PM	Main Vac valve closed
12/11/2012	8:02:01 PM	Bypass valve closed
12/11/2012	8:02:01 PM	Bubbler valve closed
12/11/2012	8:02:01 PM	Helium MFC set to  0.000000
12/11/2012	8:02:01 PM	H2 MFC set to  0.000000
12/11/2012	8:02:01 PM	BCl3 MFC set to  0.000000
12/11/2012	8:02:01 PM	PH3 MFC set to  0.000000
12/11/2012	8:02:01 PM	SiCl4 MFC set to  0.000000
12/11/2012	8:02:01 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:02:01 PM	Tube furnace set to 0
12/11/2012	8:02:02 PM	Run finished at 8:02 PM
12/11/2012	8:02:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/11/2012	8:03:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/11/2012	8:03:52 PM	Recipe started at 8:03 PM
12/11/2012	8:03:52 PM	Helium valve closed
12/11/2012	8:03:52 PM	H2 valve closed
12/11/2012	8:03:52 PM	BCl3 valve closed
12/11/2012	8:03:52 PM	PH3 valve closed
12/11/2012	8:03:52 PM	SiCl4 pre valve closed
12/11/2012	8:03:52 PM	SiCl4 post valve closed
12/11/2012	8:03:52 PM	Main Vac valve closed
12/11/2012	8:03:52 PM	Bubbler valve closed
12/11/2012	8:03:52 PM	Bypass valve opened
12/11/2012	8:03:52 PM	Helium MFC set to  0.000000
12/11/2012	8:03:52 PM	H2 MFC set to  0.000000
12/11/2012	8:03:52 PM	BCl3 MFC set to  0.000000
12/11/2012	8:03:52 PM	PH3 MFC set to  0.000000
12/11/2012	8:03:52 PM	SiCl4 MFC set to  0.000000
12/11/2012	8:03:52 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:03:52 PM	Tube furnace set to 0
12/11/2012	8:05:11 PM	Helium valve closed
12/11/2012	8:05:11 PM	H2 valve closed
12/11/2012	8:05:11 PM	BCl3 valve closed
12/11/2012	8:05:11 PM	PH3 valve closed
12/11/2012	8:05:11 PM	SiCl4 pre valve closed
12/11/2012	8:05:11 PM	SiCl4 post valve closed
12/11/2012	8:05:11 PM	Main Vac valve closed
12/11/2012	8:05:11 PM	Bubbler valve closed
12/11/2012	8:05:11 PM	Bypass valve opened
12/11/2012	8:05:11 PM	Helium MFC set to  0.000000
12/11/2012	8:05:11 PM	H2 MFC set to  0.000000
12/11/2012	8:05:11 PM	BCl3 MFC set to  0.000000
12/11/2012	8:05:11 PM	PH3 MFC set to  0.000000
12/11/2012	8:05:11 PM	SiCl4 MFC set to  0.000000
12/11/2012	8:05:11 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:05:12 PM	Tube furnace set to 0
12/11/2012	8:06:12 PM	Helium valve closed
12/11/2012	8:06:12 PM	H2 valve closed
12/11/2012	8:06:12 PM	BCl3 valve closed
12/11/2012	8:06:12 PM	PH3 valve closed
12/11/2012	8:06:12 PM	SiCl4 pre valve closed
12/11/2012	8:06:12 PM	SiCl4 post valve closed
12/11/2012	8:06:12 PM	Bypass valve closed
12/11/2012	8:06:12 PM	Bubbler valve closed
12/11/2012	8:06:12 PM	Main Vac valve opened
12/11/2012	8:06:12 PM	Helium MFC set to  0.000000
12/11/2012	8:06:12 PM	H2 MFC set to  0.000000
12/11/2012	8:06:12 PM	BCl3 MFC set to  0.000000
12/11/2012	8:06:12 PM	PH3 MFC set to  0.000000
12/11/2012	8:06:12 PM	SiCl4 MFC set to  0.000000
12/11/2012	8:06:12 PM	Bypass solenoid MFC set to  0.000000
12/11/2012	8:06:12 PM	Tube furnace set to 0
12/11/2012	8:06:13 PM	Run finished at 8:06 PM
12/11/2012	8:06:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
